Abstract: The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.

Abstract: A fluid control device that can be miniaturized without reducing a bolt diameter and a path diameter is provided. A fluid controller 31 having an inlet port 31a and an outlet port 31b aligned in a line direction and a line-to-line connection port 31c positioned in the middle of the above ports in the line direction is supported by a pair of joint members 7, a stepped part 7a is formed at each upper surface of opposed parts of the joint members 7, and line-to-line connection path forming members 9 and 10 having line-to-line paths 13 and 18 each communicating with the line-to-line connection port 31c of the fluid controller 31, respectively and constituting line-to-line connecting means 8 are supported by the stepped parts 7a of the joint members 7.

Abstract: An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.

Abstract: A pressure type flow rate control reference which allows performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.

Abstract: The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.

Abstract: Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value.

Abstract: The present invention provides a system for recording valve actuation information that enables to figure out the actual operation condition of each individual valve without checking plural valves individually, and the valves do not have to be wired, and the structure of the system is simple. The present invention is a system for recording valve actuation information comprising a valve, detecting means for detecting actuation of said valve, a RFID tag affixed to said valve and recording the valve actuation information detected by said detecting means, and a terminal for reading out the valve actuation information detected by said detecting means, wherein said RFID tag searches said terminal by intermittently transmitting a radio wave, wherein said RFID tag transfers the valve actuation information recorded in said RFID tag to said terminal when said RFID tag detects said terminal.

Abstract: Force amplifying means 5 comprises a tapered member 41 extending vertically downward from the lower end of an operating rod 3, a disk member 42 provided at the upper end of a valve stem 16, and front and rear pivotal members 43, 44 arranged between the two members 41, 42 and opposed to each other with the tapered member 41 positioned therebetween, the pivotal members 43, 44 being pivotally movable about respective pivots 45, 46. Each of the pivotal members 43, 44 has a plate body 43a, 44a, an upper contact face 43b, 44b formed on an upper portion of the body and in bearing contact with a tapered face of the tapered member 41, and a lower contact face 43c, 44c formed on a lower portion of the body and bearing on the upper surface of the disk member 42. The lower contact face 43c, 44c of each pivotal member is in the form of a circular-arc cam face centered about a center line positioned away from the axis of the pivot 45, 46.

Abstract: A rectangular parallelepipedal joint for use in fluid control apparatus comprises in its entirety two divided members which are a grooved connecting member having a groove in its center and provided in portions thereof on respective opposite sides of the groove with bolt holes each having a stepped portion for receiving therein a joint attaching bolt without permitting the head thereof to project from the joint and with female screw portions for respective male screw members to be screwed in for attaching an apparatus component; and a flat rectangular parallelepipedal communication member fitting in the groove of the connecting member and provided only with a U-shaped communication channel. The connecting member is made of stainless steel, while the communication member is made of polyamide 6. A positioning protrusion is formed on a bottom face defining the groove of the connecting member and is fitted in a positioning recessed portion formed in the bottom surface of the communication member.

Abstract: A controller comprises power transmitting means (11) for amplifying the force applied on the operating shaft (6) and transmitting to the valve rod (4); and a slow start means (12) for slowly moving the operating shaft (6) upward are arranged. The slow start means (12) includes a piston (8) that moves up and down with respect to the operating shaft (6); a pressure spring (44), arranged between a pressure spring receiver (43) arranged at the operating shaft.

Abstract: Line interconnecting means 50 comprises lower channel blocks 51 each having a line interconnecting channel 54 and arranged in an upper stage of lines B1, B2, B3 to be interconnected, at the same position with respect to the direction of the lines, and a plurality of upper channel blocks 57 each arranged on an upper side of the lower channel blocks 51 of adjacent lines interconnected and each having a transverse channel 58a extending orthogonal to the lines and downward channel 58b extending from the transverse channel 58a and communicating with the respective line interconnecting channels 54 of the lower channel blocks 51. Each of the lower channel blocks 51 is removably fastened to a coupling member in a lower stage with screws from above, and the upper channel blocks 57 are removably fastened to the lower channel blocks 51 with screws from above.

Abstract: Two coupling members are provided in respective butting end faces thereof with annular recessed portions surrounding respective fluid channels thereof and having annular projections each formed in a bottom face of the recessed portion. A gasket comprises a sealing portion having an outside diameter smaller than the diameter of the recessed portions and is positioned between the projections of the coupling members, and a guide has an outside diameter permitting the guide to be fitted into the recessed portions and positioned externally of the sealing portion. The butting end faces of the coupling members are movable into contact with each other when the coupling is tightened up properly. The sealing portion has an annular groove formed in an outer periphery thereof, and the sealing portion and the guide are connected together by a snap ring fitted in the annular groove.

Abstract: A fluid control device 71 includes a working member 75 in automatic opening and closing, which is moved vertically by introduction or discharge of compressed fluid to or from a compressed fluid inlet chamber 90 formed in a casing 73 to move a valve element holder 5 to an opening position against bias force of a compression coil spring 77, and an working member 74 in manual opening and closing, which is moved vertically by a manual operation and directly presses the valve element holder 5 downward when it is moved downward.

Abstract: Force amplifying means 5 comprises a tapered member 41 extending vertically downward from the lower end of an operating rod 3, a disk member 42 provided at-the upper end of a valve stem 16, and front and rear pivotal members 43, 44 arranged between the two members 41, 42 and opposed to each other with the tapered member 41 positioned therebetween, the pivotal members 43, 44 being pivotally movable about respective pivots 45, 46. Each of the pivotal members 43, 44 has a plate body 43a, 44a, an upper contact face 43b, 44b formed on an upper portion of the body and in bearing contact with a tapered face of the tapered member 41, and a lower contact face 43c, 44c formed on a lower portion of the body and bearing on the upper surface of the disk member 42. The lower contact face 43c, 44c of each pivotal member is in the form of a circular-arc cam face centered about a center line positioned away from the axis of the pivot 45, 46.

Abstract: Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface.

Abstract: Line interconnecting means 50 comprises lower channel blocks 51 each having a line interconnecting channel 54 and arranged in an upper stage of lines B1, B2, B3 to be interconnected, at the same position with respect to the direction of the lines, and a plurality of upper channel blocks 57 each arranged on an upper side of the lower channel blocks 51 of adjacent lines interconnected and each having a transverse channel 58a extending orthogonal to the lines and downward channel 58b extending from the transverse channel 58a and communicating with the respective line interconnecting channels 54 of the lower channel blocks 51. Each of the lower channel blocks 51 is removably fastened to a coupling member in a lower stage with screws from above, and the upper channel blocks 57 are removably fastened to the lower channel blocks 51 with screws from above.

Abstract: Two coupling member 1, 2 are provided in respective butting end faces thereof with annular recessed portions 3, 4 surrounding respective fluid channels 1a, 2a thereof and having annular projections 5, 6 each formed in a bottom face of the recessed portion. A gasket 10 comprises a sealing portion 11 having an outside diameter smaller than the diameter of the recessed portions 3, 4 and positioned between the projections 5, 6 of the coupling members 1, 2, and a guide 12 having an outside diameter permitting the guide to be fitted into the recessed portions 3, 4 and positioned externally of the sealing portion 11. The butting end faces of the coupling members 1, 2 are movable into contact with each other when the coupling is tightened up properly. The sealing portion 11 has an annular groove 14 formed in an outer periphery thereof, and the sealing portion 11 and the guide 12 are connected together by a snap ring 13 fitted in the annular groove 14.

Abstract: First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.

Abstract: A pair of tape heaters 11 are arranged respectively on opposite sides of at least one line and held to the corresponding coupling members by a plurality of clips 12. Each of the clips 12 comprises a pair of side walls 13 opposed to each other as spaced apart by a predetermined distance, and a connecting wall 14 interconnecting the pair of side walls 13 at an intermediate portion of the height thereof so as to move lower portions of the side walls 13 away from each other when upper portions of the side walls 13 are subjected to a force acting to move the upper portions toward each other and to restore the side walls 13 to the original state when the force is removed.