Abstract: This invention mainly provides a SMT-type structure of the minimized and low-power silicon-based electret condenser microphone. Primarily integrates with the electret, silicon-based, MEMS and microphone techniques to implement the minimized and low-power silicon-based electret condenser microphone. The Silicon-based bi-diaphragm of the composite diaphragm-chip was coated with the low-dielectric macromolecule material to allow the microphone acquires the sufficient electrical charges. Moreover, the impedance matching element of the microphone that MOSFET was implemented by the MEMS technology. Conclusively, this silicon-based electret condenser microphone gains several achievements as the smallest volume, a lower bias voltage, a SMT-type structure, a lower residue stress and a lower assembly cost.

Abstract: A fluoropolymer composite with high ionic conductivity that may be applied in electroactive polymer composite includes following components: PVDF-g-SPS; PVDF; and hydrocarbon- or fluoro-elastomer. After being mixed with specific proportion and being dissolved in an oily or non-oily solvent of non-proton or proton of high boiling point, the invention is coated on a substrate and is heated to get rid of the solvent afterwards to get a compound membrane. Then, a compound membrane of PVDF-g-SPS may be obtained by sulphonating the aforementioned compound membrane. The obtained compound membrane has excellent properties, such as thermal stability, acid-alkali resistance, good mechanical performance, excellent flexibility, and capability for processing appropriate cross-link for further enhancing the mechanical performance of this membrane.

Abstract: This invention mainly provides a structure and its implementation of the minimized and low-power silicon-based electret condenser microphone. Primarily integrates with the electret, silicon-based, MEMS and microphone techniques to implement the minimized and low-power silicon-based electret condenser microphone. The Silicon-based bi-diaphragm of the composite diaphragm-chip was coated with the low-dielectric macromolecule material to allow the microphone acquires the sufficient electrical charges. Moreover, the impedance matching element of the microphone that MOSFET was implemented by the MEMS technology. Conclusively, this silicon-based electret condenser microphone gains several achievements as the smallest volume, a lower bias voltage, a lower residue stress and a lower assembly cost.