Patents by Inventor Tsz-Sin Siu

Tsz-Sin Siu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Textured membrane for a multi-chamber carrier head
    Patent number: 10702971
    Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
    Type: Grant
    Filed: September 13, 2016
    Date of Patent: July 7, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas B. Brezoczky
  • TEXTURED MEMBRANE FOR A MULTI-CHAMBER CARRIER HEAD
    Publication number: 20170001282
    Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
    Type: Application
    Filed: September 13, 2016
    Publication date: January 5, 2017
    Applicant: Applied Materials, Inc.
    Inventors: Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas B. Brezoczky
  • Textured membrane for a multi-chamber carrier head
    Patent number: 9452505
    Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
    Type: Grant
    Filed: August 18, 2014
    Date of Patent: September 27, 2016
    Assignee: Applied Materials, Inc.
    Inventors: Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas B. Brezoczky
  • TEXTURED MEMBRANE FOR A MULTI-CHAMBER CARRIER HEAD
    Publication number: 20150038065
    Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
    Type: Application
    Filed: August 18, 2014
    Publication date: February 5, 2015
    Inventors: Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas B. Brezoczky
  • Multi-chamber carrier head with a textured membrane
    Patent number: 8808062
    Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
    Type: Grant
    Filed: June 3, 2013
    Date of Patent: August 19, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas B. Brezoczky
  • MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE
    Publication number: 20130334752
    Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
    Type: Application
    Filed: June 3, 2013
    Publication date: December 19, 2013
    Inventors: Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas B. Brezoczky
  • Multi-chamber carrier head with a textured membrane
    Patent number: 8454413
    Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: June 4, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas B. Brezoczky
  • Multiple zone carrier head with flexible membrane
    Patent number: 8088299
    Abstract: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
    Type: Grant
    Filed: November 29, 2010
    Date of Patent: January 3, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Hung Chih Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky, Steven M. Zuniga
  • MULTIPLE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE
    Publication number: 20110070810
    Abstract: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
    Type: Application
    Filed: November 29, 2010
    Publication date: March 24, 2011
    Inventors: Hung Chih Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky, Steven M. Zuniga
  • Multiple zone carrier head with flexible membrane
    Patent number: 7842158
    Abstract: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
    Type: Grant
    Filed: August 10, 2007
    Date of Patent: November 30, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Hung Chih Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas B. Brezoczky, Steven M. Zuniga
  • MULTIPE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE
    Publication number: 20070272356
    Abstract: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
    Type: Application
    Filed: August 10, 2007
    Publication date: November 29, 2007
    Applicant: Applied Materials, Inc.
    Inventors: Hung Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky, Steven Zuniga
  • MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE
    Publication number: 20070202785
    Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
    Type: Application
    Filed: December 21, 2006
    Publication date: August 30, 2007
    Inventors: Jeonghoon Oh, Tsz-Sin Siu, Hung Chen, Andrew Nagengast, Steven Zuniga, Thomas Brezoczky
  • Multiple zone carrier head with flexible membrane
    Patent number: 7255771
    Abstract: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
    Type: Grant
    Filed: March 26, 2004
    Date of Patent: August 14, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Hung Chih Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky, Steven M. Zuniga
  • Substrate removal from polishing tool
    Patent number: 7081042
    Abstract: Techniques for removing a substrate from a polishing pad are described. A substrate is pulled away from the polishing pad such that the edges of the substrate are pulled away from the polishing pad before the center of the substrate is pulled from the polishing pad.
    Type: Grant
    Filed: December 2, 2004
    Date of Patent: July 25, 2006
    Assignee: Applied Materials
    Inventors: Hung Chih Chen, Steven M. Zuniga, Tsz-Sin Siu
  • Substrate removal from polishing tool
    Publication number: 20060019582
    Abstract: Techniques for removing a substrate from a polishing pad are described. A substrate is pulled away from the polishing pad such that the edges of the substrate are pulled away from the polishing pad before the center of the substrate is pulled from the polishing pad.
    Type: Application
    Filed: December 2, 2004
    Publication date: January 26, 2006
    Inventors: Hung Chen, Steven Zuniga, Tsz-Sin Siu
  • Multiple zone carrier head with flexible membrane
    Publication number: 20050211377
    Abstract: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
    Type: Application
    Filed: March 26, 2004
    Publication date: September 29, 2005
    Inventors: Hung Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky, Steven Zuniga