Abstract: An optical waveguide circuit device strong in impact strength in dropping, etc. is provided. A waveguide pattern is formed on a silicon substrate in this optical waveguide circuit device. For example, this waveguide pattern has an optical input waveguide, a first slab waveguide, an arrayed waveguide including a plurality of channel waveguides having lengths different from each other and arranged side by side, a second slab waveguide, and a plurality of optical output waveguides arranged side by side. The first slab waveguide is separated on a cross separating face crossing an optical path passing the first slab waveguide. A temperature dependence in light transmission central wavelength of an arrayed waveguide grating is reduced by sliding and moving a separating slab waveguide side by a slide moving member along the separating face depending on temperature.

Abstract: An arrayed waveguide grating type optical multiplexer/demultiplexer of the invention eliminates the temperature dependency of the light transmission center wavelengths and suppresses an increase in insertion loss with a simple configuration even under the conditions of high temperature and high humidity. A waveguide forming area comprising an optical input waveguide, a first slab waveguide, an arrayed waveguide formed of a plurality of channel waveguides arranged side by side having a different length each other, and a plurality of optical output waveguides connected one by one is formed on a substrate. For example, the first slab waveguide is separated at crossed separation planes that cross the path of light passing through the first slab waveguide. On the crossed separation planes, a matching grease is applied. A thin film member for covering the area arranged with the matching grease is disposed to suppress the evaporation of the matching grease.

Abstract: An optical waveguide circuit module of the invention is a highly reliable optical waveguide circuit module where cracks are not generated in an optical waveguide circuit chip housed even under a high temperature and high humidity environment. An optical waveguide circuit chip (25) comprises a waveguide forming region (10) formed on a substrate (1). The waveguide forming region (10) has a waveguide configuration sequentially connecting optical input waveguides (2), a first slab waveguide (3), an arrayed waveguide (4) made of a plurality of channel waveguides (4a) arranged side by side, the channel waveguides having a different length each other, a second slab waveguide (5), and a plurality of optical output waveguides (6) arranged side by side.

Abstract: An optical waveguide circuit module of the invention is a highly reliable optical waveguide circuit module where cracks are not generated in an optical waveguide circuit chip housed even under a high temperature and high humidity environment. An optical waveguide circuit chip (25) comprises a waveguide forming region (10) formed on a substrate (1). The waveguide forming region (10) has a waveguide configuration sequentially connecting optical input waveguides (2), a first slab waveguide (3), an arrayed waveguide (4) made of a plurality of channel waveguides (4a) arranged side by side, the channel waveguides having a different length each other, a second slab waveguide (5), and a plurality of optical output waveguides (6) arranged side by side. Amounts of B2O3 and P2O5 to be doped in an over cladding of the waveguide forming region (10) are set greater to define a value of birefringence generated in the waveguide forming region (10).

Abstract: An optical waveguide circuit device strong in impact strength in dropping, etc. is provided. A waveguide pattern is formed on a silicon substrate in this optical waveguide circuit device. For example, this waveguide pattern has an optical input waveguide, a first slab waveguide, an arrayed waveguide including a plurality of channel waveguides having lengths different from each other and arranged side by side, a second slab waveguide, and a plurality of optical output waveguides arranged side by side. The first slab waveguide is separated on a cross separating face crossing an optical path passing the first slab waveguide. A temperature dependence in light transmission central wavelength of an arrayed waveguide grating is reduced by sliding and moving a separating slab waveguide side by a slide moving member along the separating face depending on temperature.

Abstract: An arrayed waveguide grating type optical multiplexer/demultiplexer of the invention eliminates the temperature dependency of the light transmission center wavelengths and suppresses an increase in insertion loss with a simple configuration even under the conditions of high temperature and high humidity. A waveguide forming area comprising an optical input waveguide, a first slab waveguide, an arrayed waveguide formed of a plurality of channel waveguides arranged side by side having a different length each other, and a plurality of optical output waveguides connected one by one is formed on a substrate. For example, the first slab waveguide is separated at crossed separation planes that cross the path of light passing through the first slab waveguide. On the crossed separation planes, a matching grease is applied. A thin film member for covering the area arranged with the matching grease is disposed to suppress the evaporation of the matching grease.