Patents by Inventor Tzu-Chiang Chen

Tzu-Chiang Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8759184
    Abstract: A method includes providing a plurality of semiconductor fins parallel to each other, and includes two edge fins and a center fin between the two edge fins. A middle portion of each of the two edge fins is etched, and the center fin is not etched. A gate dielectric is formed on a top surface and sidewalls of the center fin. A gate electrode is formed over the gate dielectric. The end portions of the two edge fins and end portions of the center fin are recessed. An epitaxy is performed to form an epitaxy region, wherein an epitaxy material grown from spaces left by the end portions of the two edge fins are merged with an epitaxy material grown from a space left by the end portions of the center fin to form the epitaxy region. A source/drain region is formed in the epitaxy region.
    Type: Grant
    Filed: January 9, 2012
    Date of Patent: June 24, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Cheng Ho, Tzu-Chiang Chen, Yi-Tang Lin, Chih-Sheng Chang
  • Publication number: 20130334615
    Abstract: A method includes forming a gate stack including a gate electrode on a first semiconductor fin. The gate electrode includes a portion over and aligned to a middle portion of the first semiconductor fin. A second semiconductor fin is on a side of the gate electrode, and does not extend to under the gate electrode. The first and the second semiconductor fins are spaced apart from, and parallel to, each other. An end portion of the first semiconductor fin and the second semiconductor fin are etched. An epitaxy is performed to form an epitaxy region, which includes a first portion extending into a first space left by the etched first end portion of the first semiconductor fin, and a second portion extending into a second space left by the etched second semiconductor fin. A first source/drain region is formed in the epitaxy region.
    Type: Application
    Filed: June 10, 2013
    Publication date: December 19, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Cheng Ho, Tzu-Chiang Chen, Yi-Tang Lin, Chih-Sheng Chang
  • Patent number: 8609499
    Abstract: A method includes forming a gate stack including a gate electrode on a first semiconductor fin. The gate electrode includes a portion over and aligned to a middle portion of the first semiconductor fin. A second semiconductor fin is on a side of the gate electrode, and does not extend to under the gate electrode. The first and the second semiconductor fins are spaced apart from, and parallel to, each other. An end portion of the first semiconductor fin and the second semiconductor fin are etched. An epitaxy is performed to form an epitaxy region, which includes a first portion extending into a first space left by the etched first end portion of the first semiconductor fin, and a second portion extending into a second space left by the etched second semiconductor fin. A first source/drain region is formed in the epitaxy region.
    Type: Grant
    Filed: January 9, 2012
    Date of Patent: December 17, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Cheng Ho, Tzu-Chiang Chen, Yi-Tang Lin, Chih-Sheng Chang
  • Publication number: 20130175638
    Abstract: A method includes forming a gate stack including a gate electrode on a first semiconductor fin. The gate electrode includes a portion over and aligned to a middle portion of the first semiconductor fin. A second semiconductor fin is on a side of the gate electrode, and does not extend to under the gate electrode. The first and the second semiconductor fins are spaced apart from, and parallel to, each other. An end portion of the first semiconductor fin and the second semiconductor fin are etched. An epitaxy is performed to form an epitaxy region, which includes a first portion extending into a first space left by the etched first end portion of the first semiconductor fin, and a second portion extending into a second space left by the etched second semiconductor fin. A first source/drain region is formed in the epitaxy region.
    Type: Application
    Filed: January 9, 2012
    Publication date: July 11, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Cheng Ho, Tzu-Chiang Chen, Yi-Tang Lin, Chih-Sheng Chang
  • Publication number: 20130175584
    Abstract: A method includes providing a plurality of semiconductor fins parallel to each other, and includes two edge fins and a center fin between the two edge fins. A middle portion of each of the two edge fins is etched, and the center fin is not etched. A gate dielectric is formed on a top surface and sidewalls of the center fin. A gate electrode is formed over the gate dielectric. The end portions of the two edge fins and end portions of the center fin are recessed. An epitaxy is performed to form an epitaxy region, wherein an epitaxy material grown from spaces left by the end portions of the two edge fins are merged with an epitaxy material grown from a space left by the end portions of the center fin to form the epitaxy region. A source/drain region is formed in the epitaxy region.
    Type: Application
    Filed: January 9, 2012
    Publication date: July 11, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Cheng Ho, Tzu-Chiang Chen, Yi-Tang Lin, Chih-Shen Chang
  • Publication number: 20120012932
    Abstract: A FinFET device and method for fabricating a FinFET device is disclosed. An exemplary FinFET device includes a semiconductor substrate; a fin structure disposed over the semiconductor substrate; and a gate structure disposed on a portion of the fin structure. The gate structure traverses the fin structure and separates a source region and a drain region of the fin structure, the source and drain region defining a channel therebetween. The source and drain region of the fin structure include a strained source and drain feature. The strained source feature and the strained drain feature each include: a first portion having a first width and a first depth; and a second portion disposed below the first portion, the second portion having a second width and a second depth. The first width is greater than the second width, and the first depth is less than the second depth.
    Type: Application
    Filed: July 15, 2010
    Publication date: January 19, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsu-Hsiu Perng, Chih Chieh Yeh, Tzu-Chiang Chen, Chia-Cheng Ho, Chih-Sheng Chang
  • Patent number: 7542001
    Abstract: A dual broadband dipole array antenna has a grounding structure, a circuit module and two feeding boards. The grounding structure is a conductive hexagonal container with two open ends and has two opposite parallel panels. The circuit module is a transmitting antenna module, is phase reversible and has two feeding wires. The feeding wires of the circuit module are respectively mounted centrally through the parallel panels and each feeding wire is electrically connected to the corresponding feeding board. When in use, the dual broadband dipole array antenna transmits signals covering EGSM900 (880-960 MHz), GSM1800 (1710-1880 MHz) and PCS (1820-1970 MHz).
    Type: Grant
    Filed: September 17, 2007
    Date of Patent: June 2, 2009
    Assignee: National Defense University
    Inventors: Tzu-Chiang Chen, Wen-Kuan Su
  • Publication number: 20090073071
    Abstract: A dual broadband dipole array antenna has a grounding structure, a circuit module and two feeding boards. The grounding structure is a conductive hexagonal container with two open ends and has two opposite parallel panels. The circuit module is a transmitting antenna module, is phase reversible and has two feeding wires. The feeding wires of the circuit module are respectively mounted centrally through the parallel panels and each feeding wire is electrically connected to the corresponding feeding board. When in use, the dual broadband dipole array antenna transmits signals covering EGSM900 (880-960 MHz), GSM1800 (1710-1880 MHz) and PCS (1820-1970 MHz).
    Type: Application
    Filed: September 17, 2007
    Publication date: March 19, 2009
    Inventors: Tzu-Chiang CHEN, Wen-Kuan SU