Patents by Inventor Tsung-Han CHUANG
Tsung-Han CHUANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240087877Abstract: A backside metallized compound semiconductor device includes a compound semiconductor wafer and a metal layered structure. The compound semiconductor wafer includes a substrate having opposite front and back surfaces, and a ground pad structure formed on the front surface. The substrate is formed with a via extending from the back surface to the front surface to expose a side wall of the substrate and a portion of the ground pad structure. The metal layered structure is disposed on the back surface, and covers the side wall and the portion of the ground pad structure. The metal layered structure includes an adhesion layer, a seed layer, a gold layer, and an electroplated copper layer that are formed on the back surface in such order. The method for manufacturing the backside metallized compound semiconductor device is also disclosed.Type: ApplicationFiled: November 20, 2023Publication date: March 14, 2024Inventors: Tsung-Te CHIU, Kechuang LIN, Houng-Chi WEI, Chia-Chu KUO, Bing-Han CHUANG
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Publication number: 20230420520Abstract: In an embodiment, a device includes: first nanostructures; a first undoped semiconductor layer contacting a first dummy region of the first nanostructures; a first spacer on the first undoped semiconductor layer; a first source/drain region on the first spacer, the first source/drain region contacting a first channel region of the first nanostructures; and a first gate structure wrapped around the first channel region and the first dummy region of the first nanostructures.Type: ApplicationFiled: January 5, 2023Publication date: December 28, 2023Inventors: Tsung-Han Chuang, Zhi-Chang Lin, Shih-Cheng Chen, Jung-Hung Chang, Chien Ning Yao, Kai-Lin Chuang, Kuo-Cheng Chiang, Chih-Hao Wang
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Publication number: 20230420513Abstract: An integrated circuit includes a nanostructure transistor including a plurality of first semiconductor nanostructures over a substrate and a source/drain region in contact with each of the semiconductor nanostructures. The integrated circuit includes a fin sidewall spacer laterally bounding a lower portion of the source/drain region. The integrated circuit also includes a bottom isolation structure electrically isolating the source/drain region from the semiconductor substrate.Type: ApplicationFiled: June 27, 2022Publication date: December 28, 2023Inventors: Jung-Hung CHANG, Zhi-Chang LIN, Shih-Cheng CHEN, Tsung-Han CHUANG, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20230411527Abstract: A device includes a channel layer, a gate structure, a first source/drain epitaxial structure, a second source/drain epitaxial structure, and a sidewall spacer. The channel layer is over a substrate. The gate structure wraps around the channel layer. The first source/drain epitaxial structure and the second source/drain epitaxial structure are on opposite sides of the channel layer. The sidewall spacer is on a sidewall of the first source/drain epitaxial structure and includes a first dielectric layer and a second dielectric layer over the first dielectric layer and in contact with first source/drain epitaxial structure. The first dielectric layer and the second dielectric layer include different materials.Type: ApplicationFiled: June 17, 2022Publication date: December 21, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Cheng CHEN, Zhi-Chang LIN, Jung-Hung CHANG, Chien Ning YAO, Tsung-Han CHUANG, Kai-Lin CHUANG, Kuo-Cheng CHIANG
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Publication number: 20230395655Abstract: Provided are a semiconductor device and a method of forming the same. The semiconductor device includes at least two active strip regions, a hybrid fin structure, and a gate stack. The hybrid fin structure is disposed between the at least two active strip regions. The gate stack is across the at least two active strip regions and the hybrid fin structure. A portion of the hybrid fin structure exposed by the gate stack is free of a high dielectric constant material.Type: ApplicationFiled: June 5, 2022Publication date: December 7, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Cheng Chen, Zhi-Chang Lin, Jung-Hung Chang, Chien-Ning Yao, Tsung-Han Chuang, Kuo-Cheng Chiang, Chih-Hao Wang
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Publication number: 20230369456Abstract: A semiconductor device with back-side contact structures and a method of fabricating the same are disclosed. The semiconductor device includes first and second S/D regions, a stack of nanostructured semiconductor layers disposed adjacent to the first S/D region, a gate structure surrounding each of the nanostructured semiconductor layers, a first pair of spacers disposed on opposite sidewalls of the first S/D region, a second pair of spacers disposed on opposite sidewalls of the second S/D region, a third pair of spacers disposed on opposite sidewalls of the gate structure, a first contact structure disposed on a first surface of the first S/D region, and a second contact structure disposed on a second surface of the first S/D region. The first and second surfaces are opposite to each other. The first pair of spacers are disposed on opposite sidewalls of the second contact structure.Type: ApplicationFiled: March 10, 2023Publication date: November 16, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Zhi-Chang Lin, Jung-Hung Chang, Shih-Cheng Chen, Chih-Hao Wang, Chien Ning Yao, Tsung-Han Chuang, Kuo-Cheng Chiang
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Publication number: 20230197856Abstract: A semiconductor device structure and method for forming the same are provided. The semiconductor device structure includes a plurality of first nanostructures stacked over a substrate in a vertical direction. The semiconductor device structure also includes a first bottom layer formed adjacent to the first nanostructures, and a first dielectric layer formed over the first bottom layer. The semiconductor device structure further includes a first source/drain (S/D) structure formed over the first dielectric layer, and the first S/D structure is isolated from the first bottom layer by the first dielectric layer.Type: ApplicationFiled: March 3, 2022Publication date: June 22, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Cheng CHEN, Zhi-Chang LIN, Jung-Hung CHANG, Chien-Ning YAO, Tsung-Han CHUANG, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20230178600Abstract: A method for forming a semiconductor device structure is provided. The semiconductor device structure includes a plurality of first nanostructures stacked over a substrate in a vertical direction. The semiconductor device structure includes a first bottom layer formed adjacent to the first nanostructures, and a first insulating layer formed over the first bottom layer. The semiconductor device structure includes a first source/drain (S/D) structure formed over the first insulating layer, and the first insulating layer is in direct contact with one of the first nanostructures.Type: ApplicationFiled: May 16, 2022Publication date: June 8, 2023Inventors: Tsung-Han Chuang, Zhi-Chang Lin, Shih-Cheng Chen, Jung-Hung Chang, Chien Ning Yao, Kai-Lin Chuang, Kuo-Cheng Chiang, Chih-Hao Wang
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Publication number: 20230144099Abstract: Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes a substrate and a bottom isolation feature formed over the substrate. The semiconductor structure also includes a bottom semiconductor layer formed over the bottom isolation feature and nanostructures formed over the bottom semiconductor layer. The semiconductor structure also includes a source/drain structure attached to the nanostructures and covering a portion of the bottom isolation feature.Type: ApplicationFiled: February 16, 2022Publication date: May 11, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Cheng CHEN, Zhi-Chang LIN, Jung-Hung CHANG, Chien-Ning YAO, Tsung-Han CHUANG, Kuo-Cheng CHIANG
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Publication number: 20230113269Abstract: A method for forming a semiconductor device structure is provided. The semiconductor device structure includes a plurality of first nanostructures stacked over a substrate in a vertical direction. The semiconductor device structure also includes a first bottom layer formed adjacent to the first nanostructures, and a first dielectric liner layer formed over the first bottom layer and adjacent to the first nanostructures. The semiconductor device structure further includes a first source/drain (S/D) structure formed over the first dielectric liner layer, and the first S/D structure is isolated from the first bottom layer by the first dielectric liner layer.Type: ApplicationFiled: March 3, 2022Publication date: April 13, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jung-Hung CHANG, Zhi-Chang LIN, Shih-Cheng CHEN, Chien-Ning YAO, Tsung-Han CHUANG, Kai-Lin CHUANG, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20230065208Abstract: A device includes a substrate, a first nanostructure channel above the substrate and a second nanostructure channel between the first nanostructure channel and the substrate. An inner spacer is between the first nanostructure channel and the second nanostructure channel. A gate structure abuts the first nanostructure channel, the second nanostructure channel and the inner spacer. A liner layer is between the inner spacer and the gate structure.Type: ApplicationFiled: August 31, 2021Publication date: March 2, 2023Inventors: Tsung-Han CHUANG, Zhi-Chang LIN, Shih-Cheng CHEN, Jung-Hung CHANG, Chien Ning YAO, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20230028900Abstract: An integrated circuit includes a first nanostructure transistor including a plurality of first semiconductor nanostructures over a substrate and a source/drain region in contact with each of the first semiconductor nanostructures. The integrated circuit includes a second nanostructure transistor including a plurality of second semiconductor nanostructures and a second source/drain region in contact with one or more of the second semiconductor nanostructures but not in contact with one or more other second semiconductor nanostructures.Type: ApplicationFiled: March 11, 2022Publication date: January 26, 2023Inventors: Zhi-Chang LIN, Chien Ning YAO, Shih-Cheng CHEN, Jung-Hung CHANG, Tsung-Han CHUANG, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20220416036Abstract: A device includes a substrate. A first channel region of a first transistor overlies the substrate and a source/drain region is in contact with the first channel region. The source/drain region is adjacent to the first channel region along a first direction, and the source/drain region has a first surface opposite the substrate and side surfaces extending from the first surface. A dielectric fin structure is adjacent to the source/drain region along a second direction that is transverse to the first direction, and the dielectric fin structure has an upper surface, a lower surface, and an intermediate surface that is disposed between the upper and lower surfaces. A silicide layer is disposed on the first surface and the side surfaces of the source/drain region and on the intermediate surface of the dielectric fin structure.Type: ApplicationFiled: January 14, 2022Publication date: December 29, 2022Inventors: Shih-Cheng CHEN, Zhi-Chang LIN, Jung-Hung CHANG, Chien-Ning YAO, Tsung-Han CHUANG, Kuo-Cheng CHIANG, Chih-Hao WANG
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Patent number: 11458533Abstract: A measuring device includes a furnace, a draining vessel, a loader and a computing system for physical properties. The draining vessel with molten metal fluid is in the furnace. The loader accumulates the molten metal fluid from the draining vessel. The computing system includes a recording unit, transform unit, computing unit and processor. The recording unit records the vessel information. By the assumed physical parameters and the vessel information, the transform unit transforms a weight of the molten metal fluid in the loader into a first length criterion, and the computing unit simulates the flowing of the molten metal fluid to have a second length criterion. The processor minimizes the difference of the first and the second length criterion by changing the assumed physical parameters. The physical properties of the molten metal fluid are determined when the difference is minimized.Type: GrantFiled: September 2, 2020Date of Patent: October 4, 2022Assignee: National Central UniversityInventors: Chih-Ang Chung, Ya-Huan Lee, Tsung-Han Chuang, Tsung-Hsuan Chiang, Chih-Shan Yen, Jeng-Rong Ho, Jason Shian-Ching Jang
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Publication number: 20210060637Abstract: A measuring device includes a furnace, a draining vessel, a loader and a computing system for physical properties. The draining vessel with molten metal fluid is in the furnace. The loader accumulates the molten metal fluid from the draining vessel. The computing system includes a recording unit, transform unit, computing unit and processor. The recording unit records the vessel information. By the assumed physical parameters and the vessel information, the transform unit transforms a weight of the molten metal fluid in the loader into a first length criterion, and the computing unit simulates the flowing of the molten metal fluid to have a second length criterion. The processor minimizes the difference of the first and the second length criterion by changing the assumed physical parameters. The physical properties of the molten metal fluid are determined when the difference is minimized.Type: ApplicationFiled: September 2, 2020Publication date: March 4, 2021Inventors: Chih-Ang CHUNG, Ya-Huan LEE, Tsung-Han CHUANG, Tsung-Hsuan CHIANG, Chih-Shan YEN, Jeng-Rong HO, Jason Shian-Ching JANG