Patents by Inventor Tze Lee

Tze Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and systems for rapid thermal processing
    Publication number: 20060035477
    Abstract: Methods for rapid thermal processing of semiconductor substrates are provided. An exemplary method comprises directing radiant heat energy emitted from a heat source toward a backside surface of the semiconductor substrate. Systems for rapid thermal processing also are provided.
    Type: Application
    Filed: August 12, 2004
    Publication date: February 16, 2006
    Inventors: Karen Mai, Ming-Ho Yang, Tze Lee, Shih-Chang Chen, Chun-Feng Nieh
  • Semiconductor device and method of making the same
    Publication number: 20050242376
    Abstract: A semiconductor device comprises a substrate, a gate disposed on the substrate, and a source and drain formed in the substrate on both sides of the gate. The device further comprises a thin spacer having a first layer and a second layer formed on the sidewalls of the gate, wherein the first and second layers have comparable wet etch rates of at least 10 ? per minute using the same etchant.
    Type: Application
    Filed: April 29, 2004
    Publication date: November 3, 2005
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chien-Hao Chen, Chia-Lin Chen, Tze Lee, Shih-Chang Chen, Ju-Wang Hsu