Patents by Inventor Tung-Yuan Yu

Tung-Yuan Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR DEVICE AND DAMASCENE STRUCTURE
    Publication number: 20110147936
    Abstract: The present invention provides a semiconductor device, including a silicon-containing material, a conductive layer deposited on the silicon-containing material, and a diffusion barrier layer interposed between the silicon-containing material and the conductive layer, wherein the diffusion barrier layer contains a rare earth scandate. The present invention further provides a damascene structure containing the rare earth scandate as diffusion barrier.
    Type: Application
    Filed: May 9, 2010
    Publication date: June 23, 2011
    Applicant: National Taiwan Unversity of Science & Technology
    Inventors: Jinn P. Chu, Tung-Yuan Yu, Chon-Hsin Lin