Patents by Inventor Tsutomu UJIIE

Tsutomu UJIIE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NOZZLE, CLEANING DEVICE, AND CLEANING METHOD
    Publication number: 20160184967
    Abstract: To suppress the generation, on a surface to be cleaned of a substrate after cleaning, of metal contamination caused by erosion of an inner wall of a path of a nozzle. One aspect of the present invention is a nozzle 11 that causes CO2 particles to be ejected to a substrate, wherein a hard film having a Vickers hardness of Hv 1000 to 5000 is formed on an inner wall of the nozzle.
    Type: Application
    Filed: August 13, 2013
    Publication date: June 30, 2016
    Inventors: Tsutomu UJIIE, Yuuji HONDA