Abstract: A scanning probe microscope is provided with a probe tip directed to a sample surface, an XYZ fine movement mechanism for providing a relative positional change between the sample and the probe tip, and a displacement detecting section for detecting the displacement of the probe tip. The scanning probe microscope measures the surface characteristic of the sample by using a control signal. This control signal is generated on a signal outputted from the displacement detecting section and is used for keeping a state of a mutual action generated between the sample and the probe tip identical to a predetermined state, while the probe tip scans the surface of the sample based on the operation of the XYZ fine movement mechanism.