Abstract: Provided is a thrust sliding bearing which, while allowing a shaft member to smoothly rotate, can support for a long period of time a thrust load acting on the shaft member. A thrust sliding bearing comprises: an upper case (2) mounted to an upper support for mounting a strut-type suspension to a vehicle body; a lower case (3) mounted to an upper spring seat for supporting the upper end of the coil spring of the strut-type suspension, the lower case (3) being combined with the upper case (2) to form an annular space (5); and an annular center plate (4) disposed in the annular space (5) and enables the relative rotation between the upper case (2) and the lower case (3). The annular space (5) is filled with lubricating grease.

Abstract: A thrust sliding bearing includes a synthetic resin-made bearing body having a hollow cylindrical portion, an annular collar portion, an annular protruding portion, a tubular projecting portion, an engaging projecting portion, and an annular projecting portion; an annular cover having a disk portion, a tubular portion, and an engaging projecting portion; an annular metal plate having an outer disk portion and an inner disk portion; and a thrust sliding bearing which is interposed between the bearing body and an annular lower surface of the outer disk portion of the annular metal plate and renders the annular metal plate rotatable with respect to the bearing body in a direction about an axis of the bearing body.

Abstract: The first cushioning portion includes: a cushioning support portion that directly abuts the substrate storing container to support the substrate storing container; and a cushioning-portion connecting portion that is connected to the cushioning support portion, and extends downwards from the cushioning support portion. The second cushioning portion includes: a cushioning plate-like portion in which a through-hole is formed; and cushioning leg portions which are configured by a cushioning material which is softer than the cushioning-portion connecting portion of the first cushioning portion, and extend downwards from the cushioning plate-like portion. The cushioning plate-like portion supports the first cushioning portion in a state in which the cushioning-portion connecting portion penetrates through the through-hole of the cushioning plate-like portion.

Abstract: The lower lid includes a bottom plate that supports the substrate storing container and a lower lid peripheral wall that extends upwards from a periphery of the bottom plate. The sleeve member has a tubular shape having an axial center that extends in the upper/lower direction. The upper lid has a top plate and an upper lid peripheral wall that extends downwards. The lower lid includes device positioning portions. The device positioning portions can engage the positioned portion of the lifting device that lifts, from the lower lid, the substrate storing container which is supported by the lower lid in a state of the upper lid being removed therefrom.

Abstract: A substrate storing container that stores substrates composed of semiconductor wafers includes: a locked portion that is arranged at a center portion of an upper wall and is locked by a lifting member that can lift a container main body; in which the locked portion includes a plate-like flange portion having a lower face that faces the upper wall and an elastically deformable elastic member provided at a lower face of the flange portion and/or at a rim portion of the flange portion; and in which the locked portion is locked by the lifting member in a state in which the elastic member is sandwiched between the flange portion and the lifting member.

Abstract: A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.

Abstract: An upper cushioning material is placed on a substrate storing container in a packing box. The substrate storing container is placed on a lower cushioning material. The lower cushioning material is disposed in the packing box in such a manner that the substrate storing container is sandwiched in the vertical direction by an upper cushioning material and the lower cushioning material. Furthermore, the lower cushioning material is not in contact with any of a first side plate, a second side plate, a front plate and a back plate of the packing box, and a lower space is formed between the lower cushioning material and the first side plate, the second side plate, the front plate and the back plate of the packing box.

Abstract: The thrust slide bearing (1) has a synthetic resin bearing body (2) having a ring-shaped upper surface (5) that functions as a sliding surface, a ring-shaped metal plate (4) that is supported on the ring-shaped upper surface (5) to be freely rotatable relative to the bearing body (2), and a ring-shaped cover (3) disposed so as to cover the ring-shaped upper surface (5) and the ring-shaped metal plate (4). The ring-shaped metal plate (4) has an inner disc section (44) that is formed as a unit with an outer disc section (43) and is disposed in the through hole (25) of the ring-shaped cover (3). The inner disc section (44) also functions as a reinforcing part (rib) of the outer disc section (44). Thereby, the deformation of the thrust slide bearing (1)is prevented even when a large force is applied via the piston rod.

Abstract: A synthetic resin-made thrust sliding bearing includes a synthetic resin-made upper casing, a synthetic resin-made lower casing, and a synthetic resin-made thrust sliding bearing piece interposed between the upper casing and the lower casing.

Abstract: The substrate storage container includes: a container body for storing a semiconductor wafer; a lid body for opening and closing a front of the container body; and a locking mechanism for locking the lid body that has closed the front of the container body. The lid body is formed of a lid main body to be fitted to the front of the container body and a cover plate for covering a front face of the lid main body. The locking mechanism includes a rotating operation portion that is pivotally supported by the lid main body and rotationally operated from an outside of the cover plate. A plurality of posture control members for the rotating operation portions are provided for, at least, the cover plate, among the cover plate and the rotating operation portion.

Abstract: The lid body side wafer support parts allow flexibility to be exhibited and supports the wafers. If a closed state substrate is defined as being a wafer which is stored in the substrate storing space in a container main body in a state wherein the container main body opening portion is closed by the lid body, and a closed time center is defined as being the center of a closed state substrate, the back side substrate support portion, when a closed state substrate is viewed in the thickness direction, are disposed in a pair about a depth direction reference line and support the wafer. A center angle which the back side substrate support portion form toward the depth direction with respect to a left/right direction reference line when a closed state substrate is viewed in the thickness direction is 20-55°.

Abstract: A substrate storing container is provided with a lid-body-side substrate support section that can support the edges of a plurality of substrates when a container main body opening is occluded by the lid body. The lid-body-side substrate support section is provided with: a lid-body-side substrate receiving section and a pair of lid-body-side leg sections respectively connected to one end and the other end of the lid-body-side substrate receiving section. One lid-body-side leg section of the pair of lid-body-side leg sections is fixed at the outside of a concavity for fixing a lid-body leg section, and the other lid-body-side leg section of the pair of lid-body-side leg sections is fixed within the concavity for fixing a lid-body leg section.

Abstract: A thrust sliding bearing includes a synthetic resin-made bearing body having a hollow cylindrical portion, an annular collar portion, an annular protruding portion, a tubular projecting portion, an engaging projecting portion, and an annular projecting portion; an annular cover having a disk portion, a tubular portion, and an engaging projecting portion; an annular metal plate having an outer disk portion and an inner disk portion; and a thrust sliding bearing which is interposed between the bearing body and an annular lower surface of the outer disk portion of the annular metal plate and renders the annular metal plate rotatable with respect to the bearing body in a direction about an axis of the bearing body.

Abstract: A thrust sliding bearing includes a synthetic resin-made bearing body having a hollow cylindrical portion, an annular collar portion, an annular protruding portion, a tubular projecting portion, an engaging projecting portion, and an annular projecting portion; an annular cover having a disk portion, a tubular portion, and an engaging projecting portion; an annular metal plate having an outer disk portion and an inner disk portion; and a thrust sliding bearing which is interposed between the bearing body and an annular lower surface of the outer disk portion of the annular metal plate and renders the annular metal plate rotatable with respect to the bearing body in a direction about an axis of the bearing body.

Abstract: Wafer support shelves (10, 10) are each provided with wafer support projections (A, B1, B2) on which parts of the outer margins of a semiconductor wafer (W) are to be placed. In each case, one of the support projections (A, B1, B2) is provided on the far side of the center position of the semiconductor wafer (W), and two of the support projections are provided on the near side of the center of the semiconductor wafer. By means of this structure, in a state in which a lid body (3) is not attached to a wafer extraction/insertion opening (2), the flexure amount of the semiconductor wafers placed on the support projections of multiple locations in the wafer support shelves can be reduced with a minimal number of projections, so that a hindrance is not created to an operation such as extraction by a robot arm.

Abstract: Provided is a low height lightweight thrust slide bearing: which is capable of preventing the deformation of the ring-shaped metal plate and of reducing the generation of noise that occurs with the relative rotation of a piston rod even when a large force is applied on the metal plate via the piston rod; which is capable of preventing the intrusion of foreign matters such as dust from outside onto the sliding surfaces; and for which the number of constituent parts has been reduced. The thrust slide bearing (1) is provided with a synthetic resin bearing body (2) having a ring-shaped upper surface (5) that functions as a sliding surface, a ring-shaped metal plate (4) that is supported on the ring-shaped upper surface (5) to be freely rotatable relative to the bearing body (2) in the circumferential direction (R) around the shaft center (O), and a ring-shaped cover (3) disposed so as to cover the ring-shaped upper surface (5) and the ring-shaped metal plate (4).

Abstract: A synthetic resin-made thrust sliding bearing includes a synthetic resin-made upper casing, a synthetic resin-made lower casing, and a synthetic resin-made thrust sliding bearing piece interposed between the upper casing and the lower casing.

Abstract: Wafer support shelves (10, 10) are each provided with wafer support projections (A, B1, B2) on which parts of the outer margins of a semiconductor wafer (W) are to be placed. In each case, one of the support projections (A, B1, B2) is provided on the far side of the center position of the semiconductor wafer (W), and two of the support projections are provided on the near side of the center of the semiconductor wafer. By means of this structure, in a state in which a lid body (3) is not attached to a wafer extraction/insertion opening (2), the flexure amount of the semiconductor wafers placed on the support projections of multiple locations in the wafer support shelves can be reduced with a minimal number of projections, so that a hindrance is not created to an operation such as extraction by a robot arm.

Abstract: The position of a substrate temporal placement piece (4) is set so that the substrate temporal placement piece (4) does not overlap a disc-shaped substrate (W) from a viewing direction perpendicular to the surface of the disc-shaped substrate (W), when a lid (20) is attached to a substrate transfer opening (2) of a container main body (1) and the disc-shaped substrate (W) is pressed to a location where the substrate is positioned and held by a back side holding portion (3). Thereby, even if the disc-shaped substrate (W) stored in the container main body (1) is bent due to vibration, impact, etc., there is no danger that the substrate (W) is in contact with the substrate temporal placement piece (4), and the disc-shaped substrate (W) having a larger diameter can be safely stored.

Abstract: A thrust sliding bearing 1 includes a synthetic resin-made upper casing 100, a synthetic resin-made lower casing 200, and a synthetic resin-made thrust sliding bearing piece 300 interposed between the upper casing 100 and the lower casing 200, and the thrust sliding bearing piece 300 has an inner annular recessed groove 306 and an outer annular recessed groove 307 which are formed on an upper surface 304 along a circumferential direction and concentrically with each other on an inner side and an outer side in a radial direction X and a lubricating oil such as grease filled without any gap in each of the inner annular recessed groove 306 and the outer annular recessed groove 307.