Patents by Inventor Tze-Jung Yao

Tze-Jung Yao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Freestanding polymer MEMS structures with anti stiction
    Patent number: 6787968
    Abstract: An anti stiction structure for cantilever formation technique. In one embodiment, the polymer cantilever is prevented from sticking to the substrate by at amortized stick layer on the substrate during formation that is later removed as a sacrificial layer. In another embodiment, the cantilever includes downwardly extending legs.
    Type: Grant
    Filed: September 25, 2001
    Date of Patent: September 7, 2004
    Assignee: California Institute of Technology
    Inventors: Yu-Chong Tai, Tze-Jung Yao, Xing Yang
  • Micromachined rubber O-ring microfluidic couplers
    Patent number: 6698798
    Abstract: A micromachined O-ring is described. The O-ring can be formed for use in micromachined microfluidic devices.
    Type: Grant
    Filed: April 12, 2001
    Date of Patent: March 2, 2004
    Assignee: California Institute of Technology
    Inventors: Yu-Chong Tai, Tze-Jung Yao
  • Micromachined rubber O-ring microfluidic couplers
    Publication number: 20020093143
    Abstract: A micromachined O-ring is described. The O-ring can be formed for use in micromachined microfluidic devices.
    Type: Application
    Filed: April 12, 2001
    Publication date: July 18, 2002
    Inventors: Yu-Chong Tai, Tze-Jung Yao
  • Freestanding polymer MEMS structures with anti stiction
    Publication number: 20020070634
    Abstract: An anti stiction structure for cantilever formation technique. In one embodiment, the polymer cantilever is prevented from sticking to the substrate by at amortized stick layer on the substrate during formation that is later removed as a sacrificial layer. In another embodiment, the cantilever includes downwardly extending legs.
    Type: Application
    Filed: September 25, 2001
    Publication date: June 13, 2002
    Inventors: Yu-Chong Tai, Tze-Jung Yao, Xing Yang