Abstract: To provide a novel and effective cleaning method which can give a cleaned fluorine-containing rubber molded article for semiconductor production apparatuses. The method of cleaning the fluorine-containing rubber molded article for semiconductor production apparatuses, which comprises washing the fluorine-containing rubber molded article at least once with ultra pure water which has a metal content of not more than 1.0 ppm and does not contain fine particles of not less than 0.2 &mgr;m in an amount of more than 300 per 1 ml.

Abstract: To provide the filler which is added to a composition for a sealing member, etc. for sealing of semi-conductor production equipment being apt to be damaged greatly by mixing of a foreign matter and is small in a change in weight in either of the oxygen plasma irradiation and CF4 plasma irradiation, and the crosslinkable elastomer composition. The filler is used for the crosslinkable elastomer and has an imide structure, and a change in weight of the filler is not more than 4 mg/cm2·hr in either of the oxygen plasma irradiation and CF4 plasma irradiation. The crosslinkable elastomer composition comprises the filler and the crosslinkable elastomer such as a fluorine-containing elastomer.

Abstract: According to the present invention, it is possible to provide a molding material, for example, a sealing material for semiconductor-related production apparatuses which comprises a fluorine-containing multi-segment polymer being excellent in mechanical properties (particularly at high temperature), abrasion resistance and transparency and ensuring reduced contamination and reduced gas permeation while maintaining inherent characteristics of a fluorine-containing elastomer such as flexibility, elasticity, sealing property, chemical resistance and heat resistance. A molding material comprising a fluorine-containing multi-segment polymer having an elastomeric fluorine-containing polymer chain segment and a non-elastomeric fluorine-containing polymer chain segment, in which the elastomeric fluorine-containing polymer chain segment imparts flexibility to the whole polymer and has perhaloolefin units as a recurring unit in an amount of not less than 95% by mole.

Abstract: The metal oxide filler of titanium oxide or silicon oxide for the crosslinkable elastomer composition which has a pH value of from 5.0 to 11.0 and contains impurity metals other than the essential metal of the filler in an amount of not more than 10,000 ppm. The metal oxide filler can be obtained by extraction treatment of a starting metal oxide filler with an acid to reduce a content of impurity metals thereof and then treatment with an alkali to neutralize a remaining acid. The metal oxide filler of the present invention does not cause a crosslinking failure even when added to the elastomer composition and can provide the elastomer molded article suitable as a very clean sealing material for semi-conductor production apparatuses.

Abstract: A crosslinkable elastomer composition which provides a crosslinked product with improved mechanical strength and heat resistance, comprising,

Abstract: There is provided a fluorine-containing elastomer molded article which is obtained by irradiating the fluorine-containing elastomer molded article with a plasma and has a center line average roughness of not less than 0.65 &mgr;m or a fluorine-containing elastomer molded article which is obtained by applying a resin coating layer on a fluorine-containing elastomer substrate, has a small peeling strength and a small etching rate at the irradiation of plasma and is excellent in detachability and whiteness. There is provided particularly a molded article suitable as various sealing materials for semiconductor production apparatuses.

Abstract: There is provided an elastomer composition which is prepared by using a very clean filler reduced in both of an amount of moisture generation and an amount of organic outgas generation and is suitable as a molding material for semiconductor production apparatuses and there is provided a molded article. The composition is a crosslinkable composition comprising a high molecular weight polymer, particularly a crosslinkable fluorine-containing elastomer and a filler which has a weight reduction ratio per unit surface area of not more than 2.5×10−5% by weight/m2 when heating at 200° C. for two hours and a total amount of organic gas generated of not more than 2.5 ppm when heating at 200° C. for 15 minutes. The molded article is produced from the crosslinkable composition.

Abstract: A rubber laminate in which a rubber layer (1) containing the following rubber composition (A) is adhered by vulcanization to a rubber layer (2) containing another rubber composition (B). Rubber composition (A): Composition comprising 100 parts by weight of a mixture and 0.1 to 15 parts by weight of a peroxide crosslinking agent admixed therewith, the mixture comprising 5 to 95 wt. % of a peroxide-crosslinkable fluororubber containing vinylidene fluoride copolymerized therein in a proportion of 45 to 88 mole % and having a number average molecular weight of 20,000 to 200,000, and 95 to 5 wt. % of an acrylic rubber containing 0.1 to 1.5 wt. % of a polyfunctional monomer copolymerized therein and having a functional group rendering the acrylic rubber peroxide-cocrosslinkable with the fluororubber and a functional group effecting the copolymerization of the monomer with an acrylic ester.

Abstract: A rubber laminate in which a rubber layer (1) containing the following rubber composition (A) is adhered by vulcanization to a rubber layer (2) containing another rubber composition (B).

Abstract: Elastomer molded article for semiconductor production apparatuses which is obtained by crosslinking and molding a crosslinkable fluorine-containing elastomer composition comprising a crosslinkable fluorine-containing elastomer component and fine particles of aluminum oxide having an average particle size of not more than 0.5 &mgr;m. The elastomer molded article is excellent in plasma resistance and an amount of micro particles generated after irradiation of plasma is very small and therefore a very clean molded article for semiconductor production apparatuses, particularly a sealing material to be used in an environment of plasma irradiation is provided.

Abstract: To provide a dust-free rubber mixer which does not release contaminants such as dusts generated in the rubber mixer into a working room. In the dust-free rubber mixer comprising a rubber mixing section having a plurality of rubber mixing rolls and a driving section having a motor, the whole parts of the rubber mixer except the rubber mixing rolls are covered with a casing, air intakes are provided on the casing in a periphery of rotation shafts of the rubber mixing rolls, an exhaust duct is provided on the casing and air suction means for making the inside pressure of the casing reduced is provided on the exhaust duct.

Abstract: To provide an elastomer molded article for a semiconductor manufacturing equipment which not only has cleanliness required but also has an excellent plasma resistance and an excellent property of metal-elution inhibition. The elastomer molded article is obtained by crosslinking a crosslinkable elastomer composition comprising a crosslinkable elastomer component and a carbon black filler having an average particle size of not more than 700 &mgr;m and an impurity metal content measured by an ashing analysis method of not more than 300 ppm and has an impurity metal content measured by an ashing analysis method of not more than 100 ppm. An increasing rate of particles generated by irradiating oxygen plasma to the article is not more than 500% or an amount of impurity metals extracted from the article with a 50% aqueous solution of HF is not more than 500 ppb.

Abstract: To provide a fluorine-containing rubber composition comprising (a-1) a non-perfluoro fluorine-containing rubber and (b-1) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment, in which structural units of each of the elastomeric fluorine-containing polymer chain segment and the non-elastomeric fluorine-containing polymer chain segment comprise not less than 90% by mole of a perhalo olefin unit. The fluorine-containing rubber composition is capable of providing a clean sealing material for semi-conductor production apparatuses without using a filler.

Abstract: Novel indoloylguanidine derivatives shown by formula (1), wherein R1 represents one or more, the same or different substituent(s) which is selected from the group consisting of a hydrogen atom, an alkyl group, a substituted alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, a halogen atom, nitro group, an acyl group, carboxyl group, an alkoxycarbonyl group, an aromatic group, and a group shown by formula: —OR3, —NR6R7, —SO2NR6R7 or —S(O)nR40; and R2 represents a hydrogen atom, an alkyl group, a substituted alkyl group, a cycloalkyl group, hydroxy group, an alkoxy group or a group shown by formula: —CH2R20; and which inhibit the Na+/H+ exchanger activity and are useful for the treatment and prevention of a disease caused by increased Na+/H+ exchanger activity, such as hypertension, arrhythmia, angina pectoris, cardiac hypertrophy, diabetes, disorders associated with ischemia or ischemic reperfusion, cerebro-ischemic disorders; or diseases caus

Abstract: Novel indoloylguanidine derivatives shown by formula (1), wherein R1 represents one or more, the same or different substituent(s) which is selected from the group consisting of a hydrogen atom, an alkyl group, a substituted alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, a halogen atom, nitro group, an acyl group, carboxyl group, an alkoxycarbonyl group, an aromatic group, and a group shown by formula: —OR3, —NR6R7, —SO2NR6R7 or —S(O)nR40; and R2 represents a hydrogen atom, an alkyl group, a substituted alkyl group, a cycloalkyl group, hydroxy group, an alkoxy group or a group shown by formula: —CH2R20; and which inhibit the Na+/H+ exchanger activity and are useful for the treatment and prevention of a disease caused by increased Na+/H+ exchanger activity, such as hypertension, arrhythmia, angina pectoris, cardiac hypertrophy, diabetes, disorders associated with ischemia or ischemic reperfusion, cerebro-ischemic disorders; or diseases caus

Abstract: A rubber composition of low compression set comprising 100 parts by weight of a mixture and 0.1 to 15 parts by weight of a peroxide crosslinking agent admixed therewith, the mixture comprising 5 to 55 wt. % of a peroxide-crosslinkable fluororubber containing vinylidene fluoride copolymerized therein in a proportion of 45 to 88 mole % and having a number average molecular weight of 20,000 to 200,000, and 95 to 45 wt. % of an acrylic rubber containing 0.1 to 1.5 wt. % of a polyfunctional monomer copolymerized therein and having a functional group rendering the acrylic rubber peroxide-cocrosslinkable with the fluororuber and a functional group effecting the copolymerization of the monomer with an acrylic ester, and molded product prepared from the composition.

Abstract: The present invention provides a crosslinkable composition which comprises an internally crosslinked acrylic elastomer which is crosslinkable with a peroxide, a fluoroelastomer and a crosslinking agent for at least one of the elastomers.A crosslinkable composition of the present invention can afford a molding which are excellent in physical properties such as mechanical strength and compression set, heat resistance and workability.

Abstract: a fluorine-containing block copolymer comprising at least one soft segment which comprises chlorotrifluoroethylene and vinylidene fluoride and at least one hard segment which comprises a fluorine-containing crystalline polymer, which copolymer has good flexibility and transparency and useful as a material for an artificial lens.

Abstract: A meltable fluorine-containing resin composition comprising(A) a copolymer which has a molecular weight distribution peak in a lower molecular weight region and is selected from the group consisting of a tetrafluoroethylene/hexafluoropropylene copolymer and a copolymer of tetrafluorethylene and at least one fluorovinyl ether of the formula:CF.sub.2 .dbd.CF--O--R.sub.fwherein R.sub.f is a fluoroalkyl group having 1 to 10 carbon atoms, and(B) a copolymer which has a molecular weight distribution peak in a higher molecular weight region and is selected from the group consisting of a tetrafluoroethylene/hexafluoropropylene copolymer and a copolymer of tetrafluoroethylene and at least one fluorovinyl ehter of the formula:CF.sub.2 .dbd.CF--O--R.sub.fwherein R.sub.f is the same as defined above, which has good mechanical properties and molding properties.

Abstract: A vibration-proof damping polymer material characterized in that the material is prepared from a polymer substance obtained by dissolving an amorphous fluorine-containing polymer in an acrylic monomer and polymerizing the monomer with or without permitting the resulting polymer to form an interpenetrating polymer network, and a vibration-proof damping polymer material characterized in that the material is prepared from a blend of (a) and (b), (a) being an amorphous fluorine-containing polymer or crystalline polymer containing vinylidene fluoride, and (b) being an acrylic polymer.