Patents by Inventor Tsz-Yuan Chen

Tsz-Yuan Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR PROCESS
    Publication number: 20130045603
    Abstract: A semiconductor process is described as follows. A material layer is provided on a substrate. A low-temperature oxidation treatment is performed to the material layer. A photoresist layer is formed on the material layer after the low-temperature oxidation treatment. The photoresist layer is patterned.
    Type: Application
    Filed: August 19, 2011
    Publication date: February 21, 2013
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chao-Yu Tsai, Chih-Chung Huang, Tsz-Yuan Chen, Kung-Hsun Tsao, Huan-Hsin Yeh, Yu-Huan Liu