Abstract: A base board floating arm includes a fixing base, at least one carrier board, and at least one buckling set. The carrier board has a connecting section, a buckling section, a carrier section, and a carrier surface. The connecting section is connected to the fixing base; the carrier section connects the connecting section and the buckling section. An airflow channel is formed within the carrier board. The carrier surface includes a surface of the carrier board that faces upward, and multiple airflow outlets are formed on the carrier surface. The airflow outlets fluidly communicate with the airflow channel. The buckling set has a buckling unit movably mounted on the buckling section. The buckling unit and the carrier board selectively fix the base board. Thereby the base board floating arm is capable of preventing the base board from vibrating or being wrinkled.

Abstract: A wafer adsorption device has a base, a guiding ring, and a cover. An inlet is formed through the base. The guiding ring is mounted on the base and includes a ring body and multiple bumps, the bumps protrude from a top surface of the ring body and are spaced from each other. Multiple flow channels are recessed from a surface of the cover, and each one of the flow channels is arc-shaped. An end of each one of the flow channels is connected to each other and fluidly communicates to the inlet, and another end extends outward. The cover is mounted in the ring body and securely mounted on the base, and the cover is spaced apart from the guiding ring. Therefore, when placing a wafer on the wafer adsorption device, a contacting area of the wafer may be reduced to further reduce a probability of scratching.

Abstract: A load port includes a mounting base having: a movable plate; an opening portion mounted to a side of the mounting base through a board and having a driving assembly mounted on the board; and a movable door having a door panel, a lid-picking device and an inspection device mounted on a side surface of the door panel, and a connecting rod. The door panel is connected to the driving assembly and is movable relative to the board. The lid-picking device selectively closes a mounting opening of the board. When the load port carries a front opening unified pod (FOUP), it is able to inspect whether a wafer in the FOUP protrudes, tilts or overlaps with another wafer, and an amount of deformation of the wafer at the same time of opening the movable door, so as to reduce processing steps and improve production efficiency.

Abstract: A wafer suspension fork has a body and a cover. The body has a connection portion having multiple inlets and two arms being symmetrical in shape and protruding from the connection portion. Each arm has a holding surface, a flowing surface, multiple inner and outer inclined holes formed in the holding surface arranged along a protruding direction, an inner flowing channel formed in the flowing surface and communicating with the inner inclined holes and the inlets, and an outer flowing channel formed in the flowing surface and communicating with the outer inclined holes and the inlets. The cover is fixed to a bottom surface of the body. A wafer is able to be suspended and held above the two arms by adjusting pressure of gas flowing out from the inner and outer inclined holes and is able to be moved free from being scratched.

Abstract: A secure donation system is connectible to information processing device of donor, donee, and specific store via network. The system includes: a database for storing donation intention data of donor, requirement data of donee, and merchandise and/or service transaction data of specific store; a resource allocation module for generating donee data meeting donation intention data by analyzing and matching donation intention data with requirement data; a donation module for donor to choose donee from donee data meeting donation intention data generated by resource allocation module and for generating donation usage certificate after confirming donation data including donation intention data and donee data; and an authorization module for transmitting donation usage certificate to electronic device of chosen donee, so as for donee to perform verification and shopping in specific store via electronic device. Besides, a secure donation method having mechanisms of requirement matching and postpaid is also provided.