Patents by Inventor Tzi-Cheng Lai

Tzi-Cheng Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10923526
    Abstract: First and second images of a semiconductor die or portion thereof are generated. Generating each image includes performing a respective instance of time-domain integration (TDI) along a plurality of pixel columns in an imaging sensor, while illuminating the imaging sensor with light scattered from the semiconductor die or portion thereof. The plurality of pixel columns comprises pairs of pixel columns in which the pixel columns are separated by respective channel stops. While performing a first instance of TDI to generate the first image, a first bias is applied to electrically conductive contacts of the channel stops. While performing a second instance of TDI to generate the second image, a second bias is applied to the electrically conductive contacts of the channel stops. Defects in the semiconductor die or portion thereof are identified using the first and second images.
    Type: Grant
    Filed: March 15, 2019
    Date of Patent: February 16, 2021
    Assignee: KLA Corporation
    Inventors: Tzi-Cheng Lai, Jehn-Huar Chem, Stephen Biellak
  • Patent number: 10903258
    Abstract: A back-illuminated image sensor includes a first pixel, a second pixel, and a channel stop situated between the first pixel and the second pixel to isolate the first pixel from the second pixel. The channel stop includes a LOCOS structure and a region of doped silicon beneath the LOCOS structure. The back-illuminated image sensor also includes a first electrically conductive contact that extends through the LOCOS structure and forms an ohmic contact with the region of doped silicon. The first electrically conductive contact may be grounded, negatively biased, or positively biased, depending on the application.
    Type: Grant
    Filed: October 5, 2018
    Date of Patent: January 26, 2021
    Assignee: KLA Corporation
    Inventors: Tzi-Cheng Lai, Jehn-Huar Chern, Stephen Biellak
  • Patent number: 10734438
    Abstract: An image sensor is provided that includes a pixel array divided into a plurality of pixel groups. Each pixel group is clocked by a respective plurality of horizontal-register clocks. Clock signals for the image sensor are adjusted. Adjusting the clock signals includes phase-shifting each plurality of horizontal-register clocks by a respective phase delay of a plurality of phase delays. The phase delays are evenly spaced and are spaced symmetrically about zero. With the clock signals adjusted, a target is imaged using the image sensor.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: August 4, 2020
    Assignee: KLA Corporation
    Inventors: Tzi-Cheng Lai, Jehn-Huar Chern, Stephen Biellak
  • Publication number: 20190288019
    Abstract: An image sensor is provided that includes a pixel array divided into a plurality of pixel groups. Each pixel group is clocked by a respective plurality of horizontal-register clocks. Clock signals for the image sensor are adjusted. Adjusting the clock signals includes phase-shifting each plurality of horizontal-register clocks by a respective phase delay of a plurality of phase delays. The phase delays are evenly spaced and are spaced symmetrically about zero. With the clock signals adjusted, a target is imaged using the image sensor.
    Type: Application
    Filed: March 8, 2019
    Publication date: September 19, 2019
    Inventors: Tzi-Cheng Lai, Jehn-Huar Chern, Stephen Biellak
  • Publication number: 20190288028
    Abstract: First and second images of a semiconductor die or portion thereof are generated. Generating each image includes performing a respective instance of time-domain integration (TDI) along a plurality of pixel columns in an imaging sensor, while illuminating the imaging sensor with light scattered from the semiconductor die or portion thereof. The plurality of pixel columns comprises pairs of pixel columns in which the pixel columns are separated by respective channel stops. While performing a first instance of TDI to generate the first image, a first bias is applied to electrically conductive contacts of the channel stops. While performing a second instance of TDI to generate the second image, a second bias is applied to the electrically conductive contacts of the channel stops. Defects in the semiconductor die or portion thereof are identified using the first and second images.
    Type: Application
    Filed: March 15, 2019
    Publication date: September 19, 2019
    Inventors: Tzi-Cheng Lai, Jehn-Huar Chern, Stephen Biellak
  • Publication number: 20190109163
    Abstract: A back-illuminated image sensor includes a first pixel, a second pixel, and a channel stop situated between the first pixel and the second pixel to isolate the first pixel from the second pixel. The channel stop includes a LOCOS structure and a region of doped silicon beneath the LOCOS structure. The back-illuminated image sensor also includes a first electrically conductive contact that extends through the LOCOS structure and forms an ohmic contact with the region of doped silicon. The first electrically conductive contact may be grounded, negatively biased, or positively biased, depending on the application.
    Type: Application
    Filed: October 5, 2018
    Publication date: April 11, 2019
    Inventors: Tzi-Cheng Lai, Jehn-Huar Chern, Stephen Biellak