Abstract: A semiconductor memory device comprising memory cells arranged in a matrix with plural pairs of bit lines to be column addressed and connected to sense amplifiers, and word lines to be row addressed and divided into divisional word lines. Output signals of sense amplifiers selected by the column addressing are transferred to respective data lines. The divisional word lines are time-sequentially activated corresponding to the row addressing with the activated states of any two sequential divisional word lines overlapped for a fractional time of the full activation time. The sense amplifiers are grouped into plural groups with respective common column addresses. Each group of sense amplifiers have their outputs to be applied to respective data lines connected to a serial/parallel converter.

Abstract: A semiconductor device inspecting apparatus includes a signal input for an LSI device, a comparator used to compare an LSI device output with an expected value, an X-Y stage for moving the LSI device in an X direction or a Y direction, a probe for non-contact probing of the electrical state inside the LSI device, and a device for determining the probing position and for judging and executing the result, by which the defect location of the LSI device is automatically located.

Abstract: In laser probing of LSI, PICs' (photo-induced currents) are measured at the power source terminal of the LSI, under scanning of laser beam for a good LSI and a fault LSI, the measured PICs' are then superposingly displayed as red and green images, respectively; then faults of LSI are displayed as red spots in a yellow image made by superposition of green and red images.

Abstract: A large capacity memory is improved so as to reduce its testing time length. Memory arrays are divided into a plural number of memory blocks having common address signal lines and common input/output lines, each memory block is provided with respective comparators thereby enabling testings of the plural number of memory blocks parallelly at the same time.