Abstract: An ink jet print head includes PZT films formed on a first surface of a single-crystal silicon substrate, ink cavities formed in the regions of the single-crystal silicon substrate which correspond in position to the PZT films, and a nozzle plate formed on a second surface of the single-crystal silicon substrate, which is opposite to the first surface. Each ink cavity is formed using anisotropical wet and dry etching, and wherein a portion of each ink cavity close to the first surface of the single-crystal silicon substrate is anisotropically dry etched.

Abstract: An ink jet recording head comprising: a nozzle orifice for jetting ink; an ink chamber communicating with the nozzle; a diaphragm for pressurizing ink in the ink chamber; a piezoelectric thin film on the diaphragm; and an electrode for the piezoelectric thin film wherein the piezoelectric thin film and the electrode are patterned to the same shape.

Abstract: An ink-jet recording head includes: a substrate having a first main surface and a second main surface; ink cavity chambers formed on the second main surface of the substrate; and a piezoelectric element device formed on the first main surface of the substrate, the piezoelectric element including a first electrode, a piezoelectric thin film and a second electrode stacked in this order. A material of the first electrode is the same as that of the second electrode in electrochemical potential.

Abstract: An ink jet recording head includes: a piezoelectric body element 20 that is formed on a silicon substrate 10; an ink cavity 15 that is formed at a location of the silicon substrate 10 corresponding to the piezoelectric body element 20; and a jetting port 18 for jetting ink contained in the ink cavity 15. The ink cavity 15 has a beamlike ion implanted layer 19 that is not only interposed between at least a pair of confronting side walls 15a and 15b thereof while coming in contact with desired regions of such side walls 15a and 15b, but also formed so as to be distanced from other side walls 15c and 15d thereof.

Abstract: Lower electrodes are disposed independently of each other for respective ink cavities through a silicon oxide film on a silicon substrate. PZT films and upper electrodes are disposed on the respective lower electrodes, and then an interlayer insulating film or a passivation film is disposed on top of the whole layer.

Abstract: An ink-jet printing head comprises: a pressurizing chamber substrate having first and second sides opposing each other; a plurality of pressurizing chambers formed on the first side of the pressurizing chamber substrate; channels formed on the second side of the pressuring chamber substrate to be opposite to the pressuring chambers, respectively; oscillating plate films for pressurizing ink within the respective pressurizing chambers; and piezoelectric thin-film elements, each having upper and lower electrodes and a piezoelectric film sandwiched between the upper and lower electrodes, the piezoelectric thin-film being formed in the channel, wherein at least the upper electrode is formed to have a narrower width than that of the pressurizing chamber. And a method for producing the ink-jet head.

Abstract: An ink jet type recording head is capable of preventing the occurrence of cracks in a portion close to the circumferential wall of the pressure generating chamber of the piezoelectric active section so as to enhance the durability of the recording head.

Abstract: An ink jet recording head is provided with a piezoelectric vibrator. The piezoelectric vibrator includes a diaphragm and a piezoelectric active part. The diaphragm includes a pressure generating chamber communicating with a nozzle aperture, at least the upper surface of which acts as a lower electrode. The piezoelectric active part includes a piezoelectric film formed on the surface of the diaphragm and an upper electrode formed on the surface of the piezoelectric film, formed in an area opposite to the pressure generating chamber. A cap member is bonded on one side of the piezoelectric film for sealing a space with a holder to the extent that the motion is secured. The piezoelectric active part is cut off from the outside of the head by sealing dry fluid in the space of the cap member.

Abstract: An ink-jet recording head comprising: an elastic sheet providing pressure generating chambers; nozzle orifices, each communicating with the pressure generating chamber; piezoelectric vibrators formed on the elastic sheet, each of the piezoelectric vibrators having, a lower electrode formed on the elastic sheet, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer such that the upper electrode faces the respective pressure generating chamber, wherein the upper electrodes of the piezoelectric vibrators are positioned independently of each other; an electrical insulator layer having windows, wherein the electrical insulator layer covers the upper electrodes; and a conductor pattern connecting with the upper electrodes via the windows of the electrical insulator layer.

Abstract: An ink-jet printing head comprises: a pressurizing chamber substrate having first and second sides opposing each other; a plurality of pressurizing chambers formed on the first side of the pressurizing chamber substrate; channels formed on the second side of the pressuring chamber substrate to be opposite to the pressuring chambers, respectively; oscillating plate films for pressurizing ink within the respective pressurizing chambers; and piezoelectric thin-film elements, each having upper and lower electrodes and a piezoelectric film sandwiched between the upper and lower electrodes, the piezoelectric thin-film being formed in the channel, wherein at least the upper electrode is formed to have a narrower width than that of the pressurizing chamber. And a method for producing the ink-jet head.