Abstract: A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft actuated with a single three-position air cylinder to selectively close a process chamber opening and a transfer chamber opening or fully open both the openings to allow an object to pass therethrough. A lever member is secured to the single shaft. A roller supported by the lever member is kept in engagement with a cam groove of a cam member. A cam support member for supporting the cam member is connected to the piston rod of the three-position air cylinder. A spring is interposed between the lever member and the cam support member. When the piston rod is in the first (lower extremity) position, both the transfer chamber-side valve element and the process chamber-side valve element fully open the transfer chamber opening and the process chamber opening, respectively.

Abstract: In a gate valve having a rectangular gate, generation of flection at opposite end portions due to bending moment applied to the gate is suppressed easily. For this purpose, in the gate valve in which a central portion of a longer side of the rectangular gate is mounted to a tip end of a shaft operated by driving of a cylinder device and the gate is pressed against a valve seat provided around a rectangular valve opening by tilting the shaft after the gate is moved to a position facing the valve opening by movement of the shaft by driving of the cylinder device, the gate is formed to have an uneven wall thickness including a large thickness in a vicinity of a fulcrum portion connected to the shaft and a small thickness on each of opposite end portion sides.

Abstract: A ring-shaped low load seal attached into a ring-shaped dovetail groove having an opening portion, a first side wall face, a second side wall face, and a bottom wall face. This seal has a trileaf cross-sectional configuration composed of a first arc portion, a second arc portion, a protruding portion, and a concave portion disposed between the first arc portion and the second arc portion.

Abstract: An opening/closing valve comprises a valve body having a first port and a second port for allowing a pressure fluid to flow therethrough, a valve disk for opening/closing a communicating passage between the first port and the second port in accordance with a displacement action of a piston rod, first to third heaters provided on an outer wall surface of the valve body, for heating the valve body, and thermistors for controlling the heating temperatures of the first to third heaters.

Abstract: A gate 3 for opening and closing an opening 2 of a chamber 1 is fixed to a top end of an arm 7 swung between a position facing the opening and a retreating position on the side thereof. A base end of the arm 7 is supported by an output shaft 10 of a fluid pressure cylinder 8 driven in parallel with a direction in which the gate comes into contact with and is separated from the opening 2, and a cam follower 12 fit in a guide groove 14 of a machine frame 6 is provided at the base end of the arm 7. The guide groove is formed by an axial-direction groove 14a for carrying the gate 3 at the position facing the opening 2 and then moving it when the gate is located at a position in the vicinity of the opening of the chamber 1, and a slant-periphery direction groove 14b connected thereto for retreating the gate to the side of the opening.

Abstract: A high vacuum valve prevents the transfer of heat from a valve plug of a valve via a valve shaft to a low temperature portion. The high vacuum valve is constructed such that the valve plug arrives at a position opposed to a valve seat in accordance with rectilinear motion of the valve shaft and then the valve plug is pressed against the valve seat in accordance with swinging motion of the valve shaft to close the valve.

Abstract: A gate valve is disclosed comprising an elevatable lever member connected to a piston rod, a displacement member for making up and down movements integrally with the lever member and being tiltably disposed about supporting rollers acting as a pivot point or fulcrum at an end position of displacement, spring members interveningly disposed between the lever member and the displacement member, pin members fixed into side surfaces of the lever member, and engaging grooves formed in side surfaces of the displacement member and engaging with the pin members.

Abstract: An opening/closing valve has an attachment/detachment mechanism for detachably interconnecting a valve body and a bonnet. The attachment/detachment mechanism comprises a first annular groove provided at a connecting recess of the valve body, a second annular groove provided at a connecting projection of the bonnet, and an elastic semiannular member. The elastic semiannular member is installed to the first annular groove and the second annular groove respectively when the valve body and the bonnet are interconnected.

Abstract: In a gate valve having a rectangular gate, generation of flection &dgr; at opposite end portions due to bending moment applied to the gate is suppressed easily. For this purpose, in the gate valve in which a central portion of a longer side of the rectangular gate 5 is mounted to a tip end of a shaft 6 operated by driving of a cylinder device 2 and the gate 5 is pressed against a valve seat 8 provided around a rectangular valve opening 7 by tilting the shaft 6 after the gate 5 is moved to a position facing the valve opening 7 by movement of the shaft 6 by driving of the cylinder device 2, the gate 5 is formed to have an uneven wall thickness including a large thickness in a vicinity of a fulcrum portion connected to the shaft 6 and a small thickness on each of opposite end portion sides.

Abstract: An opening/closing valve comprises a valve body having a first port and a second port for allowing a pressure fluid to flow therethrough, a valve disk for opening/closing a communicating passage between the first port and the second port in accordance with a displacement action of a piston rod, first to third heaters provided on an outer wall surface of the valve body, for heating the valve body, and thermistors for controlling the heating temperatures of the first to third heaters.

Abstract: A gate valve comprises a valve rod for making displacement in accordance with a driving action of a cylinder mechanism; a guide shaft for guiding the valve rod; a valve disk for opening/closing a passage in accordance with a displacement action of the valve rod; a rack connected to the valve rod, for making displacement integrally with the valve rod; a pinion rotatably supported by a casing, for meshing with the rack; and a pillow member connected to the valve disk and formed with a male thread for making engagement with a female thread formed on an inner circumferential surface of the pinion.

Abstract: A gate valve comprises a valve rod for making displacement in accordance with a driving action of a cylinder mechanism; a guide shaft for guiding the valve rod; a valve disk for opening/closing a passage in accordance with a displacement action of the valve rod; a rack connected to the valve rod, for making displacement integrally with the valve rod; a pinion rotatably supported by a casing, for meshing with the rack; and a pillow member connected to the valve disk and formed with a male thread for making engagement with a female thread formed on an inner circumferential surface of the pinion.

Abstract: A smooth vent valve in which an on-off valve and a flow control valve are provided in series and arranged to be capable of being operated by respective actuating mechanisms, thereby accurately performing the on-off operation of the on-off valve and the flow rate control of the flow control valve. The smooth vent valve (11) has an on-off valve (8) and a flow control valve (9), which are coaxially provided between an inlet port (18) and outlet port (19) of a valve body (13 to 15). The on-off valve (8) and the flow control valve (9) are placed in series. An actuating mechanism for the on-off valve (8) and an actuating mechanism for the flow control valve (9) are formed separately from each other. When the on-off valve is in an open position, the flow control valve can be switched between a throttling position and an open position while continuously changing the flow rate.

Abstract: A high-vacuum valve arranged to prevent conduction of heat from a valve element to a low-temperature part through a valve shaft. After the valve element has been moved to a position facing opposite to a valve seat by rectilinear motion of the valve shaft, the valve element is pressed against the valve seat to close the valve by pivotal motion of the valve shaft. A heater is provided in the valve shaft in close contact with it. Wiring is connected to the heater to supply it with electric power from outside the high-vacuum valve.

Abstract: A three-port valve capable of switching flow paths from one to another without undesired communication between the switched flow paths. A first valve seat (55) and a second valve seat (56) are disposed opposite to each other in a central valve chamber (42). A first passage (49) extending through the first valve seat (55) is communicated with a first port (45). A second passage (51) extending through the second valve seat (56) is communicated with a second port (47). The central valve chamber (42) is communicated with a third port (46). A valve body having a first seal surface (76) and a second seal surface (77) is disposed between the first valve seat (55) and the second valve seat (56). The distance between the first and second seal surfaces (76 and 77) of the valve body is variable. At least one of the seal surfaces (76 and 77) of the valve body is always placed in close contact with the first valve seat (55) or the second valve seat (56).

Abstract: To reduce the axial length of a slow exhaust valve and thus the size of the valve, a secondary valve seat and a secondary valve body constituting a secondary valve mechanism for restrictively opening a channel connecting a chamber port and a pump port during the first half of the exhaust process in order to limit the exhaust speed are incorporated in a primary valve body in a primary valve mechanism; a secondary-valve-body drive mechanism and a pressure-acting secondary chamber are incorporated inside a primary-valve-body drive member in the primary valve mechanism; and a secondary shaft that connects the secondary valve body and the secondary-valve-body drive member together is disposed inside a primary shaft.

Abstract: A high-vacuum valve in which a seal portion of the inner wall of an annular space for interposing a metallic annular gasket is subjected to an anodic oxidation coating treatment other than the sulfuric acid anodic oxidation coating treatment to enhance the compression strength of the seal portion and to prevent the seal portion from being damaged, deformed and sticking to the metallic annular gasket. The high-vacuum valve has a plurality of ports communicated with a valve chamber in a valve body through respective tubular portions. A valve seat is formed in a flow path connecting the valve chamber and one of the tubular portions. The flow path is closed by bringing a valve element into contact with the valve seat, and the flow path is opened by separating the valve element from the valve seat.

Abstract: In a high-vacuum valve whose valve body is brought in and out of contact with a valve seat, a metal diaphragm facing the valve seat defines a valve seat, an actuating mechanism to open and close the valve body is provided on the reverse side of the diaphragm outside the valve chamber, and a spring is provided between the actuating mechanism and diaphragm in a position corresponding to the position of the valve seat. This high-vacuum valve eliminates the stagnation of gas in its passage, reduces the surface area of its passage, and precludes the detrimental effect of the powder of abraded metal.

Abstract: A gas cleaner dehumidifies a chamber or other container, into which air or other gases are supplied, in order to realize the minimizing of the moisture held therein, which is an indispensable requisite to quick evacuation. A hermetically sealed container of a thermally conductive material is immersed in a coolant filled in a coolant container. Filters of a thermally conductive sintered metal disposed in the hermetically sealed container cools and liquefies the gas admitted through a supply pipe and thereby removes the unwanted moisture.

Abstract: In a two-port solenoid valve having a valve head to open and close the valve seat operated by an electromagnet, the valve member is slidably connected to the valve housing by means of a stem and which cross-sectional area is somewhat smaller than the effective area of the valve port so that a force to close the valve is developed by the pressure of the fluid on the valve inlet side when the valve is closed. When current is momentarily passed to the electromagnet, the armature of the magnet moves the valve head over such a small distance as is just enough to slightly move the valve head away from the valve seat, thereby causing the fluid pressure in the outlet, this pressure works thrust force on the valve head to opening direction, and the valve is hold in the fully opened position.