Patents by Inventor Tsutomu Ohshimo

Tsutomu Ohshimo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and substrate transporting device mounted thereto
    Patent number: 7392812
    Abstract: The invention provides a substrate processing apparatus including a processing tank for processing substrates, a transporting path provided along the processing tank, a substrate transporting device moving along the transporting path for transporting the substrates, wherein the substrate processing apparatus and the substrate transporting device mounted thereto may realize the improvement of the throughput of substrate processing without increasing the area for installing the substrate processing apparatus. There are provided at least two substrate transporting devices that are capable of moving on the identical transporting path. The movable ranges of the respective substrate transporting devices for transporting the substrates are overlapped with respect to each other. When transportation of the substrates is required simultaneously at a plurality of processing tanks in scheduling data prepared by a scheduler, the scheduling data is determined by referencing substrate transportation sharing conditions.
    Type: Grant
    Filed: October 17, 2003
    Date of Patent: July 1, 2008
    Assignee: Kaijo Corporation
    Inventors: Tsutomu Ohshimo, Akira Fukui, Junichi Itakura, Naoki Kyoya
  • Substrate processing apparatus and substrate transporting device mounted thereto
    Publication number: 20040129300
    Abstract: The invention provides a substrate processing apparatus including a processing tank for processing substrates, a transporting path provided along the processing tank, a substrate transporting device moving along the transporting path for transporting the substrates, wherein the substrate processing apparatus and the substrate transporting device mounted thereto may realize the improvement of the throughput of substrate processing without increasing the area for installing the substrate processing apparatus. There are provided at least two substrate transporting devices that are capable of moving on the identical transporting path. The movable ranges of the respective substrate transporting devices for transporting the substrates are overlapped with respect to each other. When transportation of the substrates is required simultaneously at a plurality of processing tanks in scheduling data prepared by a scheduler, the scheduling data is determined by referencing substrate transportation sharing conditions.
    Type: Application
    Filed: October 17, 2003
    Publication date: July 8, 2004
    Applicant: KAIJO CORPORATION
    Inventors: Tsutomu Ohshimo, Akira Fukui, Junichi Itakura, Naoki Kyoya