Patents by Inventor Tzeng-Fei Wen

Tzeng-Fei Wen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9117847
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes the steps of: sequentially forming agate dielectric layer and a first gate layer on a semiconductor substrate, wherein the gate dielectric layer is between the first gate layer and the semiconductor substrate; forming at least an opening in the first gate layer; forming a first dielectric layer conformally on the semiconductor substrate wherein the first dielectric layer covers the first gate layer; and forming a second gate layer filling the opening and overlapping the first gate layer.
    Type: Grant
    Filed: October 17, 2014
    Date of Patent: August 25, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Cheng-Yuan Hsu, Chi Ren, Tzeng-Fei Wen
  • Publication number: 20150056768
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes the steps of: sequentially forming agate dielectric layer and a first gate layer on a semiconductor substrate, wherein the gate dielectric layer is between the first gate layer and the semiconductor substrate; forming at least an opening in the first gate layer; forming a first dielectric layer conformally on the semiconductor substrate wherein the first dielectric layer covers the first gate layer; and forming a second gate layer filling the opening and overlapping the first gate layer.
    Type: Application
    Filed: October 17, 2014
    Publication date: February 26, 2015
    Inventors: Cheng-Yuan Hsu, CHI Ren, Tzeng-Fei Wen
  • Patent number: 8890230
    Abstract: A semiconductor device includes two floating gates, a control gate and a first dielectric layer. The floating gates are disposed on a semiconductor substrate. The control gate partially overlaps each of the floating gates, and a part of the control gate is disposed between the two floating gates. Furthermore, the first dielectric layer disposed between the two floating gates and the control gate has a fixed thickness.
    Type: Grant
    Filed: July 15, 2012
    Date of Patent: November 18, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Cheng-Yuan Hsu, Chi Ren, Tzeng-Fei Wen
  • Publication number: 20140015029
    Abstract: A semiconductor device includes two floating gates, a control gate and a first dielectric layer. The floating gates are disposed on a semiconductor substrate. The control gate partially overlaps each of the floating gates, and a part of the control gate is disposed between the two floating gates. Furthermore, the first dielectric layer disposed between the two floating gates and the control gate has a fixed thickness.
    Type: Application
    Filed: July 15, 2012
    Publication date: January 16, 2014
    Inventors: Cheng-Yuan Hsu, CHI REN, Tzeng-Fei Wen
  • Publication number: 20130334636
    Abstract: A fabricating method of a back-illuminated image sensor includes the following steps. First, a silicon wafer having a first surface and a second surface is provided, wherein a number of trench isolations are formed in the first surface, and at least one image sensing member is formed between the trench isolations. Then, a first chemical mechanical polishing (CMP) process is performed to the second surface using the trench isolations as a polishing stop layer to thin the silicon wafer. Because the polishing rate of the silicon material in the silicon wafer is different with that of the isolation material of the trench isolations in the first CMP process, at least one dishing depression is formed in the second surface of the silicon wafer. Finally, a microlens is formed above the dishing depression, and a surface of the microlens facing the dishing depression is a curved surface.
    Type: Application
    Filed: June 14, 2012
    Publication date: December 19, 2013
    Applicant: UNITED MICROELECTRONICS CORPORATION
    Inventor: Tzeng-Fei WEN
  • Patent number: 7820510
    Abstract: A method of fabricating a flash memory and an isolating structure applied to a flash memory is provided. The feature of the method lies in a T-shaped shallow trench isolation (STI). The T-shaped STI has a widened cap covering on a substrate and a tapered bottom embedded in the substrate. The widened cap of the T-shaped STI can provide a high process widow when fabricating the floating gate wings, and the product yield will thereby be increased.
    Type: Grant
    Filed: March 16, 2009
    Date of Patent: October 26, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Shen-De Wang, Tzeng-Fei Wen
  • Publication number: 20100230778
    Abstract: A method of fabricating a flash memory and an isolating structure applied to a flash memory is provided. The feature of the method lies in a T-shaped shallow trench isolation (STI). The T-shaped STI has a widened cap covering on a substrate and a tapered bottom embedded in the substrate. The widened cap of the T-shaped STI can provide a high process widow when fabricating the floating gate wings, and the product yield will thereby be increased.
    Type: Application
    Filed: March 16, 2009
    Publication date: September 16, 2010
    Inventors: Shen-De Wang, Tzeng-Fei Wen
  • Patent number: 7737479
    Abstract: An image sensor, in which, a planarized layer is formed on a semiconductor substrate including a pixel array region, an optical black region, and a logic region to cover a photo sensing unit array in the pixel array region, a patterned metal layer is formed on the planarized layer corresponding to the pixel array region and the logic region, but not the optical black region. An optical black layer is formed in the optical black region after a passivation layer is formed and before a color filter array is formed at a temperature less than about 400° C., and preferably contains metal material.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: June 15, 2010
    Assignees: United Microelectronics Corp., AltaSens Inc.
    Inventors: Tzeng-Fei Wen, Giuseppe Rossi, Ju-Hsin Yen, Chia-Huei Lin, Jhy-Jyi Sze, Chien-Yao Huang, Teng-Yuan Ko, Nien-Tsu Peng
  • Patent number: 7547573
    Abstract: An image sensor and a method of manufacturing the same, in which, a planarized layer is formed on a semiconductor substrate including a pixel array region, an optical black region, and a logic region to cover a photo sensing unit array in the pixel array region, a patterned metal layer is formed on the planarized layer corresponding to the pixel array region and the logic region, but not the optical black region. An optical black layer is formed in the optical black region after a passivation layer is formed and before a color filter array is formed at a temperature less than about 400° C., and preferably contains metal material.
    Type: Grant
    Filed: August 1, 2006
    Date of Patent: June 16, 2009
    Assignees: United Microelectronics Corp., AltaSens Inc.
    Inventors: Tzeng-Fei Wen, Giuseppe Rossi, Ju-Hsin Yen, Chia-Huei Lin, Jhy-Jyi Sze, Chien-Yao Huang, Teng-Yuan Ko, Nien-Tsu Peng
  • Publication number: 20080265354
    Abstract: An image sensor, in which, a planarized layer is formed on a semiconductor substrate including a pixel array region, an optical black region, and a logic region to cover a photo sensing unit array in the pixel array region, a patterned metal layer is formed on the planarized layer corresponding to the pixel array region and the logic region, but not the optical black region. An optical black layer is formed in the optical black region after a passivation layer is formed and before a color filter array is formed at a temperature less than about 400° C., and preferably contains metal material.
    Type: Application
    Filed: June 27, 2008
    Publication date: October 30, 2008
    Inventors: Tzeng-Fei Wen, Giuseppe Rossi, Ju-Hsin Yen, Chia-Huei Lin, Jhy-Jyi Sze, Chien-Yao Huang, Teng-Yuan Ko, Nien-Tsu Peng
  • Publication number: 20080032438
    Abstract: An image sensor and a method of manufacturing the same, in which, a planarized layer is formed on a semiconductor substrate including a pixel array region, an optical black region, and a logic region to cover a photo sensing unit array in the pixel array region, a patterned metal layer is formed on the planarized layer corresponding to the pixel array region and the logic region, but not the optical black region. An optical black layer is formed in the optical black region after a passivation layer is formed and before a color filter array is formed at a temperature less than about 400° C., and preferably contains metal material.
    Type: Application
    Filed: August 1, 2006
    Publication date: February 7, 2008
    Inventors: Tzeng-Fei Wen, Giuseppe Rossi, Ju-Hsin Yen, Chia-Huei Lin, Jhy-Jyi Sze, Chien-Yao Huang, Teng-Yuan Ko, Nien-Tsu Peng