Patents by Inventor Tsuyoshi Mita

Tsuyoshi Mita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7958608
    Abstract: The piezoelectric device includes a substrate, a first electrode formed on the substrate, a piezoelectric film formed on the first electrode and a second electrode formed on a second side of the piezoelectric film which is away from a first side where the first electrode is formed. The first electrode is composed of a first layer in contact with the substrate and a second layer in contact with the piezoelectric film. The first layer is formed of a material that is wet etched at a different rate than the substrate. The ink-jet head includes the piezoelectric device, a liquid droplet storing/ejecting member for ejecting ink droplets through a ink spout and provided on the piezoelectric device and a diaphragm for vibrating in response to expansion or contraction of the piezoelectric device and provided between the piezoelectric device and the liquid droplet storing/ejecting member.
    Type: Grant
    Filed: September 8, 2008
    Date of Patent: June 14, 2011
    Assignee: Fujifilm Corporation
    Inventors: Takamichi Fujii, Yasukazu Nihei, Yoshikazu Hishinuma, Tsuyoshi Mita
  • Publication number: 20110063348
    Abstract: A liquid ejection head includes a piezoelectric actuator that changes volume of a pressure chamber to cause liquid in the pressure chamber to eject from a nozzle connected with the pressure chamber, wherein the piezoelectric actuator is formed into a projecting shape protruding toward the pressure chamber, and displaced in a direction opposite to the pressure chamber when applied with a driving voltage, to increase the volume of the pressure chamber.
    Type: Application
    Filed: September 13, 2010
    Publication date: March 17, 2011
    Inventor: Tsuyoshi Mita
  • Patent number: 7882636
    Abstract: An inkjet head, comprising: a pressure chamber which are arranged two-dimensionally, and deformed by pressure generating unit and discharging ink from nozzles communicated with the pressure chamber; and a piezoelectric element which is included in the pressure generating unit, said piezoelectric element including a thin film piezoelectric element formed by means of a thin film forming technique.
    Type: Grant
    Filed: June 23, 2009
    Date of Patent: February 8, 2011
    Assignee: Fujifilm Corporation
    Inventors: Tsuyoshi Mita, Kazuo Sanada
  • Patent number: 7832845
    Abstract: The liquid ejection head includes: a substrate made of a prescribed material on which a thin film is deposited to constitute a diaphragm; a piezoelectric body which is formed on a face of the diaphragm reverse to a face adjacent to the substrate; and a pressure chamber which is formed on the substrate by etching in a plurality of steps from a side reverse to a side adjacent to the diaphragm and has a difference in width thereof.
    Type: Grant
    Filed: March 29, 2007
    Date of Patent: November 16, 2010
    Assignee: Fujifilm Corporation
    Inventor: Tsuyoshi Mita
  • Patent number: 7819509
    Abstract: The liquid ejection head includes: a liquid ejection port; a pressure chamber which has a recess part connected to the liquid ejection port; a lower electrode which is arranged on the pressure chamber; a piezoelectric body which has a planar face arranged on the lower electrode; and an upper electrode which is arranged on the piezoelectric body, wherein: a cross section of the recess part of the pressure chamber taken in parallel to the planar face of the piezoelectric body is oblong and has a breadth CWx in a breadthways direction and a length CWy in a lengthwise direction; the piezoelectric body has an active region having a breadth DWx in the breadthways direction of the cross section of the recess part of the pressure chamber and a length DWy in the lengthwise direction of the cross section of the recess part of the pressure chamber.
    Type: Grant
    Filed: September 27, 2007
    Date of Patent: October 26, 2010
    Assignee: Fujifilm Corporation
    Inventor: Tsuyoshi Mita
  • Publication number: 20100231650
    Abstract: A liquid ejection head includes: a flow channel unit having a plurality of pressure chambers arranged in a plane; and piezoelectric actuators which change volume of the plurality of pressure chambers so as to apply pressure to liquid inside the plurality of the pressure chambers respectively, wherein the piezoelectric actuators comprise: a diaphragm which constitutes one wall of the plurality of pressure chambers; a common electrode formed on a surface of the diaphragm; a piezoelectric layer formed on a surface of the common electrode; a plurality of ring-shaped individual electrodes formed on a surface of the piezoelectric layer and formed in regions which overlap respectively with marginal portions which are non-central portions of the plurality of pressure chambers, as viewed from a direction perpendicular to the plane; and central electrodes connected electrically to the common electrode, and formed so as not to make contact with the plurality of ring-shaped individual electrodes in inner regions of the p
    Type: Application
    Filed: March 10, 2010
    Publication date: September 16, 2010
    Inventor: Tsuyoshi Mita
  • Publication number: 20100201755
    Abstract: A liquid ejection head includes: a flow channel unit including a plurality of pressure chambers arranged along a plane surface; and a piezoelectric actuator for changing volume of the plurality of pressure chambers so as to pressurize liquid in the plurality of pressure chambers, the piezoelectric actuator comprising: a diaphragm forming one wall surface of the plurality of pressure chambers; a plurality of piezoelectric bodies arranged on first regions of the diaphragm that are within a surface of the diaphragm opposite from the plurality of pressure chambers, the first regions overlapping with the plurality of pressure chambers respectively when viewed in a direction perpendicular to the plane surface; a plurality of individual electrodes arranged on second regions of one surface of the plurality of piezoelectric bodies respectively, the second regions overlapping with marginal parts of the plurality of pressure chambers that are non-central parts of the plurality of pressure chambers when viewed in the dir
    Type: Application
    Filed: February 9, 2010
    Publication date: August 12, 2010
    Inventor: Tsuyoshi Mita
  • Patent number: 7768178
    Abstract: In a piezoelectric device, a first electrode, a first piezoelectric film, a second piezoelectric film, and a second electrode are formed in this order on a first electrode formed above a surface of the substrate, and an intermediate electrode is arranged between the first and second piezoelectric films. Each of the first and second piezoelectric films has a thickness of 10 micrometers or smaller, and has a first surface facing toward the substrate and a second surface opposite to the first surface. At least one of the first and second surfaces has an arithmetic average surface roughness (Ra) of 0.5 micrometers or smaller.
    Type: Grant
    Filed: July 24, 2008
    Date of Patent: August 3, 2010
    Assignee: Fujifilm Corporation
    Inventors: Takamichi Fujii, Tsuyoshi Mita, Yoshikazu Hishinuma
  • Patent number: 7681998
    Abstract: The laminated piezoelectric element comprises a plurality of layers including first electrodes, piezoelectric material bodies, and second electrodes, wherein: the layers are laminated in order of the first electrode, the piezoelectric material body, the second electrode, and the piezoelectric material body; a plurality of active parts of the laminated piezoelectric element, where the piezoelectric material bodies are capable of actively expanding and contracting when a voltage is applied to the first electrode and the second electrode that are mutually opposing across the piezoelectric material body, are two-dimensionally arranged in a row direction and a column direction; and the first electrodes are common to the plurality of active parts in the row direction and the second electrodes are common to the plurality of active parts in the column direction.
    Type: Grant
    Filed: June 2, 2005
    Date of Patent: March 23, 2010
    Assignee: Fujifilm Corporation
    Inventor: Tsuyoshi Mita
  • Patent number: 7665831
    Abstract: The image forming apparatus in which a plurality of ink chambers filled with ink are aligned, said ink chambers being expanded or contracted and ink being discharged from nozzles of the ink chambers onto a recording medium, by applying a voltage to piezoelectric elements provided on the outer perimeter or the outer side of the ink chambers, wherein said piezoelectric elements are arranged in a substantially parallel plane to the nozzle surface; and shorting devices which short the electrodes of said piezoelectric elements are provided.
    Type: Grant
    Filed: September 28, 2004
    Date of Patent: February 23, 2010
    Assignee: Fujifilm Corporation
    Inventor: Tsuyoshi Mita
  • Patent number: 7661180
    Abstract: The method of manufacturing a piezoelectric actuator includes the steps of: carrying out a first heat treatment of a diaphragm of stainless steel containing iron, chromium and aluminum, in a gas containing oxygen, so as to form an aluminum oxide film on a first surface of the diaphragm and form a chromium oxide film between the aluminum oxide film and the first surface of the diaphragm; forming a lower electrode on the aluminum oxide film; forming a piezoelectric body on a surface of the lower electrode reverse to a surface of the lower electrode on which the chromium oxide film and the aluminum oxide film are formed; forming an upper electrode on a surface of the piezoelectric body reverse to a surface of the piezoelectric body on which the lower electrode is formed; and calcining the piezoelectric body by carrying out a second heat treatment of the diaphragm with which the piezoelectric body is provided.
    Type: Grant
    Filed: December 12, 2006
    Date of Patent: February 16, 2010
    Assignee: Fujifilm Corporation
    Inventor: Tsuyoshi Mita
  • Patent number: 7661801
    Abstract: An ink-jet recording head having no piezoelectric element in a part where no piezoelectric element is required and including an individual electrode lead-out part having such a cross section that allows smooth power supply is provided. The ink-jet recording head includes an individual electrode having an individual electrode main body formed at a position corresponding to an ink chamber and an individual electrode lead-out part for supplying power, a piezoelectric element formed to contact the individual electrode, and a diaphragm formed to contact the piezoelectric element. The individual electrode lead-out part is connected to the individual electrode main body from a position offset from a face including an electrode face of the individual electrode main body, and the piezoelectric element is formed into a shape corresponding to the individual electrode main body.
    Type: Grant
    Filed: November 21, 2006
    Date of Patent: February 16, 2010
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Tsuyoshi Mita, Kazuaki Kurihara
  • Publication number: 20090313826
    Abstract: The method of manufacturing a piezoelectric actuator includes the steps of: carrying out a first heat treatment of a diaphragm of stainless steel containing iron, chromium and aluminum, in a gas containing oxygen, so as to form an aluminum oxide film on a first surface of the diaphragm and form a chromium oxide film between the aluminum oxide film and the first surface of the diaphragm; forming a lower electrode on the aluminum oxide film; forming a piezoelectric body on a surface of the lower electrode reverse to a surface of the lower electrode on which the chromium oxide film and the aluminum oxide film are formed; forming an upper electrode on a surface of the piezoelectric body reverse to a surface of the piezoelectric body on which the lower electrode is formed; and calcining the piezoelectric body by carrying out a second heat treatment of the diaphragm with which the piezoelectric body is provided.
    Type: Application
    Filed: August 26, 2009
    Publication date: December 24, 2009
    Inventor: Tsuyoshi MITA
  • Publication number: 20090309936
    Abstract: The method of manufacturing a piezoelectric actuator includes the steps of: carrying out a first heat treatment of a diaphragm of stainless steel containing iron, chromium and aluminum, in a gas containing oxygen, so as to form an aluminum oxide film on a first surface of the diaphragm and form a chromium oxide film between the aluminum oxide film and the first surface of the diaphragm; forming a lower electrode on the aluminum oxide film; forming a piezoelectric body on a surface of the lower electrode reverse to a surface of the lower electrode on which the chromium oxide film and the aluminum oxide film are formed; forming an upper electrode on a surface of the piezoelectric body reverse to a surface of the piezoelectric body on which the lower electrode is formed; and calcining the piezoelectric body by carrying out a second heat treatment of the diaphragm with which the piezoelectric body is provided.
    Type: Application
    Filed: August 26, 2009
    Publication date: December 17, 2009
    Inventor: Tsuyoshi Mita
  • Patent number: 7628470
    Abstract: The liquid ejection head ejects droplets of liquid from ejection ports by pressurizing the liquid filled in pressure chambers connected to the ejection ports.
    Type: Grant
    Filed: February 6, 2006
    Date of Patent: December 8, 2009
    Assignee: Fujifilm Corporation
    Inventor: Tsuyoshi Mita
  • Patent number: 7628474
    Abstract: The discharging head for discharging liquid onto a discharge receiving medium includes a vibration plate forming at least a portion of a pressure chamber storing liquid to be discharged and a piezoelectric element, joined to the vibration plate, for generating a pressure forming a discharge force for discharging liquid inside the pressure chamber. A recess is formed in the approximate center of the region of the vibration plate where the piezoelectric element is installed.
    Type: Grant
    Filed: September 29, 2004
    Date of Patent: December 8, 2009
    Assignee: Fujifilm Corporation
    Inventors: Tsuyoshi Mita, Hisamitsu Hori
  • Patent number: 7618129
    Abstract: The liquid ejection head includes: a nozzle plate which has a plurality of ejection apertures through which a liquid is ejected; a plurality of pressure chambers which are connected respectively to the ejection apertures; a plurality of liquid supply flow channels which supply the liquid respectively to the pressure chambers; a common liquid chamber which supplies the liquid to the liquid supply flow channels; a plurality of pressure generating devices which respectively deform the pressure chambers; and a plurality of electrical wires which supply drive signals to the pressure chamber generating devices, wherein the electrical wires are provided so as to pass through the common liquid chamber.
    Type: Grant
    Filed: September 14, 2005
    Date of Patent: November 17, 2009
    Assignee: Fujifilm Corporation
    Inventors: Kenichi Kodama, Toshiya Kojima, Kazuo Sanada, Tsuyoshi Mita, Seiichiro Oku, Kanji Nagashima
  • Patent number: 7607228
    Abstract: The method manufactures a liquid ejection head in which piezoelectric bodies are formed on a diaphragm which constitutes walls of a plurality of pressure chambers. The method comprises the steps of: filling piezoelectric material into a plurality of recess sections of a molding substrate formed with the plurality of recess sections so as to correspond to the pressure chambers; then performing a lamination step of arranging a first green sheet that is to form the diaphragm onto the molding substrate in such a manner that the first green sheet covers the recess sections filled with the piezoelectric material; then performing a first heating step of heating the piezoelectric material filled in the recess sections; and then separating the piezoelectric material from the molding substrate.
    Type: Grant
    Filed: February 28, 2006
    Date of Patent: October 27, 2009
    Assignee: Fujifilm Corporation
    Inventor: Tsuyoshi Mita
  • Publication number: 20090260207
    Abstract: An inkjet head, comprising: a pressure chamber which are arranged two-dimensionally, and deformed by pressure generating unit and discharging ink from nozzles communicated with the pressure chamber; and a piezoelectric element which is included in the pressure generating unit, said piezoelectric element including a thin film piezoelectric element formed by means of a thin film forming technique.
    Type: Application
    Filed: June 23, 2009
    Publication date: October 22, 2009
    Inventors: Tsuyoshi MITA, Kazuo Sanada
  • Publication number: 20090244203
    Abstract: The method of manufacturing a piezoelectric actuator, includes the steps of: forming a lower electrode film on an insulating substrate; forming a piezoelectric film on the lower electrode film; forming a slit on the piezoelectric film to expose a portion of the lower electrode film on an upper surface side of the piezoelectric film; forming an insulating layer which covers a portion of the piezoelectric film; forming an upper electrode film so as to span the insulating layer and the piezoelectric film; forming, on the piezoelectric film, a lower wire in connection with the portion of the lower electrode film exposed through the slit; depositing a first metal film on the lower wire and thereby making a film thickness of the lower wire greater than a film thickness of the lower electrode film; and depositing a second metal film on a portion of the upper electrode film on the insulating layer and thereby making a film thickness of the portion of the upper electrode film on the insulating layer greater than a fil
    Type: Application
    Filed: March 27, 2009
    Publication date: October 1, 2009
    Inventor: Tsuyoshi MITA