Abstract: A method for calibrating electromagnetic radiation-based three-dimensional imaging includes: obtaining (501) a calibration imaging result at least partly on the basis of electromagnetic waves received from a calibration artifact, forming (502) calibration data on the basis of the calibration imaging result and a known thickness profile of the calibration artifact, and correcting (503), with the aid of the calibration data, an imaging result obtained at least partly on the basis of electromagnetic waves received from a sample to be imaged. The calibration artifact includes layers, for example Langmuir-Blodgett films, having pre-determined thicknesses and stacked on each other so as to achieve the pre-determined thickness profile of the calibration artifact. A three-dimensional imaging system configured to carry out the method.

Abstract: An assessment method is disclosed to determine at least one of macro-topology, milli-topology, micro-topology and nano-topology of at least one interface of at least two media using topology of the interface. Topology information of the interface is processed by performing segmentation of volume information of the obtained information from background information of the obtained information. Reference surface information is generated and information on voids is obtained and analyzed to provide multivalued surface shape information. Quantitative mapping of the information on voids is performed using the multivalued surface shape information for determining at least one of macro-topology, milli-topology, micro-topology and nano-topology of the interface.

Abstract: A method for calibrating electromagnetic radiation-based three-dimensional imaging includes: obtaining (501) a calibration imaging result at least partly on the basis of electromagnetic waves received from a calibration artifact, forming (502) calibration data on the basis of the calibration imaging result and a known thickness profile of the calibration artifact, and correcting (503), with the aid of the calibration data, an imaging result obtained at least partly on the basis of electromagnetic waves received from a sample to be imaged. The calibration artifact includes layers, for example Langmuir-Blodgett films, having pre-determined thicknesses and stacked on each other so as to achieve the pre-determined thickness profile of the calibration artifact. A three-dimensional imaging system configured to carry out the method.