Patents by Inventor Tsung-Han Hsu

Tsung-Han Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11955439
    Abstract: A semiconductor package includes a semiconductor die, a redistribution structure and connective terminals. The redistribution structure is disposed on the semiconductor die and includes a first metallization tier disposed in between a pair of dielectric layers. The first metallization tier includes routing conductive traces electrically connected to the semiconductor die and a shielding plate electrically insulated from the semiconductor die. The connective terminals include dummy connective terminals and active connective terminals. The dummy connective terminals are disposed on the redistribution structure and are electrically connected to the shielding plate. The active connective terminals are disposed on the redistribution structure and are electrically connected to the routing conductive traces. Vertical projections of the dummy connective terminals fall on the shielding plate.
    Type: Grant
    Filed: January 17, 2023
    Date of Patent: April 9, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Cheng Wu, Chien-Chia Chiu, Cheng-Hsien Hsieh, Li-Han Hsu, Meng-Tsan Lee, Tsung-Shu Lin
  • Publication number: 20210296160
    Abstract: A method includes etching a semiconductor substrate to form trenches extending into the semiconductor substrate, and depositing a first dielectric layer into the trenches. The first dielectric layer fills lower portions of the trenches. A Ultra-Violet (UV) treatment is performed on the first dielectric layer in an oxygen-containing process gas. The method further includes depositing a second dielectric layer into the trenches. The second dielectric layer fills upper portions of the trenches. A thermal treatment is performed on the second dielectric layer in an additional oxygen-containing process gas. After the thermal treatment, an anneal is performed on the first dielectric layer and the second dielectric layer.
    Type: Application
    Filed: June 7, 2021
    Publication date: September 23, 2021
    Inventors: Tsung Han Hsu, Kuan-Cheng Wang, Han-Ti Hsiaw, Shin-Yeu Tsai
  • Patent number: 11031280
    Abstract: A method includes etching a semiconductor substrate to form trenches extending into the semiconductor substrate, and depositing a first dielectric layer into the trenches. The first dielectric layer fills lower portions of the trenches. A Ultra-Violet (UV) treatment is performed on the first dielectric layer in an oxygen-containing process gas. The method further includes depositing a second dielectric layer into the trenches. The second dielectric layer fills upper portions of the trenches. A thermal treatment is performed on the second dielectric layer in an additional oxygen-containing process gas. After the thermal treatment, an anneal is performed on the first dielectric layer and the second dielectric layer.
    Type: Grant
    Filed: April 4, 2018
    Date of Patent: June 8, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung Han Hsu, Kuan-Cheng Wang, Han-Ti Hsiaw, Shin-Yeu Tsai
  • Publication number: 20180226291
    Abstract: A method includes etching a semiconductor substrate to form trenches extending into the semiconductor substrate, and depositing a first dielectric layer into the trenches. The first dielectric layer fills lower portions of the trenches. A Ultra-Violet (UV) treatment is performed on the first dielectric layer in an oxygen-containing process gas. The method further includes depositing a second dielectric layer into the trenches. The second dielectric layer fills upper portions of the trenches. A thermal treatment is performed on the second dielectric layer in an additional oxygen-containing process gas. After the thermal treatment, an anneal is performed on the first dielectric layer and the second dielectric layer.
    Type: Application
    Filed: April 4, 2018
    Publication date: August 9, 2018
    Inventors: Tsung Han Hsu, Kuan-Cheng Wang, Han-Ti Hsiaw, Shin-Yeu Tsai
  • Patent number: 9960074
    Abstract: A method includes etching a semiconductor substrate to form trenches extending into the semiconductor substrate, and depositing a first dielectric layer into the trenches. The first dielectric layer fills lower portions of the trenches. A Ultra-Violet (UV) treatment is performed on the first dielectric layer in an oxygen-containing process gas. The method further includes depositing a second dielectric layer into the trenches. The second dielectric layer fills upper portions of the trenches. A thermal treatment is performed on the second dielectric layer in an additional oxygen-containing process gas. After the thermal treatment, an anneal is performed on the first dielectric layer and the second dielectric layer.
    Type: Grant
    Filed: September 6, 2016
    Date of Patent: May 1, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung Han Hsu, Kuan-Cheng Wang, Han-Ti Hsiaw, Shin-Yeu Tsai
  • Publication number: 20180005870
    Abstract: A method includes etching a semiconductor substrate to form trenches extending into the semiconductor substrate, and depositing a first dielectric layer into the trenches. The first dielectric layer fills lower portions of the trenches. A Ultra-Violet (UV) treatment is performed on the first dielectric layer in an oxygen-containing process gas. The method further includes depositing a second dielectric layer into the trenches. The second dielectric layer fills upper portions of the trenches. A thermal treatment is performed on the second dielectric layer in an additional oxygen-containing process gas. After the thermal treatment, an anneal is performed on the first dielectric layer and the second dielectric layer.
    Type: Application
    Filed: September 6, 2016
    Publication date: January 4, 2018
    Inventors: Tsung Han Hsu, Kuan-Cheng Wang, Han-Ti Hsiaw, Shin-Yeu Tsai
  • Patent number: 7216448
    Abstract: A display frame includes a frame body defining a receiving space with an access opening facing forwardly, a holding tray adapted for holding a flat panel device, like a tablet PC, and movable relative to the frame body between an extending position where the holding tray extends forwardly and outwardly of the opening, and a retreat position where the holding tray retreats into the space, a front profile frame movable relative to the frame body between open and closed positions, and a linkage pivoted on the front profile frame and coupled to a key which is disposed on the holding tray such that when the linkage is moved in response to the movement of the front profile frame, the holding tray is moved between the extending and retreat positions.
    Type: Grant
    Filed: February 24, 2004
    Date of Patent: May 15, 2007
    Inventor: Tsung-Han Hsu
  • Publication number: 20040163294
    Abstract: A display frame includes a frame body defining a receiving space with an access opening facing forwardly, a holding tray adapted for holding a flat panel device, like a tablet PC, and movable relative to the frame body between an extending position where the holding tray extends forwardly and outwardly of the opening, and a retreat position where the holding tray retreats into the space, a front profile frame movable relative to the frame body between open and closed positions, and a linkage pivoted on the front profile frame and coupled to a key which is disposed on the holding tray such that when the linkage is moved in response to the movement of the front profile frame, the holding tray is moved between the extending and retreat positions.
    Type: Application
    Filed: February 24, 2004
    Publication date: August 26, 2004
    Inventor: Tsung-Han Hsu