Patents by Inventor TUNNG LUOH

TUNNG LUOH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS OF MONITORING PLASMA PROCESS TOOL
    Publication number: 20080088827
    Abstract: A method of monitoring a plasma process tool is provided, which includes obtaining a spectrum of a film to be detected from the plasma process tool, and then analyzing the spectrum by integrating a function of the spectrum intensity which focuses on specific or desired wavelength range, thereby determining whether the spectrum is abnormal from a obtained value. Since the film to be detected is detected after depositing the film in the plasma process tool, and therefore the film with a desired quality may be obtained.
    Type: Application
    Filed: October 17, 2006
    Publication date: April 17, 2008
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: SHING-ANN LUO, TUNNG LUOH, CHIN-TA SU, KUNG-CHAO CHEN