Patents by Inventor Tuyosi Satoh

Tuyosi Satoh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas supply piping device for a process apparatus
    Patent number: 5313982
    Abstract: A gas supply pipeline system for process equipment which is adapted to supply at least two kinds of process gas. The system includes two independent flow passages formed between each process gas supply pipeline and a purge gas supply pipeline. The system further includes plurality of flow passages each of which is connected between one of the process gas supply pipelines and the process apparatus. Each of the process gas supply pipelines can be purged independently and the stagnation of gas in the pipelines which are not in use can be prevented by flowing purge gas constantly therethrough.
    Type: Grant
    Filed: September 13, 1993
    Date of Patent: May 24, 1994
    Assignee: Tadahiro Ohmi
    Inventors: Tadahiro Ohmi, Nakahara Fumio, Tuyosi Satoh, Masaru Umeda