Patents by Inventor Tsuyoshi Inanobe

Tsuyoshi Inanobe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam apparatus and method for production of its specimen chamber
    Patent number: 7566892
    Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
    Type: Grant
    Filed: October 11, 2007
    Date of Patent: July 28, 2009
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Tsuyoshi Inanobe, Sho Takami, Yoichi Ose, Katsuhiro Sasada
  • Electron beam apparatus and method for production of its specimen chamber
    Patent number: 7435958
    Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
    Type: Grant
    Filed: February 17, 2006
    Date of Patent: October 14, 2008
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Tsuyoshi Inanobe, Sho Takami, Yoichi Ose, Katsuhiro Sasada
  • Electron Beam Apparatus and Method for Production of Its Specimen Chamber
    Publication number: 20080048118
    Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
    Type: Application
    Filed: October 11, 2007
    Publication date: February 28, 2008
    Inventors: Tsuyoshi Inanobe, Sho Takami, Yoichi Ose, Katsuhiro Sasada
  • Electron beam apparatus and method for production of its specimen chamber
    Patent number: 7205550
    Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
    Type: Grant
    Filed: June 12, 2006
    Date of Patent: April 17, 2007
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Tsuyoshi Inanobe, Sho Takami, Yoichi Ose, Katsuhiro Sasada
  • Electron beam apparatus and method for production of its specimen chamber
    Publication number: 20060232445
    Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
    Type: Application
    Filed: June 12, 2006
    Publication date: October 19, 2006
    Inventors: Tsuyoshi Inanobe, Sho Takami, Yoichi Ose, Katsuhiro Sasada
  • Electron beam apparatus and method for production of its specimen chamber
    Publication number: 20060219946
    Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
    Type: Application
    Filed: February 17, 2006
    Publication date: October 5, 2006
    Inventors: Tsuyoshi Inanobe, Sho Takami, Yoichi Ose, Katsuhiro Sasada
  • Electron beam apparatus and method for production of its specimen chamber
    Patent number: 7030376
    Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
    Type: Grant
    Filed: December 23, 2003
    Date of Patent: April 18, 2006
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Tsuyoshi Inanobe, Sho Takami, Yoichi Ose, Katsuhiro Sasada
  • Electron beam apparatus and method for production of its specimen chamber
    Publication number: 20040135082
    Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
    Type: Application
    Filed: December 23, 2003
    Publication date: July 15, 2004
    Inventors: Tsuyoshi Inanobe, Sho Takami, Yoichi Ose, Katsuhiro Sasada