Patents by Inventor Tung Bach

Tung Bach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitoring an effluent from a chamber
    Patent number: 6592817
    Abstract: An effluent monitoring apparatus 10 comprising an energizing cell 22 adapted to receive an effluent, a gas energizer 17 that is capable of energizing the effluent in the cell 22 thereby emitting a radiation, a radiation permeable window 27 that is spaced apart from the wall 36 of the 22 cell by a distance d that is sufficiently high to reduce a deposition of effluent residue from the energized gas on the window 27, and a detector 26 to detect the radiation.
    Type: Grant
    Filed: March 31, 2000
    Date of Patent: July 15, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Kenneth Tsai, Tung Bach, Quyen Pham