Abstract: Provided are molds, comprising non-metal base portions and protective optical layers that cover and shield these base portions from laser ablation. For example, a protective optical layer may reflect a laser beam used for ablating the mold. Methods of forming these protective optical layers on non-metal base portions are also provided. In some embodiments, this protective optical layer is the outermost layer exposed to the environment. Alternatively, the protective optical layer may be covered by a release layer. The release layer may be retained or removed during laser ablation. In some embodiments, light emitted by a mold during laser ablation is analyzed to determine performance of its protective optical layer. This feedback may be used to control the laser ablation such as to control orientation of the laser beam relative to the mold.

Abstract: Provided are molds, comprising non-metal base portions and protective optical layers that cover and shield these base portions from laser ablation. For example, a protective optical layer may reflect a laser beam used for ablating the mold. Methods of forming these protective optical layers on non-metal base portions are also provided. In some embodiments, this protective optical layer is the outermost layer exposed to the environment. Alternatively, the protective optical layer may be covered by a release layer. The release layer may be retained or removed during laser ablation. In some embodiments, light emitted by a mold during laser ablation is analyzed to determine performance of its protective optical layer. This feedback may be used to control the laser ablation such as to control orientation of the laser beam relative to the mold.

Abstract: Provided are methods for cleaning processing tools from residue using laser ablation. Also provided are processing tools comprising non-metal base portions and protective optical layers that cover and shield these base portions from laser ablation. For example, a protective optical layer may reflect a laser beam used for ablating the tool. Methods of forming these protective optical layers on non-metal base portions are also provided. In some embodiments, this protective optical layer is the outermost layer exposed to the environment. Alternatively, the protective optical layer may be covered by a release layer. The release layer may be retained or removed during laser ablation. In some embodiments, light emitted by a processing tool during laser ablation is analyzed to determine performance of its protective optical layer. This feedback may be used to control the laser ablation such as to control orientation of the laser beam relative to the processing tool.

Abstract: Provided are methods for cleaning processing tools from residue using laser ablation. Also provided are processing tools comprising non-metal base portions and protective optical layers that cover and shield these base portions from laser ablation. For example, a protective optical layer may reflect a laser beam used for ablating the tool. Methods of forming these protective optical layers on non-metal base portions are also provided. In some embodiments, this protective optical layer is the outermost layer exposed to the environment. Alternatively, the protective optical layer may be covered by a release layer. The release layer may be retained or removed during laser ablation. In some embodiments, light emitted by a processing tool during laser ablation is analyzed to determine performance of its protective optical layer. This feedback may be used to control the laser ablation such as to control orientation of the laser beam relative to the processing tool.

Abstract: A shape memory structure includes a plurality of bases directly attached to a composite structure and arranged along a first line at a first edge of the composite structure. A plurality of buckle-shaped shape memory structures are attached to corresponding ones of the plurality of bases, such that first ends of the plurality of buckle-shaped shape memory structures are raised relative to the composite structure. Second ends of the plurality of buckle-shaped shape memory structures are directly attached to the composite structure along a second line at a second edge of the composite structure, the second edge being opposite the first edge. When activated, the shape memory structure changes from a buckled shape to an original shape to cause the composite structure to assume a deployed shape; when deactivated, the shape memory structure to resumes a buckled shape and the composite structure an undeployed shape.

Abstract: Method and apparatus for controlling a shape of a composite structure. A shape memory structure associated with the composite structure is activated. The shape memory structure changes from a buckled shape to an original shape and causes the composite structure to change from an undeployed shape to a deployed shape. The shape memory structure is deactivated. The shape memory structure changes from the original shape to the buckled shape in response to a load from the composite structure and causes the composite structure to change from the deployed shape to the undeployed shape.