Patents by Inventor Tun Lo

Tun Lo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for detecting wafer flaw
    Publication number: 20050028594
    Abstract: The present invention provides an apparatus for detecting flaws in a wafer. The apparatus has a detection platform for holding a wafer positioned thereon, a cross-bar ultrasonic detection device positioned above the detection platform for emitting and receiving an ultrasonic wave reflected by a wafer; and a microprocessor for processing the reflected ultrasonic and transmits to a monitor.
    Type: Application
    Filed: August 4, 2003
    Publication date: February 10, 2005
    Inventors: Chih-Kun Chen, Yao-Hsiung Kung, Tun Lo