Patents by Inventor Tsuyoshi Fujinaka

Tsuyoshi Fujinaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illuminance measurement apparatus and exposure apparatus
    Patent number: 6690455
    Abstract: An illuminance measurement apparatus for measuring the illuminance of illumination light on an image plane of a projection optical system of an exposure apparatus designed to project the image of a pattern from an illuminated mask on a substrate held on a substrate stage by the projection optical system, including an illuminance meter detachably attached to the substrate stage, the illuminance meter having an illuminance detector, a transmitter for wirelessly transmitting a measurement result of the illuminance detector, a storage cell, and a photoelectric converter for converting part of the illumination light photoelectrically and storing it in the storage cell, and a receiver for receiving the wireless signal including the measurement results transmitted by the transmitter.
    Type: Grant
    Filed: March 22, 2001
    Date of Patent: February 10, 2004
    Assignee: Nikon Corporation
    Inventor: Tsuyoshi Fujinaka
  • Illuminance measurement apparatus and exposure apparatus
    Publication number: 20010050769
    Abstract: An illuminance measurement apparatus for measuring the illuminance of illumination light on an image plane of a projection optical system of an exposure apparatus designed to project the image of a pattern from an illuminated mask on a substrate held on a substrate stage by the projection optical system, including an illuminance meter detachably attached to the substrate stage, the illuminance meter having an illuminance detector, a transmitter for wirelessly transmitting a measurement result of the illuminance detector, a storage cell, and a photoelectric converter for converting part of the illumination light photoelectrically and storing it in the storage cell, and a receiver for receiving the wireless signal including the measurement results transmitted by the transmitter.
    Type: Application
    Filed: March 22, 2001
    Publication date: December 13, 2001
    Inventor: Tsuyoshi Fujinaka