Patents by Inventor Tsung-Hao YEH

Tsung-Hao YEH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230387209
    Abstract: The present disclosure relates to a semiconductor structure that includes a well region and a semiconductor substrate. The well region is disposed within the semiconductor substrate. The well region includes a plurality of first regions separated by a plurality of second regions, where the plurality of first regions is of a first doping and the plurality of second regions are of a second doping different than the first doping. A gate electrode overlies the well region where the gate electrode is disposed laterally over a portion of the plurality of first regions and a portion of the plurality of second regions.
    Type: Application
    Filed: August 1, 2023
    Publication date: November 30, 2023
    Inventors: Hsin Fu Lin, Tsung-Hao Yeh
  • Publication number: 20230261004
    Abstract: A layer stack including a first bonding dielectric material layer, a dielectric metal oxide layer, and a second bonding dielectric material layer is formed over a top surface of a substrate including a substrate semiconductor layer. A conductive material layer is formed by depositing a conductive material over the second bonding dielectric material layer. The substrate semiconductor layer is thinned by removing portions of the substrate semiconductor layer that are distal from the layer stack, whereby a remaining portion of the substrate semiconductor layer includes a top semiconductor layer. A semiconductor device on the top semiconductor layer.
    Type: Application
    Filed: February 17, 2022
    Publication date: August 17, 2023
    Inventors: Harry-Hak-Lay CHUANG, Kuo-Ching HUANG, Wei-Cheng WU, Hsin Fu LIN, Henry WANG, Chien Hung LIU, Tsung-Hao YEH, Hsien Jung CHEN
  • Publication number: 20230049610
    Abstract: A semiconductor device includes a semiconductor layer, a drift region, a source area, a well region, a drain area, and a dielectric film. The drift region and the source area are formed in the semiconductor layer. The well region is formed in the semiconductor layer and between the drift region and the source area. The drain area is formed in the drift region. The dielectric film is formed in the drift region and is located between the source area and the drain area. The dielectric film includes a proximate end portion and a distal end portion which are proximate to and distal from the source area, respectively, and which are asymmetrical to each other.
    Type: Application
    Filed: August 12, 2021
    Publication date: February 16, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Fu LIN, Chien-Hung LIU, Tsung-Hao YEH
  • Publication number: 20230052949
    Abstract: A semiconductor device includes a semiconductor film and a gate structure on the semiconductor film. The gate structure includes a multi-stepped gate dielectric on the semiconductor film and a gate electrode on the multi-stepped gate dielectric. The multi-stepped gate dielectric includes a first gate dielectric segment having a first thickness and a second gate dielectric segment having a second thickness that is less than the first thickness.
    Type: Application
    Filed: August 12, 2021
    Publication date: February 16, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Fu LIN, Chia-Ta HSIEH, Tsung-Hao YEH
  • Publication number: 20230010333
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip (IC). The IC comprises a substrate. A semiconductor device is disposed on the substrate. An interlayer dielectric (ILD) structure is disposed over the substrate and the semiconductor device. A first intermetal dielectric (IMD) structure is disposed over the substrate and the ILD structure. An opening is disposed in the first IMD structure, wherein the opening overlies at least a portion of the semiconductor device.
    Type: Application
    Filed: April 25, 2022
    Publication date: January 12, 2023
    Inventors: Harry-Hak-Lay Chuang, Hsin Fu Lin, Shiang-Hung Huang, Tsung-Hao Yeh
  • Publication number: 20230011246
    Abstract: The present disclosure relates to a semiconductor structure that includes a well region and a semiconductor substrate. The well region is disposed within the semiconductor substrate. The well region includes a plurality of first regions separated by a plurality of second regions, where the plurality of first regions is of a first doping and the plurality of second regions are of a second doping different than the first doping. A gate electrode overlies the well region where the gate electrode is disposed laterally over a portion of the plurality of first regions and a portion of the plurality of second regions.
    Type: Application
    Filed: January 13, 2022
    Publication date: January 12, 2023
    Inventors: Hsin Fu Lin, Tsung-Hao Yeh
  • Publication number: 20220415879
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a well region disposed within a semiconductor substrate and comprises a first doping type. A gate electrode overlies the well region. A first contact region is disposed within the well region and comprises a second doping type opposite the first doping type. A second contact region is disposed within the semiconductor substrate and laterally offset from the well region. The second contact region comprises the first doping type and the gate electrode is disposed between the first contact region and the second contact region. A gate dielectric layer is disposed between the semiconductor substrate and the well region, where a thickness of the gate dielectric layer is greater than about 140 Angstroms.
    Type: Application
    Filed: February 9, 2022
    Publication date: December 29, 2022
    Inventors: Hsin Fu Lin, Shiang-Hung Huang, Tsung-Hao Yeh
  • Publication number: 20220406886
    Abstract: An integrated circuit (IC) device comprises a high voltage semiconductor device (HVSD) on a frontside of a semiconductor body and further comprises an electrode on a backside of the semiconductor body opposite the frontside. The HVSD may, for example, be a transistor or some other suitable type of semiconductor device. The electrode has one or more gaps directly beneath the HVSD. The one or more gaps enhance the effectiveness of the electrode for improving the breakdown voltage of the HVSD.
    Type: Application
    Filed: January 11, 2022
    Publication date: December 22, 2022
    Inventors: Harry-Hak-Lay Chuang, Hsin Fu Lin, Tsung-Hao Yeh
  • Patent number: 11532701
    Abstract: A semiconductor isolation structure includes a handle layer, a buried insulation layer, a semiconductor layer, a deep trench isolation structure, and a heavy doping region. The buried insulation layer is disposed on the handle layer. The semiconductor layer is disposed on the buried insulation layer and has a doping type. The semiconductor layer has a functional area in which doped regions of a semiconductor device are to be formed. The deep trench isolation structure penetrates the semiconductor layer and the buried insulation layer, and surrounds the functional area. The heavy doping region is formed in the semiconductor layer, is disposed between the functional area and the deep trench isolation structure, and is surrounded by the deep trench isolation structure. The heavy doping region has the doping type. A doping concentration of the heavy doping region is higher than that of the semiconductor layer.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Fu Lin, Tsung-Hao Yeh, Chien-Hung Liu, Shiang-Hung Huang, Chih-Wei Hung, Tung-Yang Lin, Ruey-Hsin Liu, Chih-Chang Cheng
  • Publication number: 20220367611
    Abstract: A semiconductor device includes a drift region, a dielectric film, and an anti-type doping layer. The drift region has a first type conductivity. The anti-type doping layer is located between the drift region and the dielectric film, and has a second type conductivity opposite to the first type conductivity so as to change a current path of a current in the drift region, to thereby prevent the current from being influenced by the dielectric film. A method for manufacturing a semiconductor device and a method for reducing an influence of a dielectric film are also disclosed.
    Type: Application
    Filed: May 13, 2021
    Publication date: November 17, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Fu LIN, Tsung-Hao Yeh, Chih-Wei HUNG
  • Publication number: 20220293729
    Abstract: A field effect transistor contains a semiconductor material layer including a source-side doped well, a source region, and a drain region. A shallow trench isolation structure is embedded in the semiconductor material layer and extends between the source region and the drain region. Agate dielectric layer overlies the semiconductor material layer. A horizontally-extending portion of a gate electrode overlies the gate dielectric layer, and at least one downward-protruding portion of the gate electrode extends downward from a bottom surface of the horizontally-extending portion into an upper region of the shallow trench isolation structure. The gate electrode is vertically spaced from a bottom surface of the shallow trench isolation structure modifies electrical field in a semiconductor channel to reduce hot carrier injection.
    Type: Application
    Filed: September 10, 2021
    Publication date: September 15, 2022
    Inventors: HsinFu LIN, Tsung-Hao YEH, Shiang-Hung HUANG
  • Publication number: 20220293723
    Abstract: A semiconductor isolation structure includes a handle layer, a buried insulation layer, a semiconductor layer, a deep trench isolation structure, and a heavy doping region. The buried insulation layer is disposed on the handle layer. The semiconductor layer is disposed on the buried insulation layer and has a doping type. The semiconductor layer has a functional area in which doped regions of a semiconductor device are to be formed. The deep trench isolation structure penetrates the semiconductor layer and the buried insulation layer, and surrounds the functional area. The heavy doping region is formed in the semiconductor layer, is disposed between the functional area and the deep trench isolation structure, and is surrounded by the deep trench isolation structure. The heavy doping region has the doping type. A doping concentration of the heavy doping region is higher than that of the semiconductor layer.
    Type: Application
    Filed: March 11, 2021
    Publication date: September 15, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Fu LIN, Tsung-Hao YEH, Chien-Hung LIU, Shiang-Hung HUANG, Chih-Wei HUNG, Tung-Yang LIN, Ruey-Hsin LIU, Chih-Chang CHENG