Patents by Inventor Tzila Schwarzkopf

Tzila Schwarzkopf has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for measuring a topographical feature on a specimen
    Patent number: 4941980
    Abstract: A system for measuring a topographical feature on a specimen including apparatus for scanning an electron beam across the feature at high speed, first and second electron detector apparatus organized in pairs, apparatus for signal processing of a first signal received from the first electron detector apparatus thereby to identify elements of a cross-sectional profile of the feature, apparatus for signal processing of a second signal received from the second electron detector apparatus generally separately from the signal processing of the first signal thereby to identify elements of a cross-sectional profile of the feature, and apparatus for incorporating the elements identified from the first electron detector apparatus and the elements identified from the second electron detector apparatus thereby to produce a composite picture of the feature.
    Type: Grant
    Filed: February 17, 1989
    Date of Patent: July 17, 1990
    Assignee: Opal, Inc.
    Inventors: Uriel Halavee, Israel Niv, Tzila Schwarzkopf