Abstract: A substrate processing apparatus includes an upper chamber space, a lower chamber space, a susceptor, and a flow control ring assembly comprising a seal ring and a flow control ring having a shape to surround the susceptor, the flow control ring assembly sealing or substantially sealing the upper chamber space from the lower chamber space while the susceptor in a first position.

Abstract: A wide variety of scenarios are supported for per-biosample aggregation of sequencing yield. A sequencing system can sequence a plurality of biosamples in parallel. As sequencing yield results are acquired, they can be matched to biosamples and sequencing progress for the biosamples can be monitored. A target amount of yield can be specified so that a sequencing yield analysis application is automatically launched when aggregated yield reaches the target. Other features related to quality control and yield-in-progress can result in more efficient sequencing activities and reduction in waste.