Patents by Inventor Tyler B. Rockwell

Tyler B. Rockwell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Technique for shaping a ribbon-shaped ion beam
    Patent number: 7675047
    Abstract: A technique for shaping a ribbon-shaped ion beam is disclosed. In one particular exemplary embodiment, the technique may be realized as an apparatus for shaping a ribbon-shaped ion beam. The apparatus may comprise an electrostatic lens having a substantially rectangular aperture for a ribbon-shaped ion beam to pass through, wherein a plurality of focusing elements are positioned along short edges of the aperture, and wherein each focusing element is separately biased and oriented to shape the ribbon-shaped ion beam.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: March 9, 2010
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Svetlana B. Radovanov, Peter L. Kellerman, Victor M. Benveniste, Robert C. Lindberg, Kenneth H. Purser, Tyler B. Rockwell, James S. Buff, Anthony Renau