Patents by Inventor Tutomu Takeuchi

Tutomu Takeuchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Treating liquid replacing method, substrate treating method and substrate treating apparatus
    Patent number: 5826601
    Abstract: A treating liquid first in a treating bath is replaced with a second treating liquid by supplying the second treating liquid to an upper position of the treating bath while discharging the first treating liquid from a lower position of the treating bath. The replacement is effected with a balance maintained between a quantity of the first treating liquid discharged and a quantity of the second treating liquid supplied. With this method, the first treating liquid in the treating bath is replaceable with a reduced quantity of the second treating liquid. This treating liquid replacing method allows a substrate to be treated efficiently with a plurality of treating liquids in one treating bath.
    Type: Grant
    Filed: March 26, 1996
    Date of Patent: October 27, 1998
    Assignee: Dainippon Screen Mfg., Co.
    Inventors: Yusuke Muraoka, Tutomu Takeuchi