Abstract: A personal guided transport vehicle is disclosed to include a horizontal motion unit, a vertical motion unit, and a gear set coupled between a shaft of the horizontal motion unit and a shaft of the vertical motion unit for enabling the shafts to be interlocked. When operating a horizontal operating lever of the horizontal motion unit, a lock pin is forced into engagement with a mounting hole of the shaft of the vertical motion unit. The horizontal motion unit and the vertical motion unit each have a spring plunger for self-lock. A docking mechanism is disclosed to enable the vehicle to be easily positioned in a docking flange. The docking mechanism includes a locating plate and a coupling plate, the locating plate having a locating notch for quick alignment, the coupling plate having hooks for hooking on the docking flange to hold the vehicle in position.

Abstract: A personal guided transport vehicle is disclosed to include a horizontal motion unit, a vertical motion unit, and a gear set coupled between a shaft of the horizontal motion unit and a shaft of the vertical motion unit for enabling the shafts to be interlocked. When operating a horizontal operating lever of the horizontal motion unit, a lock pin is forced into engagement with a mounting hole of the shaft of the vertical motion unit. The horizontal motion unit and the vertical motion unit each have a spring plunger for self-lock. A docking mechanism is disclosed to enable the vehicle to be easily positioned in a docking flange. The docking mechanism includes a locating plate and a coupling plate, the locating plate having a locating notch for quick alignment, the coupling plate having hooks for hooking on the docking flange to hold the vehicle in position.

Abstract: A standard mechanical interface wafer pod gas filling system, comprising: a platform, carrying a wafer pod cover of a wafer pod; a pod hold-down latch mechanism; a port, carrying a wafer pod base, with lateral gaps between the platform and the port; a pod door lock/unlock mechanism, mounted on the lower side of the platform; a port door up/down mechanism; several nozzles, mounted on one lateral side of the platform, having widening ends, wherein the lateral gap located opposite to the nozzles is wider than the other lateral gaps; a charging box, mounted on the lower side of the platform; and a gas supply unit for supplying inert gas through the nozzles and taking out air from the wafer pod.