Abstract: The method includes a laser scribing step of forming an opening including an exposing portion, where the first layer is exposed, by irradiating the dividing region of the substrate with laser light from the first main surface side, forming a remaining region on which the second layer in the dividing region remains around the opening other than the exposing portion, and forming a first damaged region of a surface layer portion of the first layer including the exposing portion and a second damaged region of a surface layer portion of the first layer to be covered by the remaining region on the first layer of the dividing region.

Abstract: A method of manufacturing an element chip includes an isotropic etching step of removing the first damaged region and the second damaged region through etching the first layer isotropically by exposing the substrate to first plasma after the laser scribing step. The method of manufacturing an element chip further includes a plasma, dicing step of dividing the substrate to a plurality of element chips including the element region through etching the first layer anisotropically by exposing the substrate to second plasma in a state where the second main surface is supported by a supporting member, after the isotropic etching step.

Abstract: The method includes a laser scribing step of forming an opening including an exposing portion, where the first layer is exposed, by irradiating the dividing region of the substrate with laser light from the first main surface side, forming a remaining region on which the second layer in the dividing region remains around the opening other than the exposing portion, and forming a first damaged region of a surface layer portion of the first layer including the exposing portion and a second damaged region of a surface layer portion of the first layer to be covered by the remaining region on the first layer of the dividing region.

Abstract: A fusion welding method includes the steps of: generating a hybrid laser beam obtained by mixing a low-intensity laser beam with a first high-intensity laser beam and a second high-intensity laser beam; moving the hybrid laser beam along a gap between a first member and a second member; and melting the first member and the second member in the periphery of the gap with the hybrid laser beam, and filling the gap with the melt of the first member and the melt of the second member to weld the first member and the second member, wherein the first high-intensity laser beam is applied to the area of the first member to which the low-intensity laser beam is applied, and the second high-intensity laser beam is applied to the area of the second member to which the low-intensity laser beam is applied.

Abstract: A fusion welding method includes the steps of: generating a hybrid laser beam obtained by mixing a low-intensity laser beam with a first high-intensity laser beam and a second high-intensity laser beam; moving the hybrid laser beam along a gap between a first member and a second member; and melting the first member and the second member in the periphery of the gap with the hybrid laser beam, and filling the gap with the melt of the first member and the melt of the second member to weld the first member and the second member, wherein the first high-intensity laser beam is applied to the area of the first member to which the low-intensity laser beam is applied, and the second high-intensity laser beam is applied to the area of the second member to which the low-intensity laser beam is applied.

Abstract: An optical bus transmission system wherein, even in the presence of an obstacle, a stable transmission is ensured if a plurality of transceivers are provided in the home station, or, if the subsidiary stations are equipped with a relay function and the transmission time is controlled to generate a vacant transmission time among the subsidiary stations, a more stable transmission is achieved, and, if the level of the light of the subsidiary stations is arranged to be controlled by the command information from the home station, the transmission becomes stable even when a obstacle is present.

Abstract: A fault examining apparatus is provided in a loop network system, in which a master station is connected sequentially with a plurality of follower stations in a loop transmission path to transfer digital optical signals denoting serial data information from the master station to the follower stations, from the follower stations to the follower stations or from the follower stations to the master station. The apparatus includes a device for detecting and storing a present value, a maximum value and a minimum value of a peak level value of received optical signals, and a display device for displaying the values.

Abstract: When an input data of a slave station makes any change, the slave station transmit a serial information (in serial data frame, FIG. 2) which is made by altering an information continuously transmitted from a master station into a serial information to be transmitted by interrupt, which serial information includes a start information (in start bit), interrupt information (in interrupt field), address information (in address field) of this slave station and data information (in data field) produced in this sub-station responding the change, and it is transmitted by the interrupt; therefore the master station can find the interrupt-transmitted serial information among many serial informations sent back thereto, and the slave station can immediately transmit the change to the master station without wasting time by waiting for one turn scanning of all the slave stations.

Abstract: In a data transfer apparatus, as one substation in a loop type signal transfer system, e.g. for use in an automatic machine, synchronization information and address information are received and the address is checked by an address coincidence circuit; when address coincidence is detected the data information in the received signal is replaced by serialized data which is contrived by parallel-serial conversion of the parallel input data at the substation; therefore there is no need of once storing the entire received signal transferred, and therefore, high speed data transfer results.