Abstract: A discharge lamp lighting apparatus includes an inverter circuit supplying an AC voltage to a discharge lamp and a resonant circuit that increases a supply voltage supplied to the discharge lamp. The inverter circuit is driven using a first frequency including a resonant frequency of the resonant circuit during a first period in which breakdown and a glow discharge are generated, driven using a second frequency including a resonant frequency of the resonant circuit, lower than the first frequency, during a second period in which an arc discharge is generated, and driven using a third frequency lower than the second frequency, during a third period. Further, a dead time is set in which both of a high-side switching device and a low-side switching device are turned off so that the dead time is longer in the second period than in the first period and the third period.

Abstract: A discharge lamp lighting apparatus includes an inverter circuit supplying an AC voltage to a discharge lamp and a resonant circuit that increases a supply voltage supplied to the discharge lamp. The inverter circuit is driven using a first frequency including a resonant frequency of the resonant circuit during a first period in which breakdown and a glow discharge are generated, driven using a second frequency including a resonant frequency of the resonant circuit, lower than the first frequency, during a second period in which an arc discharge is generated, and driven using a third frequency lower than the second frequency, during a third period. Further, a dead time is set in which both of a high-side switching device and a low-side switching device are turned off so that the dead time is longer in the second period than in the first period and the third period.

Abstract: In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.

Abstract: In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.

Abstract: In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.

Abstract: The number of layers of a secondary winding of a flyback transformer for use in a PWM controlled high-tension voltage generator is increased to six or higher. The distributed capacitance of the flyback transformer is thus decreased, the frequency of ringing is increased, and the pulse width of a flyback pulse is narrowed. The timing of the on-operation of a control FET is expedited, and the input current to the flyback transformer is lowered. A compact and power-saving flyback transformer thus results.

Abstract: In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.

Abstract: A high-frequency power supply apparatus for a plasma generation apparatus having a modulator for generating an intermittent high-frequency output on the basis of a modulation reference signal and a peak value setting signal, the high-frequency power supply apparatus having: a first control loop for comparing the peak value of the intermittent high-frequency output detected by a peak value detector with a preset peak value of the high-frequency output so that the output controller controls the peak value of the high-frequency output to be the preset peak value; and a second control loop for calculating an average value of the intermittent high-frequency output based on the preset peak setting value and a preset duty ratio setting value and generating a modulation reference signal for controlling the modulator on the basis of the average value of the high-frequency output detected by a monitor and the average value of the high-frequency output.

Abstract: A high voltage generation circuit including a transformer, the transformer having a primary winding having a primary inductance; a power supply for supplying a voltage to the primary winding of the transformer; a switching element for controlling current flowing through the primary winding of the transformer from the power supply; and a resonance capacitor which resonates with the primary winding of the transformer when the switching element is off, so that a flyback pulse is generated. The circuit has a distributed inductance and a resonance capacitance. The switching element is controlled so as to be switched on nearly at the bottom of a quiescent ringing pulse which is produced by a resonance of the primary inductance of the transformer with a capacitance included in a circuit connected to the primary winding of the transformer, after the flyback pulse is generated.

Abstract: The number of layers of a secondary winding of a flyback transformer for use in a PWM controlled high-tension voltage generator is increased to six or higher. The distributed capacitance of the flyback transformer is thus decreased, the frequency of ringing is increased, and the pulse width of a flyback pulse is narrowed. The timing of the on-operation of a control FET is expedited, and the input current to the flyback transformer is lowered. A compact and power-saving flyback transformer thus results.

Abstract: A high voltage generation circuit comprising a transformer, the transformer having a primary winding having a primary inductance; a power supply for supplying a voltage to the primary winding of the transformer; a switching element for controlling current flowing through the primary winding of the transformer from the power supply; and a resonance capacitor which resonates with the primary winding of the transformer when the switching element is off, so that a flyback pulse is generated. The circuit has a distributed inductance and a resonance capacitance. The switching element is controlled so as to be switched on nearly at the bottom of a quiescent ringing pulse which is produced by a resonance of the primary inductance of the transformer with a capacitance included in a circuit connected to the primary winding of the transformer, after the flyback pulse is generated.

Abstract: The present invention relates to a microwave plasma processing apparatus, suited for generating a plasma by using microwaves, and a processing method. Microwaves propagated through a circular waveguide are tuned in the space thereof by a microwave tuner that is installed to match the impedance, and are introduced in a uniform and most efficient state into a discharge block having a plasma-resistant inner surface that is enlarged in a tapered form through a microwave introduction window. Then, a processing gas controlled to a predetermined pressure by a gas supplying structure and gas evacuating structure is turned into a plasma which is more uniform and is more dense by interaction of a microwave electric field that is efficiently introduced and a magnetic field produced by a solenoid coil.