Patents by Inventor Tsuyoshi Inomata

Tsuyoshi Inomata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for producing semiconductor device
    Patent number: 5932014
    Abstract: A semiconductor device producing apparatus includes a first transporter which moves a substrate to a first unit to undergo at least a first process, and a second transporter, other than the first transporter, which moves the substrate to a second unit, to undergo at least a second process.
    Type: Grant
    Filed: November 13, 1996
    Date of Patent: August 3, 1999
    Assignees: Fujitsu Limited, Fujitsu Tohoku Electronics Ltd.
    Inventors: Tetsuya Hayashi, Kazunori Okuyama, Tsuyoshi Inomata, Koji Nozaki, Minoru Hirose
  • Apparatus for producing semiconductor device
    Patent number: 5609688
    Abstract: A semiconductor device producing method includes the steps of (a) subjecting a substrate which is transported by first transport means to at least a first process within a first unit, and (b) subjecting the substrate which is subjected to the step (a) and is transported by second transport means other than the first transport means to at least a second process within a second unit.
    Type: Grant
    Filed: March 22, 1994
    Date of Patent: March 11, 1997
    Assignee: Fujitsu Ltd.
    Inventors: Tetsuya Hayashi, Kazunori Okuyama, Tsuyoshi Inomata, Koji Nozaki, Minoru Hirose