Abstract: In order to reduce the number of electrodes included in test patterns, the semiconductor integrated circuit includes, a plurality of first and second chains, a first common electrode connected to one end of each first chain, a second common electrode connected to one end of each second chain, and a plurality of selection electrodes. Each selection electrode is connected to the other end of any one of the plurality of first chains and to the other end of any one of the plurality of second chains. When a test target chain is selected from the plurality of first chains, a first reference voltage is applied to the first common electrode, a second reference voltage is applied to a target selection electrode that is connected to the test target chain, and a current flowing in the target selection electrode is measured to obtain a resistance value of the test target chain.

Abstract: A semiconductor device includes a semiconductor chip, wiring formed thereon, a first insulating film formed on the wiring, provided with a first opening, a pad electrode formed so as to be in contact with the wiring, a second insulating film formed on the pad electrode film, provided with a second opening, and a flip chip bump formed so as to be in contact with the pad electrode film. In this case, the second insulating film exists between the flip chip bump and the pad electrode film, in a region directly underneath the outer edge of the flip chip bump, as seen in a plan view, and the outer edge of the flip chip bump is formed in a region inside the outer edge of the pad electrode film.

Abstract: A semiconductor device includes a semiconductor chip, wiring formed thereon, a first insulating film formed on the wiring, provided with a first opening, a pad electrode formed so as to be in contact with the wiring, a second insulating film formed on the pad electrode film, provided with a second opening, and a flip chip bump formed so as to be in contact with the pad electrode film. In this case, the second insulating film exists between the flip chip bump and the pad electrode film, in a region directly underneath the outer edge of the flip chip bump, as seen in a plan view, and the outer edge of the flip chip bump is formed in a region inside the outer edge of the pad electrode film.

Abstract: The present invention provides a semiconductor device for which thermal stress at mounting is reduced and a reduction in reliability with regard to moisture absorption is prevented. The semiconductor device includes a uppermost metal layer 12, a solder bump 17, metals 15 and 16 which connect an uppermost metal layer 12 and the solder bump 17, and, a polyimide multilayer 14 having formed therein an opening 14x in which the metals 15 and 16 are provided. The polyimide multilayer 14 includes a first polyimide layer 14A and a second polyimide layer 14B formed on the first polyimide layer 14A. The second polyimide layer 14B is softer than the first polyimide layer 14A. A thermal stress at mounting is reduced by the second polyimide layer 14B. Since the first polyimide layer 14A has a higher strength than the second polyimide layer 14B, even if cracking occurs in the second polyimide layer 14B, the cracks are prevented from developing in the first polyimide layer 14A.

Abstract: In order to reduce the number of electrodes included in test patterns, the semiconductor integrated circuit includes, a plurality of first and second chains, a first common electrode connected to one end of each first chain, a second common electrode connected to one end of each second chain, and a plurality of selection electrodes. Each selection electrode is connected to the other end of any one of the plurality of first chains and to the other end of any one of the plurality of second chains. When a test target chain is selected from the plurality of first chains, a first reference voltage is applied to the first common electrode, a second reference voltage is applied to a target selection electrode that is connected to the test target chain, and a current flowing in the target selection electrode is measured to obtain a resistance value of the test target chain.

Abstract: Provided is a semiconductor device having a bump structure which is capable of resolving inconvenience in mounting. The semiconductor device comprises: an electrode pad; and a columnar bump formed on the electrode pad, the columnar bump comprising: a first high melting point metal layer (14) formed on the electrode pad; a first solder (15) formed on the first high melting point metal layer (14); a second high melting point metal layer (16) formed on the first solder (15); and a second solder (17) which is formed on the second high melting point metal layer (16) and is connected to an external.

Abstract: The present invention provides a semiconductor device for which thermal stress at mounting is reduced and a reduction in reliability with regard to moisture absorption is prevented. The semiconductor device includes a uppermost metal layer 12, a solder bump 17, metals 15 and 16 which connect an uppermost metal layer 12 and the solder bump 17, and, a polyimide multilayer 14 having formed therein an opening 14x in which the metals 15 and 16 are provided. The polyimide multilayer 14 includes a first polyimide layer 14A and a second polyimide layer 14B formed on the first polyimide layer 14A. The second polyimide layer 14B is softer than the first polyimide layer 14A. A thermal stress at mounting is reduced by the second polyimide layer 14B. Since the first polyimide layer 14A has a higher strength than the second polyimide layer 14B, even if cracking occurs in the second polyimide layer 14B, the cracks are prevented from developing in the first polyimide layer 14A.

Abstract: The first GaAs layer and a FET gate electrode are formed on the top surface of an epitaxial substrate. An AlGaAs layer, the second GaAs layer and the first diode electrode are successively formed on the top surface of the first GaAs layer and near the left end thereof. A diode/FET electrode is formed on the top surface of the first GaAs layer and between the first diode electrode and the FET gate electrode. The diode/FET electrode serves as the second diode electrode in combination with the first diode electrode, and as a source or drain electrode in combination with the FET gate electrode. The first diode electrode is formed by evaporation, and the FET gate electrode is formed by spattering. Since the physical property of the first diode electrode is different form that of the FET gate electrode, the noise characteristic of the diode in the low frequency band and the heat-resisting property of the FET can be simultaneously improved in the same chip.