Patents by Inventor Tun Yuan Lo

Tun Yuan Lo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for detecting wafer flaw
    Patent number: 6941811
    Abstract: The present invention provides an apparatus for detecting flaws in a wafer. The apparatus has a detection platform for holding a wafer positioned thereon, a cross-bar ultrasonic detection device positioned above the detection platform for emitting and receiving an ultrasonic wave reflected by a wafer; and a microprocessor for processing the reflected ultrasonic and transmits to a monitor.
    Type: Grant
    Filed: August 4, 2003
    Date of Patent: September 13, 2005
    Assignee: Nan Ya Technology Corporation
    Inventors: Chih-Kun Chen, Yao-Hsiung Kung, Tun Yuan Lo
  • Slurry homogenizer and supply system
    Patent number: 6719617
    Abstract: A slurry homogenizer. A frame having an outlet is disposed on a driving means having a rotating shaft. A waterproof plate having a first opening is disposed in the frame and on the driving means. Part of the shaft penetrates the first opening. A filter is disposed in the frame and on the plate. A first grinding pad has a second opening and is fitted on the shaft through the second opening. The first grinding pad is disposed in the frame and above the plate. A knob is fitted on the top of the shaft. The knob fixes the first grinding pad on the shaft. A cover having a pipe is disposed on the frame. A second grinding pad having a third opening is fitted on the pipe and disposed in the frame. The second grinding pad and the first grinding pad are separated by a fixed distance.
    Type: Grant
    Filed: January 22, 2003
    Date of Patent: April 13, 2004
    Assignee: Nanya Technology Corporation
    Inventors: Tun-Yuan Lo, Chih-Pin Hsu, Chih-Kun Chen
  • Slurry homogenizer and supply system
    Publication number: 20030207656
    Abstract: A slurry homogenizer. A frame having an outlet is disposed on a driving means having a rotating shaft. A waterproof plate having a first opening is disposed in the frame and on the driving means. Part of the shaft penetrates the first opening. A filter is disposed in the frame and on the plate. A first grinding pad has a second opening and is fitted on the shaft through the second opening. The first grinding pad is disposed in the frame and above the plate. A knob is fitted on the top of the shaft. The knob fixes the first grinding pad on the shaft. A cover having a pipe is disposed on the frame. A second grinding pad having a third opening is fitted on the pipe and disposed in the frame. The second grinding pad and the first grinding pad are separated by a fixed distance.
    Type: Application
    Filed: January 22, 2003
    Publication date: November 6, 2003
    Applicant: Nanya Technology Corporation
    Inventors: Tun-Yuan Lo, Chih-Pin Hsu, Chih-Kun Chen