Patents by Inventor Tsutomu Nakada

Tsutomu Nakada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11773504
    Abstract: A plating support system is provided and includes a simulator that predicts an in-plane uniformity value of a plating film formed on a substrate based on assumed conditions for an electroplating treatment of the substrate; a numerical analysis data storage unit that stores numerical analysis data in which each assumed condition is associated with the in-plane uniformity value for plural assumed conditions; a regression analysis unit that estimates a model that the in-plane uniformity value is an objective variable and variables of assumed conditions are explanatory variables by regression analysis based on the numerical analysis data; and an implement condition search unit that uses the estimated model to search for implement conditions that are recommended values of the assumed conditions related to the in-plane uniformity of the plating film formed in the electroplating treatment of the substrate to be plated.
    Type: Grant
    Filed: January 14, 2021
    Date of Patent: October 3, 2023
    Assignee: EBARA CORPORATION
    Inventors: Mitsuhiro Shamoto, Masashi Shimoyama, Tsutomu Nakada, Hideharu Aoyama, Masayuki Fujiki
  • Publication number: 20210222315
    Abstract: A plating support system is provided and includes a simulator that predicts an in-plane uniformity value of a plating film formed on a substrate based on assumed conditions for an electroplating treatment of the substrate; a numerical analysis data storage unit that stores numerical analysis data in which each assumed condition is associated with the in-plane uniformity value for plural assumed conditions; a regression analysis unit that estimates a model that the in-plane uniformity value is an objective variable and variables of assumed conditions are explanatory variables by regression analysis based on the numerical analysis data; and an implement condition search unit that uses the estimated model to search for implement conditions that are recommended values of the assumed conditions related to the in-plane uniformity of the plating film formed in the electroplating treatment of the substrate to be plated.
    Type: Application
    Filed: January 14, 2021
    Publication date: July 22, 2021
    Applicant: EBARA CORPORATION
    Inventors: MITSUHIRO SHAMOTO, MASASHI SHIMOYAMA, TSUTOMU NAKADA, HIDEHARU AOYAMA, MASAYUKI FUJIKI
  • Patent number: 10968530
    Abstract: In-plane uniformity of a membrane electroplated on a polygon substrate is improved. An electroplating device includes an anode holder configured to hold an anode, a substrate holder configured to hold a polygon substrate, and a regulation plate provided between the anode holder and the substrate holder. The regulation plate has a body portion having a first polygon opening following an outer shape of the polygon substrate, and wall portions protruding on a substrate holder side from edges of the first polygon opening. The wall portions protrude over a first distance on the substrate holder side in first regions which contain middle portions of sides of the first polygon opening, and are notched in second regions which contain corner portions of the first polygon opening, or protrude over a second distance smaller than the first distance on the substrate holder side.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: April 6, 2021
    Assignee: EBARA CORPORATION
    Inventors: Mitsuhiro Shamoto, Tsutomu Nakada, Masashi Shimoyama
  • Patent number: 10914019
    Abstract: A plating apparatus for plating a substrate is provided to reduce vibration of a paddle. The plating apparatus includes a plating bath configured to accommodate plating solution; a paddle that is arranged in the plating bath, and configured to move in a reciprocating direction along a surface of the substrate to stir the plating solution; a support member for supporting a first end portion of the paddle; a first magnet provided on the paddle; and a second magnet provided on the plating bath. The first magnet and the second magnet are configured to exert a magnetic force on each other so that a second end portion on an opposite side to the first end portion of the paddle is suppressed from vibrating in directions approaching and leaving the substrate while the paddle is moving.
    Type: Grant
    Filed: October 29, 2018
    Date of Patent: February 9, 2021
    Assignee: EBARA CORPORATION
    Inventors: Shao Hua Chang, Yasuyuki Masuda, Jumpei Fujikata, Masashi Shimoyama, Tsutomu Nakada
  • Patent number: 10632084
    Abstract: An aquaporin 4 function promotor contains a compound represented by Formula (1) or (2) or a pharmaceutically acceptable salt thereof, as an active ingredient. (In the formula, n11 represents an integer of 1 to 10, and R21 represents one selected from the group consisting of an alkyl group having 1 to 10 carbon atoms, an alicyclic heterocyclic group, an aromatic hydrocarbon group, and an aromatic heterocyclic group.
    Type: Grant
    Filed: March 3, 2017
    Date of Patent: April 28, 2020
    Assignee: NIIGATA UNIVERSITY
    Inventors: Tsutomu Nakada, Vincent Huber, Hironaka Igarashi, Yuji Suzuki, Ingrid Kwee
  • Patent number: 10513795
    Abstract: In-plane uniformity of a film that is plated on a polygonal substrate is enhanced. An anode holder configured to hold an anode, a substrate holder configured to hold a polygonal substrate, a plating bath for accommodating the anode holder and the substrate holder, and dipping the anode and the substrate in a plating solution, and a control device for controlling a current that flows between the anode and the substrate are included. The substrate holder has a plurality of power feeding members that are disposed along respective sides of the polygonal substrate. The control device is configured to be able to control the current so that currents of at least two different values are simultaneously supplied to the plurality of power feeding members.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: December 24, 2019
    Assignee: EBARA CORPORATION
    Inventors: Junko Mine, Tsutomu Nakada, Mitsutoshi Yahagi
  • Publication number: 20190256997
    Abstract: In-plane uniformity of a membrane electroplated on a polygon substrate is improved. An electroplating device includes an anode holder configured to hold an anode, a substrate holder configured to hold a polygon substrate, and a regulation plate provided between the anode holder and the substrate holder. The regulation plate has a body portion having a first polygon opening following an outer shape of the polygon substrate, and wall portions protruding on a substrate holder side from edges of the first polygon opening. The wall portions protrude over a first distance on the substrate holder side in first regions which contain middle portions of sides of the first polygon opening, and are notched in second regions which contain corner portions of the first polygon opening, or protrude over a second distance smaller than the first distance on the substrate holder side.
    Type: Application
    Filed: January 29, 2019
    Publication date: August 22, 2019
    Applicant: EBARA CORPORATION
    Inventors: MITSUHIRO SHAMOTO, TSUTOMU NAKADA, MASASHI SHIMOYAMA
  • Publication number: 20190249326
    Abstract: In-plane uniformity of a film that is plated on a polygonal substrate is enhanced. An anode holder configured to hold an anode, a substrate holder configured to hold a polygonal substrate, a plating bath for accommodating the anode holder and the substrate holder, and dipping the anode and the substrate in a plating solution, and a control device for controlling a current that flows between the anode and the substrate are included. The substrate holder has a plurality of power feeding members that are disposed along respective sides of the polygonal substrate. The control device is configured to be able to control the current so that currents of at least two different values are simultaneously supplied to the plurality of power feeding members.
    Type: Application
    Filed: April 26, 2019
    Publication date: August 15, 2019
    Inventors: Junko MINE, Tsutomu NAKADA, Mitsutoshi YAHAGI
  • Patent number: 10316426
    Abstract: In-plane uniformity of a film that is plated on a polygonal substrate is enhanced. An anode holder configured to hold an anode, a substrate holder configured to hold a polygonal substrate, a plating bath for accommodating the anode holder and the substrate holder, and dipping the anode and the substrate in a plating solution, and a control device for controlling a current that flows between the anode and the substrate are included. The substrate holder has a plurality of power feeding members that are disposed along respective sides of the polygonal substrate. The control device is configured to be able to control the current so that currents of at least two different values are simultaneously supplied to the plurality of power feeding members.
    Type: Grant
    Filed: August 26, 2016
    Date of Patent: June 11, 2019
    Assignee: EBARA CORPORATION
    Inventors: Junko Mine, Tsutomu Nakada, Mitsutoshi Yahagi
  • Publication number: 20190127875
    Abstract: A plating apparatus for plating a substrate is provided to reduce vibration of a paddle. The plating apparatus includes a plating bath configured to accommodate plating solution; a paddle that is arranged in the plating bath, and configured to move in a reciprocating direction along a surface of the substrate to stir the plating solution; a support member for supporting a first end portion of the paddle; a first magnet provided on the paddle; and a second magnet provided on the plating bath. The first magnet and the second magnet are configured to exert a magnetic force on each other so that a second end portion on an opposite side to the first end portion of the paddle is suppressed from vibrating in directions approaching and leaving the substrate while the paddle is moving.
    Type: Application
    Filed: October 29, 2018
    Publication date: May 2, 2019
    Inventors: Shao Hua CHANG, Yasuyuki MASUDA, Jumpei FUJIKATA, Masashi SHIMOYAMA, Tsutomu NAKADA
  • Publication number: 20190091182
    Abstract: An aquaporin 4 function promotor contains a compound represented by Formula (1) or (2) or a pharmaceutically acceptable salt thereof, as an active ingredient. (In the formula, n11 represents an integer of 1 to 10, and R21 represents one selected from the group consisting of an alkyl group having 1 to 10 carbon atoms, an alicyclic heterocyclic group, an aromatic hydrocarbon group, and an aromatic heterocyclic group.
    Type: Application
    Filed: March 3, 2017
    Publication date: March 28, 2019
    Inventors: Tsutomu NAKADA, Vincent HUBER, Hironaka IGARASHI, Yuji SUZUKI, Ingrid KWEE
  • Patent number: 9708724
    Abstract: An anode unit capable of forming a metal film having a uniform thickness on a substrate is disclosed. The anode unit includes an anode, a first feeding portion connected to a central portion of the anode, a second feeding portion located on a central axis of the anode and located away from the anode, and arms extending radially from the second feeding portion. The arms are connected to a periphery of the anode.
    Type: Grant
    Filed: February 23, 2015
    Date of Patent: July 18, 2017
    Assignee: Ebara Corporation
    Inventors: Junichiro Tsujino, Tsutomu Nakada, Yusuke Tamari, Mitsutoshi Yahagi, Akira Owatari
  • Publication number: 20170058423
    Abstract: In-plane uniformity of a film that is plated on a polygonal substrate is enhanced. An anode holder configured to hold an anode, a substrate holder configured to hold a polygonal substrate, a plating bath for accommodating the anode holder and the substrate holder, and dipping the anode and the substrate in a plating solution, and a control device for controlling a current that flows between the anode and the substrate are included. The substrate holder has a plurality of power feeding members that are disposed along respective sides of the polygonal substrate. The control device is configured to be able to control the current so that currents of at least two different values are simultaneously supplied to the plurality of power feeding members.
    Type: Application
    Filed: August 26, 2016
    Publication date: March 2, 2017
    Inventors: Junko MINE, Tsutomu NAKADA, Mitsutoshi YAHAGI
  • Patent number: 9556533
    Abstract: A substrate processing apparatus includes a plurality of inlet pipes and a plurality of outlet pipes, connected to a processing tank and configured to be switched therebetween to create a flow of a processing liquid in the processing tank in a direction different from that of the processing liquid before the switching. The inlet pipes and the outlet pipes are each provided with a flow control device which is controlled by a control section so that upon the switching, a flow rate of the processing liquid flowing therethrough changes with time.
    Type: Grant
    Filed: August 13, 2012
    Date of Patent: January 31, 2017
    Assignee: EBARA CORPORATION
    Inventors: Keiichi Kurashina, Tsutomu Nakada
  • Publication number: 20160160352
    Abstract: There is provided an electroless plating apparatus which, despite using a high-productivity batch processing method, can reduce the amount of a liquid chemical brought out of a processing tank, thereby reducing the cleaning time in a cleaning step, and can perform flushing easily and quickly. The electroless plating apparatus includes a pre-plating treatment module including a pre-plating treatment tank, a plating module, and an inter-module substrate transport device. The pre-plating treatment tank is provided with a pre-plating treatment solution circulation line having a temperature control function for a pre-plating treatment solution. The plating tank is provided with a plating solution circulation line having a filter and a temperature control function for a plating solution. The plating solution circulation line is connected to a flushing line for flushing the interior of the plating solution circulation line and the interior of the plating tank.
    Type: Application
    Filed: February 12, 2016
    Publication date: June 9, 2016
    Inventors: Hiroyuki KANDA, Junichiro TSUJINO, Junko MINE, Makoto KUBOTA, Tsutomu NAKADA, Kenichiro ARAI
  • Patent number: 9293364
    Abstract: There is provided an electroless plating apparatus which, despite using a high-productivity batch processing method, can reduce the amount of a liquid chemical brought out of a processing tank, thereby reducing the cleaning time in a cleaning step, and can perform flushing easily and quickly. The electroless plating apparatus includes a pre-plating treatment module including a pre-plating treatment tank, a plating module, and an inter-module substrate transport device. The pre-plating treatment tank is provided with a pre-plating treatment solution circulation line having a temperature control function for a pre-plating treatment solution. The plating tank is provided with a plating solution circulation line having a filter and a temperature control function for a plating solution. The plating solution circulation line is connected to a flushing line for flushing the interior of the plating solution circulation line and the interior of the plating tank.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: March 22, 2016
    Assignees: Ebara Corporation, Screen Holdings Co., Ltd.
    Inventors: Hiroyuki Kanda, Junichiro Tsujino, Junko Mine, Makoto Kubota, Tsutomu Nakada, Kenichiro Arai
  • Publication number: 20150275390
    Abstract: An anode unit capable of forming a metal film having a uniform thickness on a substrate is disclosed. The anode unit includes an anode, a first feeding portion connected to a central portion of the anode, a second feeding portion located on a central axis of the anode and located away from the anode, and arms extending radially from the second feeding portion. The arms are connected to a periphery of the anode.
    Type: Application
    Filed: February 23, 2015
    Publication date: October 1, 2015
    Inventors: Junichiro TSUJINO, Tsutomu NAKADA, Yusuke TAMARI, Mitsutoshi YAHAGI, Akira OWATARI
  • Publication number: 20150267302
    Abstract: An electroless plating method which can prevent stoppage of a plating reaction and a decrease in a plating rate is disclosed. This method includes: circulating a plating solution through a plating bath while heating the plating solution; immersing the substrate in the plating solution in the plating bath; forming a first electroless plating film on the substrate while circulating the plating solution at a first flow rate during a period from when the substrate is immersed in the plating solution until a predetermined time elapses; and forming a second electroless plating film on the first electroless plating film while circulating the plating solution at a second flow rate that is lower than the first flow rate after the predetermined time has elapsed.
    Type: Application
    Filed: March 16, 2015
    Publication date: September 24, 2015
    Inventors: Makoto Kubota, Akira Susaki, Masashi Shimoyama, Tsutomu Nakada
  • Patent number: 9073802
    Abstract: The present invention aims at solving the problems of conventional methods for producing an 18F-labeled compound, that is, the problem of purification of a compound in a liquid phase synthesis method and the problem of an insufficient yield due to the reduction of reactivity in a solid phase synthesis method. There is provided a method for producing an 18F-labeled compound including: allowing a high molecular compound containing a residue of a precursor compound to be labeled and a residue of a phase transfer catalyst in the molecule thereof to react with 18F?; and removing the 18F-labeled compound from the high molecular compound.
    Type: Grant
    Filed: February 8, 2011
    Date of Patent: July 7, 2015
    Assignees: TOKYO INSTITUTE OF TECHNOLOGY, NIIGATA UNIVERSITY
    Inventors: Takashi Takahashi, Hiroshi Tanaka, Tsutomu Nakada
  • Publication number: 20150090584
    Abstract: A plating apparatus for plating a substrate is disclosed. The plating apparatus includes: a dip-type plating bath; a dry-type plating bath having a hole in a sidewall thereof; and a pressing mechanism configured to press a substrate holder, holding a substrate, against the sidewall of the dry-type plating bath to close the hole. The substrate holder includes a base member and a holding member configured to sandwich the substrate therebetween, a first seal portion configured to seal a gap between the substrate and the holding member, a second seal portion configured to seal a gap between the base member and the holding member, and a third seal portion configured to seal a gap between the holding member and the sidewall of the dry-type plating bath.
    Type: Application
    Filed: September 26, 2014
    Publication date: April 2, 2015
    Inventors: Yoshio Minami, Tsutomu Nakada