Abstract: Pressure sensor methods and systems are disclosed. In general, two micromachined die and a diaphragm for a pressure sensor can be provided. The two micromachined die can be embedded in a glass adhesive on a surface of the diaphragm, such that the glass adhesive possesses a large size relative to the two micromachined die. The large size of the glass adhesive creates a large planar target for placement of the two micromachined die upon the diaphragm, thereby providing a size difference between the glass adhesive and the two micromachined die thereby creates an optimum strain transfer, while maintaining stability for the pressure sensor.

Abstract: Sensor systems and methods are disclosed, which generally incorporate isolation between the sensor's electronics and the sensed media. The sensor's electronic circuit can incorporate one or more application specific integrated circuit (ASIC) that processes and outputs the signal for both absolute and differential measurements. Such a sensor can be adapted for use in exhaust gas re-circulation (EGR) systems utilized with automotive gasoline engines. Such a sensor can also be utilized for measuring differential pressure across diesel particular filters and/or applications in which differential pressure is required for system control and/or monitoring purposes. The absolute pressure sensor disclosed herein can therefore sense the exhaust pressure on automotive engines and other mechanical and/or electromechanical devices and machines.

Abstract: Differential pressure sensor systems and methods are disclosed, including an absolute pressure sensor composed of a plurality of pressure sense die for detecting sensed media, wherein each of the pressure sense die possess a back side and a front side and are respectively associated with a plurality of varying pressures. The sensed media are applied only at the backside of the pressure sense die, thereby preventing wire bonds and active regions associated with the front side of the pressure sense die from exposure to sensed media and attack from acids and abrasive chemicals associated with the sensed media.