Patents by Inventor Tsutomu Nishiwaki
Tsutomu Nishiwaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20140078215Abstract: A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.Type: ApplicationFiled: November 19, 2013Publication date: March 20, 2014Applicant: Seiko Epson CorporationInventors: Shiro Yazaki, Setsuya Iwashita, Eiju Hirai, Tsutomu Nishiwaki
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Publication number: 20140066778Abstract: An ultrasonic transducer device includes a substrate, a vibrating film, a piezoelectric element, an input section and a detection section. The substrate has a plurality of openings. The vibrating film provided in each of the openings to cover a corresponding one of the openings. The piezoelectric element is provided in each of the openings on the vibrating film. The input section is configured and arranged to input a drive signal to a part of piezoelectric elements among the piezoelectric elements. The detection section is configured and arranged to detect vibration of the piezoelectric elements, in which the drive signal is not inputted, among the piezoelectric elements while the drive signal is inputted to the part of the piezoelectric elements among the piezoelectric elements.Type: ApplicationFiled: August 27, 2013Publication date: March 6, 2014Applicant: SEIKO EPSON CORPORATIONInventor: Tsutomu NISHIWAKI
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Patent number: 8640550Abstract: A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.Type: GrantFiled: August 28, 2012Date of Patent: February 4, 2014Assignee: Seiko Epson CorporationInventor: Tsutomu Nishiwaki
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Patent number: 8640551Abstract: A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.Type: GrantFiled: January 10, 2013Date of Patent: February 4, 2014Assignee: Seiko Epson CorporationInventor: Tsutomu Nishiwaki
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Publication number: 20130342810Abstract: According to one aspect of the invention, an eyeball biological information collection device that is arranged to be worn by a subject includes a ultrasonic sensor part and a pressing part. The ultrasonic sensor part is configured to transmit an ultrasonic wave to an eyeball of the subject and receive a reflection wave of the ultrasonic wave reflected within the eyeball at a time of use of the eyeball biological information collection device. The pressing part is configured to press the ultrasonic sensor part to eyelid of the subject at the time of use.Type: ApplicationFiled: June 3, 2013Publication date: December 26, 2013Inventor: Tsutomu NISHIWAKI
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Patent number: 8613498Abstract: A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.Type: GrantFiled: October 5, 2011Date of Patent: December 24, 2013Assignee: Seiko Epson CorporationInventors: Shiro Yazaki, Setsuya Iwashita, Eiju Hirai, Tsutomu Nishiwaki
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Patent number: 8573069Abstract: A stress sensing device senses a shear force and a pressing force. The stress sensing device includes a support body, a support film, first and second piezoelectric parts and an elastic layer. The support body has an opening defined by a pair of straight parts perpendicular to a sensing direction of the shear force and parallel to each other. The support film having flexibility closes off the opening. The first piezoelectric part is disposed over the support film and straddling an inside portion and an outside portion of the opening along at least one of the straight parts of the opening as seen in plan view. The second piezoelectric part is disposed to the inside portion of the opening and set apart from the first piezoelectric part as seen in the plan view. The elastic layer covers the first piezoelectric part, the second piezoelectric part, and the support film.Type: GrantFiled: February 8, 2011Date of Patent: November 5, 2013Assignee: Seiko Epson CorporationInventor: Tsutomu Nishiwaki
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Publication number: 20130261465Abstract: An ultrasonic probe includes an element chip, a flexible wiring member and a control circuit. The element chip includes a substrate forming a plurality of openings arranged in an array pattern and a plurality of ultrasonic transducer elements disposed at the openings. The flexible wiring member is connected to the element chip, and forming at least a part of an annular body surrounding a space. The control circuit is connected to the flexible wiring member and electrically connected to the ultrasonic transducer elements via the flexible wiring member.Type: ApplicationFiled: March 14, 2013Publication date: October 3, 2013Applicant: SEIKO EPSON CORPORATIONInventors: Tomoaki NAKAMURA, Tsutomu NISHIWAKI, Yasunori ONISHI, Takao MIYAZAWA
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Patent number: 8536763Abstract: An ultrasonic transducer includes: a support member having an opening section; a diaphragm adapted to cover the opening section; and a piezoelectric member provided to the diaphragm and at least one of expanding and contracting in an in-plane direction in response to application of a voltage, wherein the diaphragm has a concave groove section formed to have a concave shape on a surface on an opposite side to one side exposed to the opening section, and the piezoelectric member is fixed to the diaphragm in an area outside the concave groove section, and disposed to cover the concave groove section so as to be opposed to a bottom of the concave groove section via a space.Type: GrantFiled: November 15, 2010Date of Patent: September 17, 2013Assignee: Seiko Epson CorporationInventors: Tomoaki Nakamura, Tsutomu Nishiwaki
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Patent number: 8359931Abstract: A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.Type: GrantFiled: November 19, 2010Date of Patent: January 29, 2013Assignee: Seiko Epson CorporationInventor: Tsutomu Nishiwaki
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Publication number: 20120319418Abstract: A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.Type: ApplicationFiled: August 28, 2012Publication date: December 20, 2012Applicant: SEIKO EPSON CORPORATIONInventor: Tsutomu NISHIWAKI
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Publication number: 20120304778Abstract: A stress-detecting element includes a support body, a support film, a first piezoelectric element, first and second elastic parts. The support body has an opening part with first and second rectilinear sections extending parallel to each other. The support film blocks off the opening part. The first piezoelectric element straddles the first rectilinear section from an interior area to an exterior area of the opening part as seen in plan view. The first elastic part straddles the first rectilinear section from the interior area to the exterior area of the opening part. The second elastic part straddles the second rectilinear section from the interior area to the exterior area of the opening part. The first and second elastic parts respectively have first and second elastic end sections disposed in the interior area of the opening part and spaced apart from each other.Type: ApplicationFiled: May 24, 2012Publication date: December 6, 2012Applicant: SEIKO EPSON CORPORATIONInventors: Tomoaki NAKAMURA, Tsutomu NISHIWAKI
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Publication number: 20120174672Abstract: An ultrasonic sensor includes: a substrate; an ultrasonic transducer disposed on the substrate, and configured and arranged to transmit ultrasonic waves that propagate as plane waves in a direction orthogonal to a surface of the substrate; an acoustic refracting part contacting the ultrasonic transducer, and configured and arranged to refract the ultrasonic waves transmitted from the ultrasonic transducer; an elastically deformable elastic portion contacting the acoustic refracting part; and an ultrasonic reflecting member disposed within the elastic portion, and configured and arranged to reflect the ultrasonic waves. The acoustic refracting part is configured and arranged to refract, toward the ultrasonic reflecting member, the ultrasonic waves transmitted from the ultrasonic transducer.Type: ApplicationFiled: December 21, 2011Publication date: July 12, 2012Applicant: SEIKO EPSON CORPORATIONInventors: Jiro TSURUNO, Tsutomu NISHIWAKI, Tomoaki NAKAMURA
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Publication number: 20120026250Abstract: A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.Type: ApplicationFiled: October 5, 2011Publication date: February 2, 2012Applicant: SEIKO EPSON CORPORATIONInventors: Shiro Yazaki, Setsuya Iwashita, Eiju Hirai, Tsutomu Nishiwaki
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Patent number: 8057018Abstract: A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.Type: GrantFiled: February 24, 2009Date of Patent: November 15, 2011Assignee: Seiko Epson CorporationInventors: Shiro Yazaki, Setsuya Iwashita, Eiju Hirai, Tsutomu Nishiwaki
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Publication number: 20110193363Abstract: A stress sensing device senses a shear force and a pressing force. The stress sensing device includes a support body, a support film, first and second piezoelectric parts and an elastic layer. The support body has an opening defined by a pair of straight parts perpendicular to a sensing direction of the shear force and parallel to each other. The support film having flexibility closes off the opening. The first piezoelectric part is disposed over the support film and straddling an inside portion and an outside portion of the opening along at least one of the straight parts of the opening as seen in plan view. The second piezoelectric part is disposed to the inside portion of the opening and set apart from the first piezoelectric part as seen in the plan view. The elastic layer covers the first piezoelectric part, the second piezoelectric part, and the support film.Type: ApplicationFiled: February 8, 2011Publication date: August 11, 2011Applicant: SEIKO EPSON CORPORATIONInventor: Tsutomu NISHIWAKI
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Patent number: 7992972Abstract: A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.Type: GrantFiled: March 17, 2009Date of Patent: August 9, 2011Assignee: Seiko Epson CorporationInventors: Toshinao Shinbo, Kazushige Hakeda, Koji Sumi, Tsutomu Nishiwaki
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Publication number: 20110121591Abstract: A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.Type: ApplicationFiled: November 19, 2010Publication date: May 26, 2011Applicant: SEIKO EPSON CORPORATIONInventor: Tsutomu NISHIWAKI
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Publication number: 20110115337Abstract: An ultrasonic transducer includes: a support member having an opening section; a diaphragm adapted to cover the opening section; and a piezoelectric member provided to the diaphragm and at least one of expanding and contracting in an in-plane direction in response to application of a voltage, wherein the diaphragm has a concave groove section formed to have a concave shape on a surface on an opposite side to one side exposed to the opening section, and the piezoelectric member is fixed to the diaphragm in an area outside the concave groove section, and disposed to cover the concave groove section so as to be opposed to a bottom of the concave groove section via a space.Type: ApplicationFiled: November 15, 2010Publication date: May 19, 2011Applicant: SEIKO EPSON CORPORATIONInventors: Tomoaki NAKAMURA, Tsutomu NISHIWAKI
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Patent number: 7725996Abstract: A method for producing an actuator device, comprising the steps of: forming a vibration plate on a substrate; and forming a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate, wherein in the step of forming the piezoelectric element, the upper electrode is formed on the piezoelectric layer by sputtering, a temperature of 25 to 250 (° C.) and a pressure of 0.4 to 1.5 (Pa) are used during the sputtering, and upon the sputtering, the upper electrode having a thickness of 30 to 100 (nm), stress of 0.3 to 2.0 (GPa), and specific resistance of 2.0 (×10?7 ?·m) or less is formed.Type: GrantFiled: August 9, 2006Date of Patent: June 1, 2010Assignee: Seiko Epson CorporationInventors: Xin-Shan Li, Tsutomu Nishiwaki