Patents by Inventor Tsungan Cheng

Tsungan Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Carrier head with layer of conformable material for a chemical mechanical polishing system
    Patent number: 6443823
    Abstract: A carrier head for a chemical mechanical polishing apparatus. A layer of conformable material is disposed in a recess of the carrier head to provide a mounting surface for a substrate. The conformable material may be elastic and undergo normal strain in response to an applied load. The carrier head may also include a support fixture detachably connected to a backing fixture, a retaining ring connected directly to the conformable material, and a shield ring which projects over a portion of the layer of conformable material.
    Type: Grant
    Filed: January 5, 2000
    Date of Patent: September 3, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Robert D. Tolles, Tsungan Cheng, John Prince
  • Carrier head with layer of conformable material for a chemical mechanical polishing system
    Patent number: 6036587
    Abstract: A carrier head for a chemical mechanical polishing apparatus. A layer of conformable material is disposed in a recess of the carrier head to provide a mounting surface for a substrate. The conformable material may be elastic and undergo normal strain in response to an applied load. The carrier head may also include a support fixture detachably connected to a backing fixture, a retaining ring connected directly to the conformable material, and a shield ring which projects over a portion of the layer of conformable material.
    Type: Grant
    Filed: October 10, 1996
    Date of Patent: March 14, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Robert D. Tolles, Tsungan Cheng, John Prince