Patents by Inventor Tsung-Fu Yao

Tsung-Fu Yao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10712364
    Abstract: An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.
    Type: Grant
    Filed: November 3, 2016
    Date of Patent: July 14, 2020
    Assignee: Board of Regents, The University of Texas Systems
    Inventors: Michael Cullinan, Tsung-Fu Yao, Andrew Duenner
  • Publication number: 20180321277
    Abstract: An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.
    Type: Application
    Filed: November 3, 2016
    Publication date: November 8, 2018
    Inventors: Michael CULLINAN, Tsung-Fu YAO, Andrew DUENNER
  • Publication number: 20180321276
    Abstract: An example metrology device can include a plurality microelectromechanical (MEMS) devices, where each of the MEMS devices has a probe, and a plurality of flexure elements configured to independently displace the MEMS devices. Each of the flexure elements can be coupled to a respective MEMS device, and each of the flexure elements can be configured to displace the respective MEMS device in at least one direction.
    Type: Application
    Filed: November 3, 2016
    Publication date: November 8, 2018
    Inventors: Michael Cullinan, Tsung-Fu Yao