Abstract: A transmission system includes two or more independent chambers, in each of which shafts with gears thereon are provided for rolling in synchronous motion, and a carrier with adjustable gear devices on a bottom thereof. Each of the adjustable gear devices has a base, a movable rack member, vertical springs and horizontal springs. The movable rack member is connected to the base to be moved along a horizontal direction. The vertical springs are provided between the base and the carrier to urge the adjustable gear device along a vertical direction. The movable rack member has a rack portion to be meshed with the gears of the shafts, such that the carrier is moved by the gears to cross the chambers. With the movement of the movable rack member both along the horizontal and the vertical direction, the carrier is transported in a smooth, synchronous, skid-proof, stable and real-time motion during the crossing chamber process.

Abstract: A transmission system includes two or more independent chambers, in each of which shafts with gears thereon are provided for rolling in synchronous motion, and a carrier with adjustable gear devices on a bottom thereof. Each of the adjustable gear devices has a base, a movable rack member, vertical springs and horizontal springs. The movable rack member is connected to the base to be moved along a horizontal direction. The vertical springs are provided between the base and the carrier to urge the adjustable gear device along a vertical direction. The movable rack member has a rack portion to be meshed with the gears of the shafts, such that the carrier is moved by the gears to cross the chambers. With the movement of the movable rack member both along the horizontal and the vertical direction, the carrier is transported in a smooth, synchronous, skid-proof, stable and real-time motion during the crossing chamber process.

Abstract: An in-line coating/sputtering system includes a clean region with an internal static electricity/dust removal apparatus and an elevator device therein. A loading region has a pressure-down chamber with two gates on opposite ends thereof, one of which is communicated with the clean region. A coating/sputtering region has a vacuum chamber with two gates on opposite ends thereof, one of which is communicated with the pressure-down chamber of the loading region. An unloading region has a pressure-up chamber with two gates on opposite ends thereof, one of which is communicated with the vacuum chamber of the coating/sputtering region. A rear reversible region has an open chamber communicated with the pressure-up chamber of the unloading region, in which an elevator device is provided. A return region having a channel connecting the rear reversible region and the clean region, in which a backward transmission device is provided.