Patents by Inventor Tzay-Fa Su
Tzay-Fa Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8864915Abstract: A method of processing a substrate having a transparent conductive oxide disposed thereon, including: exposing the substrate to a first cleaning solution comprising hydrogen peroxide and ammonium citrate; exposing the substrate to a second cleaning solution having a pH within a range from about 6 to about 7, the second cleaning solution different than the first cleaning solution; agitating the second cleaning solution; and depositing a silicon-containing film on the transparent conductive oxide.Type: GrantFiled: August 3, 2011Date of Patent: October 21, 2014Assignee: Applied Materials, Inc.Inventors: Renhe Jia, Adam Brand, Liming Zhang, Dapeng Wang, Tzay-Fa Su, Vijay Parihar
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Patent number: 8188759Abstract: A method and apparatus for testing a photovoltaic substrate disposes the substrate on a support gantry with connection points such as vacuum cups. The gantry is actuated into a test position. A probe nest coupled to the gantry connects to a junction box on the substrate. A power supply applies voltage to the junction box, and an actuated frame contacts an edge region of the substrate to detect any breakthrough current. The actuated frame comprises a liner for maximizing contact with the edge of the substrate. The liner may be conductive, or may have a conductive surface. Current sensors coupled to the conductive liner of the frame detect any breakthrough current. A solar spectrum simulator provides solar spectrum radiation for testing the photovoltaic properties of the substrate.Type: GrantFiled: September 16, 2009Date of Patent: May 29, 2012Assignee: Applied Materials, Inc.Inventors: Peter Wang, Harry Smith Whitesell, III, Danny Cam Toan Lu, Tzay-Fa Su, Michael Marriott, Xue Hong Ma, Xiao Ning Li, Jie Ling
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Patent number: 8138782Abstract: Embodiments of the present invention relate to a solar simulator module of a solar cell production line. In one embodiment the solar simulator receives a solar cell module in a horizontal position and reorients the module into a vertical position. A light source is oriented to emit a flash of light in a substantially horizontal orientation toward the vertically oriented solar cell module. In one embodiment, an automated labeling device affixes a label including the electrical characteristics measured onto a back surface of the solar cell module. In one embodiment, a plurality of solar cell modules are received and tested simultaneously.Type: GrantFiled: January 9, 2009Date of Patent: March 20, 2012Assignee: Applied Materials, Inc.Inventors: Yacov Elgar, Danny Cam Toan Lu, Tzay-Fa Su, Jeffrey S. Sullivan, David Tanner, Harry Whitesell
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Publication number: 20120037181Abstract: Embodiments of the present invention generally relate to methods for cleaning a substrate prior to a deposition process. The methods generally include multiple cleaning solutions for removing contaminants from a surface of a substrate. The multiple solutions generally have different compositions, and each of the solutions contain one or more additives selected to remove a variety of contaminants. Mechanical agitation may also be utilized to remove contaminants from the surface of a substrate. After cleaning a substrate, a material may be deposited on the substrate surface.Type: ApplicationFiled: August 3, 2011Publication date: February 16, 2012Applicant: APPLIED MATERIALS, INC.Inventors: Renhe Jia, Adam Brand, Liming Zhang, Dapeng Wang, Tzay-Fa Su, Vijay Parihar
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Publication number: 20120015471Abstract: Embodiments of the present invention provide methods for edge film stack removal for use in fabricating photovoltaic devices. In one embodiment, the method includes providing a substrate having a film stack deposited thereon, the film stack comprising a transparent conductive layer, a silicon-containing layer, and a metal back contact layer, removing the metal back contact layer and the silicon-containing layer formed on a periphery region along a side of the substrate using an electromagnetic radiation delivered at a first energy level, and removing the transparent conductive layer formed on the periphery region along the side of the substrate using electromagnetic radiation delivered at a second energy level that is higher than the first energy level.Type: ApplicationFiled: July 12, 2011Publication date: January 19, 2012Applicant: APPLIED MATERIALS, INC.Inventors: LI-PING WANG, Tzay-Fa Su, Sarin Sundar Jainnagar Kuppuswamy, Ole Luckner
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Patent number: 8071420Abstract: The present invention provides a method and apparatus for edge film stack removal process for fabricating photovoltaic devices. In one embodiment, a method for manufacturing solar cell devices on a substrate includes providing a substrate into a chemical vapor deposition chamber, contacting a shadow frame disposed in the deposition chamber to a periphery region of the substrate, depositing a silicon-containing layer on the substrate through an aperture defined by the shadow frame, transferring the substrate to a physical vapor deposition chamber, depositing a transparent conductive layer on the silicon-containing layer, transferring the substrate to a laser edge removal tool, and laser scribing the layers formed on the periphery region of the substrate.Type: GrantFiled: December 14, 2009Date of Patent: December 6, 2011Assignee: Applied Materials, Inc.Inventors: Tzay-Fa Su, David Morishige, Todd Martin, Uday Mahajan
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Publication number: 20110180122Abstract: A photovoltaic device is provided. In one embodiment, a photovoltaic device includes a transparent conductive oxide (TCO) layer deposited over the substrate, and a plurality of electrical conductive paths disposed in electrical contact with the TCO layer, wherein the plurality of electrical conductive paths extend discontinuously across opposing sides of the substrate.Type: ApplicationFiled: January 26, 2010Publication date: July 28, 2011Applicant: APPLIED MATERIALS, INC.Inventors: David Tanner, Hien-minh Huu Le, Tzay-fa Su, Dapeng Wang
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Publication number: 20110126875Abstract: Methods for sputter depositing a transparent conductive layer and a conductive contact layer are provided in the present invention. In one embodiment, the method includes forming a transparent conductive layer on a substrate by materials sputtered from a first target disposed in a reactive sputter chamber, and forming a conductive contact layer on the transparent conductive layer by materials sputtered from a second target disposed in the reactive sputter chamber.Type: ApplicationFiled: December 1, 2009Publication date: June 2, 2011Inventors: Hien-Minh Huu Le, Valery V. Komin, David Tanner, Mohd Fadzli Anwar Hassan, Tzay-Fa Su, Dapeng Wang
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Publication number: 20110065227Abstract: Embodiments of the present invention generally relate to an automated production line using a common laser scribe module for providing consistent scribe lines in multiple layers during the formation of thin film photovoltaic modules. The common laser scribe module includes a plurality of identical, programmable laser tools configured to emit radiation at a common wavelength. Substrates flowing through the production line are tracked by a system controller, which identifies available laser tools within the common laser scribe module and routes substrates to available tools for scribing features in one or more layers disposed on the substrates. The system controller also sets and controls laser parameters, such as power, pulse frequency, pulse width, and laser pattern, in order to accurately and consistently produce scribed lines in the appropriate material layer of the substrate.Type: ApplicationFiled: September 15, 2009Publication date: March 17, 2011Applicant: APPLIED MATERIALS, INC.Inventors: Tzay-Fa Su, David Morishige, David Tanner, Chris Eberspacher
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Publication number: 20110008947Abstract: Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, bonding, testing, and sectioning processes to form one or more complete, functional, and tested solar cell devices in custom sizes and/or shapes that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system is adapted to form one or more BIPV panels in custom sizes and/or shapes from a single large substrate for shipment to an end user.Type: ApplicationFiled: June 17, 2010Publication date: January 13, 2011Applicant: APPLIED MATERIALS, INC.Inventors: KEVIN LAUGHTON CUNNINGHAM, Carl Treadwell, Tzay-Fa Su, Uday Mahajan, Sarin Sundar Jainnagar Kuppuswamy
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Publication number: 20110003404Abstract: A method and apparatus for testing a photovoltaic substrate disposes the substrate on a support gantry with connection points such as vacuum cups. The gantry is actuated into a test position. A probe nest coupled to the gantry connects to a junction box on the substrate. A power supply applies voltage to the junction box, and an actuated frame contacts an edge region of the substrate to detect any breakthrough current. The actuated frame comprises a liner for maximizing contact with the edge of the substrate. The liner may be conductive, or may have a conductive surface. Current sensors coupled to the conductive liner of the frame detect any breakthrough current. A solar spectrum simulator provides solar spectrum radiation for testing the photovoltaic properties of the substrate.Type: ApplicationFiled: September 16, 2009Publication date: January 6, 2011Applicant: APPLIED MATERIALS, INC.Inventors: Peter Wang, Harry Smith Whitesell, III, Danny Cam Toan Lu, Tzay-Fa Su, Michael Marriot, Xue Hong Ma, Xiaoning Li, Jie Ling
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Publication number: 20100323471Abstract: Methods for making solar cells are described. The methods include selectively etching strips formed by laser scribing to remove oxides formed during laser scribing.Type: ApplicationFiled: August 21, 2008Publication date: December 23, 2010Applicant: Applied Materials, Inc.Inventors: Hien-Minh Huu Le, Tzay-Fa Su, David Tanner
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Patent number: 7829356Abstract: A method and apparatus for improving a thin film scribing procedure is presented. Embodiments of the invention include a method and apparatus for determining a scribe setting for removal of an absorber layer of a photovoltaic device that improves contact resistance between a back contact layer and a front contact layer of the device.Type: GrantFiled: September 17, 2008Date of Patent: November 9, 2010Assignee: Applied Materials, Inc.Inventors: Fang Mei, David Tanner, Tzay-Fa Su
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Publication number: 20100276571Abstract: A method of calibrating a light source used to simulate the sun in solar cell testing apparatus.Type: ApplicationFiled: May 3, 2010Publication date: November 4, 2010Applicant: Applied Materials, Inc.Inventors: Dapeng Wang, Michel Frei, Tzay-Fa Su, David Tanner
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Publication number: 20100273279Abstract: Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, bonding, testing, and sectioning processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. The system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.Type: ApplicationFiled: April 27, 2009Publication date: October 28, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Tzay-Fa Su, David Morishige
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Publication number: 20100197051Abstract: Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.Type: ApplicationFiled: February 2, 2010Publication date: August 5, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Asaf Schlezinger, Michel R. Frei, Dapeng Wang, Tzay-Fa Su, Vicky Svidenko, Kashif Maqsood
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Publication number: 20100159634Abstract: The present invention provides a method and apparatus for edge film stack removal process for fabricating photovoltaic devices. In one embodiment, a method for manufacturing solar cell devices on a substrate includes providing a substrate into a chemical vapor deposition chamber, contacting a shadow frame disposed in the deposition chamber to a periphery region of the substrate, depositing a silicon-containing layer on the substrate through an aperture defined by the shadow frame, transferring the substrate to a physical vapor deposition chamber, depositing a transparent conductive layer on the silicon-containing layer, transferring the substrate to a laser edge removal tool, and laser scribing the layers formed on the periphery region of the substrate.Type: ApplicationFiled: December 14, 2009Publication date: June 24, 2010Inventors: TZAY-FA SU, David Morishige, Todd Martin, Uday Mahajan
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Publication number: 20100126559Abstract: Semi-transparent thin-film photovoltaic modules and methods of making the same are described. A thin-film photovoltaic module comprises a transparent conductive oxide layer, a photoabsorptive layer and a reflective back contact layer. A series of scribes is created between application of each layer with some scribes rendering transparent portions of the final module.Type: ApplicationFiled: November 26, 2008Publication date: May 27, 2010Applicant: Applied Materials, Inc.Inventors: Kevin Laughton Cunningham, Tzay-Fa Su
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Publication number: 20100068835Abstract: A method and apparatus for improving a thin film scribing procedure is presented. Embodiments of the invention include a method and apparatus for determining a scribe setting for removal of an absorber layer of a photovoltaic device that improves contact resistance between a back contact layer and a front contact layer of the device.Type: ApplicationFiled: September 17, 2008Publication date: March 18, 2010Inventors: Fang Mei, David Tanner, Tzay-Fa Su
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Publication number: 20090287446Abstract: The present invention generally includes an apparatus and method of forming a reference module device that is able to deliver a repeatable and desirable amount of power that does not degrade or change over time. The reference module can be used to help test and calibrate various testing equipment used in the production of a photovoltaic device that may be formed in a solar cell fab. The solar cell fab is generally an arrangement of processing modules and automation equipment that is used to form solar cell devices.Type: ApplicationFiled: April 22, 2009Publication date: November 19, 2009Applicant: APPLIED MATERIALS, INC.Inventors: Dapeng Wang, Michel R. Frei, Tzay-Fa Su, David Tanner