Patents by Inventor Tzay-Fa (Jeff) Su
Tzay-Fa (Jeff) Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8252624Abstract: A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.Type: GrantFiled: December 28, 2010Date of Patent: August 28, 2012Assignee: Applied Materials, Inc.Inventors: David Tanner, Hien-Minh Huu Le, Quancheng (Tommy) Gu, Shuran Sheng, Yong Kee Chae, Tzay-Fa (Jeff) Su, Dapeng Wang
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Patent number: 8225496Abstract: The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.Type: GrantFiled: August 29, 2008Date of Patent: July 24, 2012Assignee: Applied Materials, Inc.Inventors: Robert Z. Bachrach, Yong-Kee Chae, Soo Young Choi, Nicholas G. J. De Vries, Yacov Elgar, Eric A. Englhardt, Michel R. Frei, Charles Gay, Parris Hawkins, Choi (Gene) Ho, James Craig Hunter, Penchala N. Kankanala, Liwei Li, Wing Hoo (Hendrick) Lo, Danny Cam Toan Lu, Fang Mei, Stephen P. Murphy, Srujal (Steve) Patel, Matthew J. B. Saunders, Asaf Schlezinger, Shuran Sheng, Tzay-Fa (Jeff) Su, Jeffrey S. Sullivan, David Tanner, Teresa Trowbridge, Brice Walker, John M. White, Tae K. Won
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Publication number: 20110174362Abstract: A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.Type: ApplicationFiled: December 28, 2010Publication date: July 21, 2011Applicant: Applied Materials, Inc.Inventors: David Tanner, Hien-Minh Huu Le, Quancheng (Tommy) Gu, Shuran Sheng, Yong Kee Chae, Tzay-Fa (Jeff) Su, Dapeng Wang
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Publication number: 20110177648Abstract: A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.Type: ApplicationFiled: December 28, 2010Publication date: July 21, 2011Applicant: Applied Materials, Inc.Inventors: David Tanner, Hien-Minh Huu Le, Quancheng (Tommy) Gu, Shuran Sheng, Yong Kee Chae, Tzay-Fa (Jeff) Su, Dapeng Wang
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Patent number: 7956337Abstract: One embodiment of the present invention sets forth a computer-implemented method for tuning laser scribe parameters during the fabrication of a solar module. The method includes analyzing the visual appearance of a laser scribe to extract various morphological parameters related to the quality of a laser scribe process used to produce the scribe. Based on the morphological parameters, the laser scribe parameters may be modified in-situ to achieve settings that are optimal for performing laser scribing in each layer of the solar module. As a result, laser scribe process cycle time may be minimized while providing better indication of the laser scribe process stability and quality relative to the prior art approaches.Type: GrantFiled: September 9, 2008Date of Patent: June 7, 2011Assignee: Applied Materials, Inc.Inventors: Vicky Svidenko, Tzay-Fa (Jeff) Su, Chuck Luu
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Publication number: 20100313929Abstract: Embodiments of the present invention provide methods for fabricating a solar cell on a substrate that have proportionally reduced current to minimize or reduce the likelihood of shading of a portion of the solar cell causing damage to the formed device. In one embodiment, a method for fabricating a series of solar cell arrays on a substrate includes providing a substrate having a TCO layer formed thereon, forming a first plurality of vertical scribing lines and a first plurality of horizontal scribing lines in the TCO layer, forming a film stack and a back metal layer on the scribed TCO layer, and forming a second plurality of the horizontal scribing lines in the film stack and the back metal layer, wherein the second plurality of horizontal scribing lines comprise pairs of scribing lines formed adjacent to each respective one of the first plurality of the horizontal scribing lines formed in the TCO layer.Type: ApplicationFiled: October 12, 2009Publication date: December 16, 2010Inventors: Renhe Jia, Dapeng Wang, Michel Frei, Tzay-Fa (Jeff) Su, David Tanner, Chris Eberspacher
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Publication number: 20100132759Abstract: Embodiments of the present invention provide methods for fabricating a solar cell on a substrate that have proportionally reduced current to minimize or reduce the likelihood of shading of a portion of the solar cell causing damage to the formed device. In one embodiment, a method for fabricating a series of solar cell arrays on a substrate includes providing a substrate having a TCO layer formed thereon, forming a first plurality of vertical scribing lines and a first plurality of horizontal scribing lines in the TCO layer, forming a film stack and a back metal layer on the scribed TCO layer, and forming a second plurality of the horizontal scribing lines in the film stack and the back metal layer, wherein the second plurality of horizontal scribing lines comprise pairs of scribing lines formed adjacent to each respective one of the first plurality of the horizontal scribing lines formed in the TCO layer.Type: ApplicationFiled: June 12, 2009Publication date: June 3, 2010Inventors: Renhe JIA, Dapeng Wang, Michel Frei, Tzay-Fa(Jeff) Su, David Tanner, Chris Eberspacher
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Publication number: 20100059693Abstract: One embodiment of the present invention sets forth a computer-implemented method for tuning laser scribe parameters during the fabrication of a solar module. The method includes analyzing the visual appearance of a laser scribe to extract various morphological parameters related to the quality of a laser scribe process used to produce the scribe. Based on the morphological parameters, the laser scribe parameters may be modified in-situ to achieve settings that are optimal for performing laser scribing in each layer of the solar module. As a result, laser scribe process cycle time may be minimized while providing better indication of the laser scribe process stability and quality relative to the prior art approaches.Type: ApplicationFiled: September 9, 2008Publication date: March 11, 2010Inventors: Vicky SVIDENKO, Tzay-Fa (Jeff) Su, Chuck Luu
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Publication number: 20100047954Abstract: The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.Type: ApplicationFiled: August 26, 2009Publication date: February 25, 2010Inventors: Tzay-Fa (Jeff) Su, Hien-Minh Huu Le, Fang Mei, Yong-kee Chae, Michel R. Frei, Asaf Schlezinger, Shuran Sheng, Jeffrey S. Sullivan, David Tanner
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Publication number: 20090104342Abstract: The formation of diagnostic devices on the same substrate used to fabricate a photovoltaic (PV) cell is described. Such devices, also referred to as process diagnostic vehicles (PDVs), are configured for in-line monitoring of electrical characteristics of PV cell features and are formed on the substrate using the same process steps for PV cell fabrication. The data collected via the PDVs can be used to tune or optimize subsequent PV cell fabrication, i.e., used as feedback for the fabrication process. Alternatively, the data collected via PDVs can be fed forward in the fabrication process, so that later process steps performed on a PV cell substrate can be modified to compensate for issues detected on the PV cell substrate via the PDVs.Type: ApplicationFiled: September 17, 2008Publication date: April 23, 2009Inventors: Dapeng Wang, Michel R. Frei, Tzay-Fa (Jeff) Su, Vicky Svidenko, Gregg S. Higashi
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Publication number: 20090077804Abstract: The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.Type: ApplicationFiled: August 29, 2008Publication date: March 26, 2009Inventors: Robert Z. Bachrach, Yong-Kee Chae, Soo Young Choi, Nicholas G.J. De Vries, Yacov Elgar, Eric A. Englhardt, Michel R. Frei, Charles Gay, Parris Hawkins, Choi (Gene) Ho, James Craig Hunter, Penchala N. Kankanala, Liwei Li, Wing Hoo (Hendrick) Lo, Danny Cam Toan Lu, Fang Mei, Stephen P. Murphy, Srujal (Steve) Patel, Matthew J.B. Saunders, Asaf Schlezinger, Shuran Sheng, Tzay-Fa (Jeff) Su, Jeffrey S. Sullivan, David Tanner, Teresa Trowbridge, Brice Walker, John M. White, Tae K. Won
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Publication number: 20090077805Abstract: The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.Type: ApplicationFiled: August 29, 2008Publication date: March 26, 2009Inventors: Robert Z. BACHRACH, Yong-Kee Chae, Soo Young Choi, Nicholas G.J. De Vries, Yacov Elgar, Eric A. Englhardt, Michael R. Frei, Charles Gay, Parris Hawkins, Choi (Gene) Ho, James Craig Hunter, Penchala N. Kankanala, Liwei Li, Wing Hoo (Hendrick) Lo, Danny Cam Toan Lu, Fang Mei, Stephen P. Murphy, Srujal (Steve) Patel, Matthew J.B. Saunders, Asaf Schlezinger, Shuran Sheng, Tzay-Fa (Jeff) Su, Jeffrey S. Sullivan, David Tanner, Teresa Trowbridge, Brice Walker, John M. White, Tae K. Won